SCOPUS 정보 검색 플랫폼

Journal of Crystal Growth

Volumn 178, Issue 1-2, 1997, Pages 102-112

The energetics of the GaN MBE reaction: A case study of meta-stable growth

(1) Newman, N a

a Northwestern University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MOLECULAR BEAM EPITAXY; NITRIDES; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR GROWTH; SYNTHESIS (CHEMICAL); THERMODYNAMICS; THIN FILMS; CRYSTAL GROWTH; FILM GROWTH; REACTION KINETICS;

PLASMA ENHANCED MOLECULAR BEAM EPITAXY; GALLIUM NITRIDES; METASTABLE SOLIDS;

SEMICONDUCTING FILMS;

EID: 0031150311 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(97)00083-3 Document Type: Article

Times cited : (79)

References (58)

1
- 5144225269
- Mater. Res, Soc., Pittsburgh, PA
- A.Y. Cho, MRS Bulletin (Mater. Res, Soc., Pittsburgh, PA, 1995) p. 21.
- (1995) MRS Bulletin , pp. 21
- Cho, A.Y.¹

2
- 0003827020
- Academic Press, New York
- J.Y. Tsao, Materials Fundamentals of Molecular Beam Epitaxy, (Academic Press, New York, 1993).
- (1993) Materials Fundamentals of Molecular Beam Epitaxy
- Tsao, J.Y.¹

3
- 0003494870
- Academic Press, New York
- J.L. Vossen and W. Kern, Thin-Film Processes (Academic Press, New York, 1978); J.L. Vossen and W. Kern, Thin-Film Processes II (Academic Press, New York, 1991).
- (1978) Thin-film Processes
- Vossen, J.L.¹ Kern, W.²

4
- 0003494876
- Academic Press, New York
- J.L. Vossen and W. Kern, Thin-Film Processes (Academic Press, New York, 1978); J.L. Vossen and W. Kern, Thin-Film Processes II (Academic Press, New York, 1991).
- (1991) Thin-film Processes II
- Vossen, J.L.¹ Kern, W.²

5
- 0001602699
- N. Newman, J. Ross and M. Rubin, Appl. Phys. Lett. 62 (1993) 1242; 63 (1993) 424.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 1242
- Newman, N.¹ Ross, J.² Rubin, M.³

6
- 0001602699
- N. Newman, J. Ross and M. Rubin, Appl. Phys. Lett. 62 (1993) 1242; 63 (1993) 424.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 424

7
- 0028750118
- N. Newman, T.C. Fu, X. Liu, Z. Liliental-Weber, M. Rubin, J.S. Chan, E. Jones, J.T. Ross, I. Tidswell, K.M. Yu, N. Cheung and E.R. Weber, Mater. Sci. Forum 339 (1994) 483.
- (1994) Mater. Sci. Forum , vol.339 , pp. 483
- Newman, N.¹ Fu, T.C.² Liu, X.³ Liliental-Weber, Z.⁴ Rubin, M.⁵ Chan, J.S.⁶ Jones, E.⁷ Ross, J.T.⁸ Tidswell, I.⁹ Yu, K.M.¹⁰ Cheung, N.¹¹ Weber, E.R.¹²

8
- 0000595682
- For a theoretical estimate for the melt temperature, see: J.A. Van Vechton, Phys. Rev. B 4 (1973) 1479. Experimentally, melting has not been achieved due to the practical difficulty in confining the high nitrogen pressures at these elevated temperatures.
- (1973) Phys. Rev. B , vol.4 , pp. 1479
- Van Vechton, J.A.¹

9
- 0002217382
- J. Karpinski and S. Porowski, J. Crystal Growth 66 (1984) 11.
- (1984) J. Crystal Growth , vol.66 , pp. 11
- Karpinski, J.¹ Porowski, S.²

10
- 49549138406
- and references therein
- R. Madar, G. Jacob, J. Hallais and R. Fruchart, J. Crystal Growth 31 (1975) 197, and references therein.
- (1975) J. Crystal Growth , vol.31 , pp. 197
- Madar, R.¹ Jacob, G.² Hallais, J.³ Fruchart, R.⁴

11
- 36449000214
- R.C. Powell, N.-E. Lee and J.E. Greene, Appl. Phys. Lett. 60 (1992) 2505.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2505
- Powell, R.C.¹ Lee, N.-E.² Greene, J.E.³

12
- 0029375787
- Z. Yang, L.K. Li and W.I. Wang, Appl. Phys. Lett. 67 (1995) 1686.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1686
- Yang, Z.¹ Li, L.K.² Wang, W.I.³

