MEMS thermopneumatic silicone membrane valve

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 114-118

  Yang, Xing ^a   Grosjean, Charles ^a   Tai, Yu Chong ^a   Ho, Chih Ming ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELASTIC MODULI; MEMBRANES; MICROELECTROMECHANICAL DEVICES; PNEUMATIC CONTROL EQUIPMENT; RUBBER APPLICATIONS; SEALING (CLOSING); SILICON WAFERS; SILICONES; THERMAL EFFECTS;

SILICONE RUBBER VALVE MEMBRANES; THERMOPNEUMATIC ACTUATORS;

VALVES (MECHANICAL);

EID: 0030644918     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)