High temperature operation of optically resonant microbeams

LEOS Summer Topical Meeting

Volumn , Issue , 1998, Pages 43-45

  Herb, W R ^a   Zook, J D ^a   Wilson, M L ^a   Bassett, C J ^a  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; ELECTRONICS PACKAGING; HIGH TEMPERATURE OPERATIONS; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED OPTOELECTRONICS; MASKS; MICROELECTROMECHANICAL DEVICES; OPTICAL SENSORS; SILICON NITRIDE; SILICON SENSORS; SILICON WAFERS; SINGLE CRYSTALS;

MICROBEAMS;

PHOTODETECTORS;

EID: 0031644096     PISSN: 10994742     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)