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Applied Physics Letters

Volumn 76, Issue 14, 2000, Pages 1839-1841

Defect annihilation in AIN thin films by ultrahigh temperature processing

(4) Fan, Z Y a Rong, G a Newman, N a Smith, David J b

a Northwestern University (United States)

b ARIZONA STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000279452 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.126185 Document Type: Article

Times cited : (39)

References (15)

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