Combining Brillouin spectroscopy and laser-SAW technique for elastic property characterization of thick DLC films

Ultrasonics

Volumn 43, Issue 2, 2004, Pages 87-93

  Berezina, Sofia ^a,d   Zinin, Pavel V ^a   Schneider, Dieter ^b   Fei, Dong ^c   Rebinsky, Douglas A ^c  

^a UNIVERSITY OF HAWAII   (United States)

^b FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

^c CATERPILLAR INC   (United States)

^d UNIVERSITY OF ILINA   (Slovakia)

Author keywords

Elastic property; Laser SAW technique; Surface Brillouin spectroscopy; Thin film coating

Indexed keywords

ACOUSTIC WAVES; BRILLOUIN SCATTERING; CHARACTERIZATION; ELASTIC MODULI; POISSON RATIO; SHEAR WAVES; SILICON WAFERS; WAVE PROPAGATION;

ELASTIC PROPERTY; LASER-SAW TECHNIQUE; SURFACE BRILLOUIN SPECTROSCOPY; THIN FILM COATINGS;

DIAMOND LIKE CARBON FILMS;

EID: 9644272878     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultras.2004.03.006     Document Type: Article

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