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Volumn 473, Issue 1, 2005, Pages 89-97

Chemical, optical, vibrational and luminescent properties of hydrogenated silicon-rich oxynitride films

Author keywords

Ellipsometry; Photoluminescence; Silicon rich silicon oxynitride; Thin film; XPS

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; SILICA; SILICON NITRIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 9744279752     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.07.054     Document Type: Article
Times cited : (13)

References (27)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.