Fabrication process for a microfluidic valve

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn 4, Issue , 2003, Pages

  Luque, Antonio ^a   Quero, José M ^a   Hibert, Cyrille ^b   Flückiger, Philippe ^b  

^a UNIVERSITY OF SEVILLE   (Spain)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; FABRICATION; FOUNDRIES; HIGH PRESSURE EFFECTS; MACHINE DESIGN;

FLUID PRESSURE; MICROFLUIDICS;

VALVES (MECHANICAL);

EID: 0038080928     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. E. T. Carlen and C. H. Mastrangelo, "Paraffin actuated surface micromachined valve," in 13th IEEE Intl. Micro Electro Mechanical Systems Conference, 2000.
2. J. Braneberg and P. Gravesen, "A new electrostatic actuator providing improved stroke length and force," in Proc. of Micro Electro Mechanical Systems, Feb 1992, pp. 6-10.
3. J. M. Quero, A. Luque, and L. G. Franquelo, "A novel pressure balanced microfluidic valve," in IEEE Intl. Symposium on Circuits and Systems (ISCAS), 2002, vol. 2, pp. 588-591.
4. A. Luque, F. R. Palomo, and J. M. Quero, "Analysis and simulation of a microfluidic valve," in XVII Conference on Design of Circuits and Integrated Systems (DCIS), Nov 2002.
5. Cyrille Hibert, Willy Dufour, and Philippe Flückiger, "Deep anisotropic etching of silicon using low pressure high density plasma, presentation of complementary techniques and their applications in microtechnology," in Intl. Symposium on Plasma Chemistry, Jul 2001.
6. 2 gas mixtures," J. Electrochem. Soc, vol. 138, no. 10, pp. 3076-3081, 1991.
7. A. Schilp, M. Hausner, M. Puech, N. Launay, H. Karagoezoglu, and F. Laermer, "Advanced etch tool for high etch rate deep reactive ion etching in silicon micromachining production environment," in Proceedings MST, 2001.
8. M. Takinami, K. Minami, and M. Esashi, "High-speed directional low-temperature dry etching for bulk silicon micromachining," in Digests of the 11th Sensor Symposium, 1992, pp. 15-28.
9. 6: experimental and reactor modeling studies," J. Electrochem. Soc, vol. 137, no. 11, pp. 3633-3638, Nov. 1990.
10. J. L. Seeger and B. E. Boser, "Dynamics and control of parallel-plate actuators beyond the electrostatic unstability," in Proc. Intl. Conf. on Solid-State Sensors and Actuators (Transducers'99), Jun 1999, pp. 474-477.
11. E. K. Chan and R. W. Dutton, "Electrostatic micromechanical actuator with extended range of travel," J. Microelectromech. Syst., vol. 9, pp. 321-328, Sept 2000.
12. M. A. Huff, J. R. Gilbert, and M. A. Schmidt, "Flow characteristics of a pressure-balanced microvalve," in Tech. Dig. of Transducers'93, 1993, pp. 98-101.