Microfluidic MEMS

IEEE Aerospace Conference Proceedings

Volumn 1, Issue , 1998, Pages 471-486

  Henning, Albert K ^a  

^a Redwood Microsystems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GASES; INDUSTRIAL RESEARCH; INTEGRAL EQUATIONS; INTEGRATION; MEMS; PRESSURE REGULATORS; PUMPS; VACUUM APPLICATIONS; VALVES (MECHANICAL); ACTUATORS; FLOW CONTROL; FLUIDICS; PNEUMATIC CONTROL EQUIPMENT; PRESSURE EFFECTS; SAFETY VALVES; THERMAL EFFECTS;

FUNCTIONAL INTEGRATION; LEVEL OF INTEGRATIONS; MASS FLOW CONTROLLER; MECHANICAL BEHAVIOR; MICRO ELECTRO MECHANICAL SYSTEM; MICROFLUIDIC COMPONENTS; REFRIGERATION CONTROLS; SCIENCE AND TECHNOLOGY;

MICROFLUIDICS; MICROELECTROMECHANICAL DEVICES;

EXPANSION VALVES; LEAK RATE SHUTOFF VALVES; MICROFLUIDIC MICROELECTROMECHANICAL SYSTEMS; THERMOPNEUMATIC ACTUATION; THERMOPNEUMATIC MICROVALVES;

EID: 0031631557     PISSN: 1095323X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/AERO.1998.686945     Document Type: Conference Paper

References (16)

1. M. J. Zdeblick and J. B. Angeli, In Proceedings, Transducers '86 (1986 Infi. Conf. Sol. State Sens, and Act), pp. 827-829 [IEEE, Piscataway, NJ, 1986]
2. M. Zdeblick, "A planar process for an electric-to-fluidic valve." Ph.D. Dissertation, Stanford University, June, 1988
3. M. Zdeblick, "Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator." U.S. Patent 4, 821, 997 (1989).
4. P. W. Barth, "Silicon microvalves for gas flow control." In Proceedings, Transducers '95 (1995 Int'l. Conf. Sol. State Sens, and Act.), pp. 276-279 [IEEE, Piscataway, NJ, 1995]; and references therein.
5. J. Robertson, "An electrostatically-actuated integrated microflow controller." Ph.D. Dissertation, U. Michigan, 1996.
6. D. Hopkins, "Electrochemical actuator, and method of making same." U.S. Patent 5, 671, 905 (1997).
7. A. K. Henning, et al, "A thermopneumatically actuated microvalve for liquid expansion and proportional control." In Proceedings, Transducers '97 (1997 Int'I. Conf. Sol. State Sens, and Act.), pp. 825-828 [IEEE, Piscataway, NJ, 1997]
8. Frank M. White, Fluid Mechanics. McGraw-Hill (New York, 1979)
9. Mario di Giovanni, Flat and Corrugated Diaphragm Design Handbook. Marcel Dekker (New York, 1982)
10. A Cooperative Research and Development Agreement between Redwood Microsystems and Lawrence Livermore National Lab led to this rinding. Patent application in progress.
11. The National Technology Roadmap for Semiconductors. 1994 (Semiconductor Industry Association, San Jose, CA)
12. See, for instance, papers presented in the "Manufacturing Science and Technology Technical Group" sessions of the 43rd National Symposium of the American Vacuum Society, Philadelphia, PA, October 14-18, 1996.
13. J. Cestari, D. Laureta, and H. Itafuji, "The next step in process gas delivery: a fully integrated system." Semiconductor International, January 1997, pp. 79-87.
14. A. F. Flannery, et al, "PECVD silicon carbide for micromachined transducers." In Proceedings, Transducers '97 (1997 Int'l. Conf. Sol. State Sens, and Act), pp. 217221 [IEEE, Piscataway, NJ, 1991]
15. S. Shoji, B. Van der Schoot, N. De Rooij, and M. Esashi, "Smallest dead volume microvalves for integrated chemical analyzing systems." In Proceedings, Transducers '91 (1991 Int'l. Conf. Sol. State Sens, and Act.), pp. 1052-5 [IEEE Press, Piscataway, NJ, 1991]
16. See the Fluistor™ product literature and specifications from Redwood Microsystems (e.g., http://www.redwoodmicro.com).