Sealed-cavity resonant microbeam accelerometer

Sensors and Actuators, A: Physical

Volumn 53, Issue 1-3, 1996, Pages 249-255

  Burns, D W ^a   Horning, R D ^a   Herb, W R ^a   Zook, J D ^a   Guckel, H ^b  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

Accelerometers; Microelectromechanical systems; Micromachining; Resonant sensors; Sensors

Indexed keywords

EID: 0000010862     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01135-1     Document Type: Article

References (13)

1. B.L. Norling, Superflex: a synergistic combination of vibrating beam and quartz flexure accelerometer technology, J. Inst. Navigation, 34 (1987-1988) 337-353.
2. W.J. Kass and G.S. Snow, Double-ended tuning fork quartz accelerometer, Proc. 40th Annual Frequency Control Symp., Philadelphia, PA, USA, 1986, pp. 230-236.
3. RBA500 Product Information, AlliedSignal Corp., Redmond, WA.
4. M. Helsel, G. Gassner, M. Robinson and J. Woodruff, A navigation-grade micromachined silicon accelerometer, Proc. IEEE Position Location and Navigation Symp., Las Vegas, NV, USA, 1994, pp. 51-58.
5. A. Kourepenis, A. Petrovich and M. Weinberg, Low-cost quartz resonant accelerometer for aircraft inertial navigation, Tech. Digest, 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 24-28 June, 1991, pp.551-553.
6. E. Peeters, S. Vergote, B. Puers, W. Sansen and K.U. Leuven, A highly symmetrical capacitive microaccelerometer with single-degree-of-freedom response, Tech. Digest, 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 24-28 June, 1991, pp.97-100.
7. W. Henrion, L. DiSanze, M. Ip, S. Terry and H. Jerman, Wide dynamic range direct digital accelerometer, IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, June 1990, pp. 153-157.
8. K. Warren, Electrostatically force-rebalanced silicon accelerometer, J. Inst. Navigation, 38 (1991) 91-99.
9. J.J. Sniegowski, H. Guckel and T.R. Christensen, Performance characteristics of second-generation polysilicon resonating beam force transducers, IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, June 1990, pp. 9-12.
10. H. Guckel, C. Rypstat, M. Nesnidal, J.D. Zook, D.W. Burns and D.K. Arch, Polysilicon resonant microbeam technology for high-performance sensor applicatons, 1992 IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 22-25 June, 1992, pp. 153-156.
11. D.W. Burns, J.D. Zook, R.D. Horning, W.R. Herb and H. Guckel, A digital pressure sensor based on resonant microbeams, 1994 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 13-16 June, 1994, pp. 221-224.
12. A. Reisman, M. Berkenblit, S.A. Chan, F.B. Kaufman and D.C. Green, The controlled etching of silicon in catalyzed ethylenediamine-pyrocatechol-water solutions, J. Electrochem. Soc., 126 (1979) 1406-1415.
13. B. Kloeck, S. Collins, N. de Rooij and R. Smith, Study of electrochemical etch-stop for high-precision thickness control of silicon membranes, IEEE Trans. Electron. Dev., 36 (1989) 663-669.