13
- 33645201890
- Z.A. Munir and A.W. Searcy, J. Chem. Phys. 42 (1965) 4223.
- (1965) J. Chem. Phys. , vol.42 , pp. 4223
- Munir, Z.A.¹ Searcy, A.W.²

14
- 0000095132
- R.C. Schoonmaker, A. Buhl and J. Lemley, J. Phys. Chem. 69 (1965) 3455.
- (1965) J. Phys. Chem. , vol.69 , pp. 3455
- Schoonmaker, R.C.¹ Buhl, A.² Lemley, J.³

15
- 30244452411
- note
- In contrast to the expected products from the kinetically limited reaction (6), Ga droplets are observed on the GaN surface after vacuum annealing (Ref. [22]). More accurate experimental work is required to determine whether the Ga (1) is formed prior to achieving steady-state conditions or whether reaction (5) occurs at a sufficiently slow rate that its presence was not detected by Munir and Searcy.

16
- 0039011861
- Ed. H. Reiss (Pergamon, New York)
- G.A. Somorjai and J.E. Lester, Progress in Solid State Chemistry, Vol. 4, Ed. H. Reiss (Pergamon, New York, 1967)
- (1967) Progress in Solid State Chemistry , vol.4
- Somorjai, G.A.¹ Lester, J.E.²

17
- 0041943633
- Eds. E. Rutner, P. Goldfinger and J.P. Hirth (Gordon and Breach, New York)
- D.L. Hildenbrand and W.F. Hall, Condensation and Evaporation of Solids, Eds. E. Rutner, P. Goldfinger and J.P. Hirth (Gordon and Breach, New York, 1964) p. 399.
- (1964) Condensation and Evaporation of Solids , pp. 399
- Hildenbrand, D.L.¹ Hall, W.F.²

18
- 0024909539
- R.H. Hammond and R. Bormann, Physica C1 62-164 (1989) 703.
- (1989) Physica C1 , vol.62-164 , pp. 703
- Hammond, R.H.¹ Bormann, R.²

19
- 0038160095
- R.C. Powell, G.A. Tomasch, Y.-W. Kim, J.A. Thornton and J.E. Greene, Mater. Res. Soc. Symp. Proc. 162 (1990) 525.
- (1990) Mater. Res. Soc. Symp. Proc. , vol.162 , pp. 525
- Powell, R.C.¹ Tomasch, G.A.² Kim, Y.-W.³ Thornton, J.A.⁴ Greene, J.E.⁵

20
- 0002775069
- M. Rubin, N. Newman, J.S. Chan, T.C. Fu and J.T. Ross, Appl. Phys. Lett. 64 (1994) 64.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 64
- Rubin, M.¹ Newman, N.² Chan, J.S.³ Fu, T.C.⁴ Ross, J.T.⁵

21
- 30244524486
- private communication
- C. Abernathy, private communication.
- Abernathy, C.¹

22
- 0003074687
- G.A. Somorjai, Science 162 (1968) 755.
- (1968) Science , vol.162 , pp. 755
- Somorjai, G.A.¹

23
- 0001471237
- H.F. Winters and E. Kay, J. Appl. Phys. 38 (1967) 3928.
- (1967) J. Appl. Phys. , vol.38 , pp. 3928
- Winters, H.F.¹ Kay, E.²

24
- 0016127240
- R. Groh, G. Gerey, L. Bartha and J.I. Pankove, Phys. Status Solidi 26 (1974) 353.
- (1974) Phys. Status Solidi , vol.26 , pp. 353
- Groh, R.¹ Gerey, G.² Bartha, L.³ Pankove, J.I.⁴

25
- 0024765115
- D.K. Brice, J.Y. Tsao and S.T. Picraux, Nucl. Instrum. Methods B 44 (1989) 68.
- (1989) Nucl. Instrum. Methods B , vol.44 , pp. 68
- Brice, D.K.¹ Tsao, J.Y.² Picraux, S.T.³

26
- 0003474039
- Commonwealth Scientific Corporation Press, Alexandria, VA
- H.R. Kaufman and R.S. Robinson, Operation of Broadbeam Sources, (Commonwealth Scientific Corporation Press, Alexandria, VA, 1984).
- (1984) Operation of Broadbeam Sources
- Kaufman, H.R.¹ Robinson, R.S.²

27
- 51249167483
- T.C. Fu, N. Newman, E. Jones, J.S. Chan, X. Liu, M.D. Rubin, N.W. Cheung and E.R. Weber, J. Electron. Mater. 24 (1995) 249.
- (1995) J. Electron. Mater. , vol.24 , pp. 249
- Fu, T.C.¹ Newman, N.² Jones, E.³ Chan, J.S.⁴ Liu, X.⁵ Rubin, M.D.⁶ Cheung, N.W.⁷ Weber, E.R.⁸

