SCOPUS 정보 검색 플랫폼

Volumn 153, Issue 2-3, 2002, Pages 252-260

Quality control of ultra-thin and super-hard coatings by laser-acoustics

(9) Schneider, Dieter a Siemroth, Peter a Schülke, Thomas b Berthold, Jan a Schultrich, Bernd a Schneider, Hans Hermann c Ohr, Ralf c Petereit, Bernd c Hillgers, Heinz c

a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS (Germany)

b Fraunhofer USA Center for Surface and Laser Processing (United States)

c IBM (Germany)

Author keywords

Diamond like carbon; High current pulsed arc deposition; Laser acoustics; Nanometer films; Scratch resistance; Young's modulus

Indexed keywords

ACOUSTIC WAVES; ADHESION; AMORPHOUS FILMS; ELASTIC MODULI; HARDNESS; LASER APPLICATIONS; OPTIMIZATION; POROSITY; QUALITY CONTROL; STIFFNESS; SUBSTRATES; ULTRATHIN FILMS;

LASER ACOUSTICS;

COATING TECHNIQUES;

COATING; DIAMOND-LIKE CARBON; HARDNESS; TESTING METHOD; WEAR RESISTANCE;

EID: 0037091062 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(01)01664-4 Document Type: Article

Times cited : (53)

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