28
- 0001222537
- A. Anders, N. Newman, M. Rubin, M. Dickinson, A. Thomson, E. Jones, P. Phatak and A. Gassmann, Rev. Sci. Instrum. 67 (1996) 905.
- (1996) Rev. Sci. Instrum. , vol.67 , pp. 905
- Anders, A.¹ Newman, N.² Rubin, M.³ Dickinson, M.⁴ Thomson, A.⁵ Jones, E.⁶ Phatak, P.⁷ Gassmann, A.⁸

29
- 0022561313
- V.I. Miljevic, J. Appl. Phys. 59 (1986) 676; 60 (1986) 4109; Rev. Sci. Instrum. 55 (1984) 931; Appl. Opt. 23 (1984) 1598.
- (1986) J. Appl. Phys. , vol.59 , pp. 676
- Miljevic, V.I.¹

30
- 0343043122
- V.I. Miljevic, J. Appl. Phys. 59 (1986) 676; 60 (1986) 4109; Rev. Sci. Instrum. 55 (1984) 931; Appl. Opt. 23 (1984) 1598.
- (1986) J. Appl. Phys. , vol.60 , pp. 4109

31
- 0021442370
- V.I. Miljevic, J. Appl. Phys. 59 (1986) 676; 60 (1986) 4109; Rev. Sci. Instrum. 55 (1984) 931; Appl. Opt. 23 (1984) 1598.
- (1984) Rev. Sci. Instrum. , vol.55 , pp. 931

32
- 0021424128
- V.I. Miljevic, J. Appl. Phys. 59 (1986) 676; 60 (1986) 4109; Rev. Sci. Instrum. 55 (1984) 931; Appl. Opt. 23 (1984) 1598.
- (1984) Appl. Opt. , vol.23 , pp. 1598

33
- 0003494116
- American Institute of Physics Press, New York
- A. von Engel, Ionized Gases (American Institute of Physics Press, New York, 1993).
- (1993) Ionized Gases
- Von Engel, A.¹

34
- 0004256095
- Academic Press, New York
- A.N. Wright and C.A. Winkler, Active nitrogen (Academic Press, New York, 1968).
- (1968) Active Nitrogen
- Wright, A.N.¹ Winkler, C.A.²

35
- 30244533088
- private communication
- P. Phatak, A. Anders, J. Chan and N. Newman, private communication.
- Phatak, P.¹ Anders, A.² Chan, J.³ Newman, N.⁴

36
- 0342886419
- Z. Liliental-Weber, H. Sohn, N. Newman and J. Washburn, J. Vac. Sci. Technol. B 13 (1995) 1578; Z. Liliental-Weber, S. Ruvimov, C. Kisielowski, Y. Chen, W. Swider, J. Washburn, N. Newman, A. Gassman, X. Liu, L. Schloss, E.R. Weber, I. Grzegory, M. Bockowski, J. Jun, T. Suski, K. Pakula, J. Baranowski, S. Porowski, H. Amano and I. Akasaki, Mater. Res. Soc. Symp. Proc. 395 (1996) 351.
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 1578
- Liliental-Weber, Z.¹ Sohn, H.² Newman, N.³ Washburn, J.⁴

37
- 0029771078
- Z. Liliental-Weber, H. Sohn, N. Newman and J. Washburn, J. Vac. Sci. Technol. B 13 (1995) 1578; Z. Liliental-Weber, S. Ruvimov, C. Kisielowski, Y. Chen, W. Swider, J. Washburn, N. Newman, A. Gassman, X. Liu, L. Schloss, E.R. Weber, I. Grzegory, M. Bockowski, J. Jun, T. Suski, K. Pakula, J. Baranowski, S. Porowski, H. Amano and I. Akasaki, Mater. Res. Soc. Symp. Proc. 395 (1996) 351.
- (1996) Mater. Res. Soc. Symp. Proc. , vol.395 , pp. 351
- Liliental-Weber, Z.¹ Ruvimov, S.² Kisielowski, C.³ Chen, Y.⁴ Swider, W.⁵ Washburn, J.⁶ Newman, N.⁷ Gassman, A.⁸ Liu, X.⁹ Schloss, L.¹⁰ Weber, E.R.¹¹ Grzegory, I.¹² Bockowski, M.¹³ Jun, J.¹⁴ Suski, T.¹⁵ Pakula, K.¹⁶ Baranowski, J.¹⁷ Porowski, S.¹⁸ Amano, H.¹⁹ Akasaki, I.²⁰ more..

38
- 0000851605
- A. Gassmann, T. Suski, Z. Liliental Weber, N. Newman, C. Kisielowski, E. Jones and E.R. Weber, J. Appl. Phys. 80 (1996) 2195.
- (1996) J. Appl. Phys. , vol.80 , pp. 2195
- Gassmann, A.¹ Suski, T.² Liliental Weber, Z.³ Newman, N.⁴ Kisielowski, C.⁵ Jones, E.⁶ Weber, E.R.⁷

39
- 0001357711
- C.D. Thurmond and R.A. Logan, Solid State Sci. Technol. 119 (1972) 622.
- (1972) Solid State Sci. Technol. , vol.119 , pp. 622
- Thurmond, C.D.¹ Logan, R.A.²

40
- 0014838808
- A.J.B. MacChesney, P.M. Bridenbaugh and P.B. O'Connor, Mater. Res. Bull. 5 (1970) 783.
- (1970) Mater. Res. Bull. , vol.5 , pp. 783
- MacChesney, A.J.B.¹ Bridenbaugh, P.M.² O'Connor, P.B.³

41
- 21544438299
- J. Karpinski, J. Jun and S. Porowski, J. Crystal Growth 66 (1984) 1.
- (1984) J. Crystal Growth , vol.66 , pp. 1
- Karpinski, J.¹ Jun, J.² Porowski, S.³

42
- 30244459003
- R. Juza and H. Hahn, Z. Anorg. Z. Chem. 244 (1940) 111, 133.
- (1940) Z. Anorg. Z. Chem. , vol.244 , pp. 111
- Juza, R.¹ Hahn, H.²

43
- 0002223599
- M.R. Lorenz and B.B. Binkowski, J. Electrochem. Soc. 109 (1962) 24.
- (1962) J. Electrochem. Soc. , vol.109 , pp. 24
- Lorenz, M.R.¹ Binkowski, B.B.²

44
- 0017541926
- K. Gilleson, K.-H. Schuller and B. Struck, Mater. Res. Bull. 12 (1977) 955.
- (1977) Mater. Res. Bull. , vol.12 , pp. 955
- Gilleson, K.¹ Schuller, K.-H.² Struck, B.³

45
- 0007812494
- T. Lei, T.D. Mouststaka, R.J. Graham, Y. He and S.J. Berkowitz, J. Appl. Phys. 71 (1992) 4933; M.J. Paisley, Z. Sitar, J.B. Posthill and R.F. Davis, J. Vac. Sci. Technol. A 7 (1989) 701; G. Martin, S. Strite, J. Thornton and H. Markoc, Appl. Phys. Lett. 58 (1991) 2375.
- (1992) J. Appl. Phys. , vol.71 , pp. 4933
- Lei, T.¹ Mouststaka, T.D.² Graham, R.J.³ He, Y.⁴ Berkowitz, S.J.⁵

46
- 77956669164
- T. Lei, T.D. Mouststaka, R.J. Graham, Y. He and S.J. Berkowitz, J. Appl. Phys. 71 (1992) 4933; M.J. Paisley, Z. Sitar, J.B. Posthill and R.F. Davis, J. Vac. Sci. Technol. A 7 (1989) 701; G. Martin, S. Strite, J. Thornton and H. Markoc, Appl. Phys. Lett. 58 (1991) 2375.
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 701
- Paisley, M.J.¹ Sitar, Z.² Posthill, J.B.³ Davis, R.F.⁴

47
- 0001138826
- T. Lei, T.D. Mouststaka, R.J. Graham, Y. He and S.J. Berkowitz, J. Appl. Phys. 71 (1992) 4933; M.J. Paisley, Z. Sitar, J.B. Posthill and R.F. Davis, J. Vac. Sci. Technol. A 7 (1989) 701; G. Martin, S. Strite, J. Thornton and H. Markoc, Appl. Phys. Lett. 58 (1991) 2375.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 2375
- Martin, G.¹ Strite, S.² Thornton, J.³ Markoc, H.⁴

48
- 0026244249
- Shuji Nakamura, Jpn. J. Appl. Phys. 30 (1991) L1705; M. Asif Khan, J.N. Kuznia, J.M. Van Hove, D.T. Olson, S. Krishnankutty and R.M. Kolbas, Appl. Phys. Lett. 58 (1991) 526; P. Kung, A. Saxler, X. Zhang, D. Walker, T.C. Wang, I. Ferguson and M. Razeghi, Appl. Phys. Lett. 66 (1995) 2958.
- (1991) Jpn. J. Appl. Phys. , vol.30
- Nakamura, S.¹

49
- 0043209288
- Shuji Nakamura, Jpn. J. Appl. Phys. 30 (1991) L1705; M. Asif Khan, J.N. Kuznia, J.M. Van Hove, D.T. Olson, S. Krishnankutty and R.M. Kolbas, Appl. Phys. Lett. 58 (1991) 526; P. Kung, A. Saxler, X. Zhang, D. Walker, T.C. Wang, I. Ferguson and M. Razeghi, Appl. Phys. Lett. 66 (1995) 2958.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 526
- Asif Khan, M.¹ Kuznia, J.N.² Van Hove, J.M.³ Olson, D.T.⁴ Krishnankutty, S.⁵ Kolbas, R.M.⁶

50
- 0029307045
- Shuji Nakamura, Jpn. J. Appl. Phys. 30 (1991) L1705; M. Asif Khan, J.N. Kuznia, J.M. Van Hove, D.T. Olson, S. Krishnankutty and R.M. Kolbas, Appl. Phys. Lett. 58 (1991) 526; P. Kung, A. Saxler, X. Zhang, D. Walker, T.C. Wang, I. Ferguson and M. Razeghi, Appl. Phys. Lett. 66 (1995) 2958.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 2958
- Kung, P.¹ Saxler, A.² Zhang, X.³ Walker, D.⁴ Wang, T.C.⁵ Ferguson, I.⁶ Razeghi, M.⁷

51
- 0342329997
- H. Sato, T. Sasaki, T. Matsuoka and A. Katsui, Jpn. J. Appl. Phys. 29 (1990) 1654.
- (1990) Jpn. J. Appl. Phys. , vol.29 , pp. 1654
- Sato, H.¹ Sasaki, T.² Matsuoka, T.³ Katsui, A.⁴

52
- 0001112505
- T. Matsuoka, H. Tanaka, T. Sasaki and A. Katsui, Inst. Phys. Conf. Ser.: GaAs Related Compounds 106 (1989) 141.
- (1989) Inst. Phys. Conf. Ser.: GaAs Related Compounds , vol.106 , pp. 141
- Matsuoka, T.¹ Tanaka, H.² Sasaki, T.³ Katsui, A.⁴

53
- 0028752535
- T.J. Kistenmacher, S.A. Ecelberger and W.A. Bryden, Mater. Res. Soc. Symp. Proc. 339 (1994) 509; T.J. Kistenmacher and W.A. Bryden, Appl. Phys. Lett. 62 (1993) 1221.
- (1994) Mater. Res. Soc. Symp. Proc. , vol.339 , pp. 509
- Kistenmacher, T.J.¹ Ecelberger, S.A.² Bryden, W.A.³

54
- 0005382865
- T.J. Kistenmacher, S.A. Ecelberger and W.A. Bryden, Mater. Res. Soc. Symp. Proc. 339 (1994) 509; T.J. Kistenmacher and W.A. Bryden, Appl. Phys. Lett. 62 (1993) 1221.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 1221
- Kistenmacher, T.J.¹ Bryden, W.A.²

55
- 0028752220
- W.A. Bryden, S.A. Ecelberger, M.E. Hawley and T.J. Kistenmacher, Mater. Res. Soc. Symp. Proc. 339 (1994) 497.
- (1994) Mater. Res. Soc. Symp. Proc. , vol.339 , pp. 497
- Bryden, W.A.¹ Ecelberger, S.A.² Hawley, M.E.³ Kistenmacher, T.J.⁴

56
- 21844508075
- C.R. Abernathy, J.D. MacKenzie, S.R. Bharatan, K.S. Jones and S.J. Pearton, J. Vac. Sci. Technol. A 13 (1995) 716.
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 716
- Abernathy, C.R.¹ MacKenzie, J.D.² Bharatan, S.R.³ Jones, K.S.⁴ Pearton, S.J.⁵

57
- 0001331198
- I. Grzegory, J. Jun, M. Bockowski, St. Krukowski, M. Wroblewski, B. Lucznik and S. Porowski, J. Phys. Chem. Solids 56 (1995) 639.
- (1995) J. Phys. Chem. Solids , vol.56 , pp. 639
- Grzegory, I.¹ Jun, J.² Bockowski, M.³ St. Krukowski⁴ Wroblewski, M.⁵ Lucznik, B.⁶ Porowski, S.⁷

58
- 0014838808
- J.B. MacChesney, P.M. Bridenbaugh and P.B. O'Connor, Mater. Res. Bull. 5 (1970) 783.
- (1970) Mater. Res. Bull. , vol.5 , pp. 783
- MacChesney, J.B.¹ Bridenbaugh, P.M.² O'Connor, P.B.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.