SCOPUS 정보 검색 플랫폼

Volumn 457-460, Issue I, 2004, Pages 477-480

Spin dependent recombination at deep-level centers in 6H silicon carbide/silicon metal oxide semiconductor field effect transistors

(4) Meyer, D J a Bohna, N A a Lenahan, P M a Lelis, A b

a PENNSYLVANIA STATE UNIVERSITY (United States)

b U S ARMY RESEARCH LABORATORY (United States)

Author keywords

Electron Spin Resonance; Interface States; Trapping Centers

Indexed keywords

ANNEALING; INTERFACES (MATERIALS); MOSFET DEVICES; PARAMAGNETIC RESONANCE; PROBABILITY; SEMICONDUCTOR MATERIALS; SPECTROMETERS;

INTERFACE DEFECTS; INTERFACE STATES; SEMICONDUCTOR BANDGAP; TRAPPING CENTERS;

SILICON CARBIDE;

EID: 8744262823 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.457-460.477 Document Type: Conference Paper

Times cited : (11)

References (22)

1
- 0033096736
- L.A. Lipkin and J.W. Palmour: IEEE Trans. On Electron Dev. Vol. 46 (1999), p. 525.
- (1999) IEEE Trans. on Electron Dev. , vol.46 , pp. 525
- Lipkin, L.A.¹ Palmour, J.W.²

2
- 0031189326
- J.A. Cooper: Phys. Stat. Sol. (a) Vol. 162 (1997), p. 305.
- (1997) Phys. Stat. Sol. (A) , vol.162 , pp. 305
- Cooper, J.A.¹

3
- 18644363008
- S.K. Powell, N. Goldsman, J.M. McGarrity, J. Bernstein, C.J. Scozzie and A. Lelis: J. Appl. Phys. Vol. 92 (2002), p. 4054.
- (2002) J. Appl. Phys. , vol.92 , pp. 4054
- Powell, S.K.¹ Goldsman, N.² McGarrity, J.M.³ Bernstein, J.⁴ Scozzie, C.J.⁵ Lelis, A.⁶

4
- 0001441489
- H. Li, S. Dimitrijev, H.B. Harrison and D. Sweatman: Appl. Phys. Lett. Vol. 70 (1997), p. 2028.
- (1997) Appl. Phys. Lett. , vol.70 , pp. 2028
- Li, H.¹ Dimitrijev, S.² Harrison, H.B.³ Sweatman, D.⁴

5
- 2542490222
- H. Li, S. Dimitrijev, H.B. Harrison and D. Sweatman: Appl. Phys. Lett. Vol. 76 (2000), p. 1585.
- (2000) Appl. Phys. Lett. , vol.76 , pp. 1585
- Li, H.¹ Dimitrijev, S.² Harrison, H.B.³ Sweatman, D.⁴

6
- 0000397834
- G.Y. Chung, C.C. Tin, J.R. Williams, K. McDonald, M. Di Ventra, S.T. Pantelides, L.C. Feldman and R. A. Weller: Appl. Phys. Lett. Vol. 76 (2000), p. 1713.
- (2000) Appl. Phys. Lett. , vol.76 , pp. 1713
- Chung, G.Y.¹ Tin, C.C.² Williams, J.R.³ McDonald, K.⁴ Di Ventra, M.⁵ Pantelides, S.T.⁶ Feldman, L.C.⁷ Weller, R.A.⁸

7
- 11644278982
- P.M. Lenahan and J.F. Conley, Jr.: J. Vac. Sci. Technol. B Vol. 16 (1998), p. 2134.
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 2134
- Lenahan, P.M.¹ Conley Jr., J.F.²

8
- 0025419448
- P.M. Lenahan and M.A. Jupina: Colloids and Surfaces Vol. 45 (1990), p. 191.
- (1990) Colloids and Surfaces , vol.45 , pp. 191
- Lenahan, P.M.¹ Jupina, M.A.²

9
- 0346539170
- D.J. Lepine: Phys. Rev. B Vol. 6 (1972), p. 436.
- (1972) Phys. Rev. B , vol.6 , pp. 436
- Lepine, D.J.¹

10
- 33748621800
- W. Shockley and W.T. Read Jr.: Phys. Rev. Vol. 87 (1952), p. 835.
- (1952) Phys. Rev. , vol.87 , pp. 835
- Shockley, W.¹ Read Jr., W.T.²

11
- 0012057879
- R.N. Hall: Phys. Rev. Vol. 87 (1951), p. 387.
- (1951) Phys. Rev. , vol.87 , pp. 387
- Hall, R.N.¹

12
- 0025594544
- H. Itoh, M. Yoshikawa, I. Nashiyama, S. Misawa, H. Okumura and S. Yoshida: IEEE T. Nuc. Sci. Vol. 37 (1990), p. 1732.
- (1990) IEEE T. Nuc. Sci. , vol.37 , pp. 1732
- Itoh, H.¹ Yoshikawa, M.² Nashiyama, I.³ Misawa, S.⁴ Okumura, H.⁵ Yoshida, S.⁶

13
- 3743135129
- D.Cha, H.I toh, N. Morishita, A. Kawasuso, T. Ohshima, Y. Watanabe, J. Ko, K. Lee and I. Nashiyama: Mater. Sci. Forum Vols. 264-268 (1998), p. 615.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 615
- Cha, D.¹ Toh, H.I.² Morishita, N.³ Kawasuso, A.⁴ Ohshima, T.⁵ Watanabe, Y.⁶ Ko, J.⁷ Lee, K.⁸ Nashiyama, I.⁹

14
- 0642304912
- T. Wimbauer, B.K. Meyer, A. Hofstaetter, A. Scharmann and H. Overhoff: Phys. Rev. B Vol. 56 (1997), p. 7384.
- (1997) Phys. Rev. B , vol.56 , pp. 7384
- Wimbauer, T.¹ Meyer, B.K.² Hofstaetter, A.³ Scharmann, A.⁴ Overhoff, H.⁵

15
- 0000231842
- E. Sörman, N.T. Son, W.M. Chen, O. Kordina, C. Hallin, and E. Janzén: Phys. Rev. B Vol. 61 (2000), p. 2613.
- (2000) Phys. Rev. B , vol.61 , pp. 2613
- Sörman, E.¹ Son, N.T.² Chen, W.M.³ Kordina, O.⁴ Hallin, C.⁵ Janzén, E.⁶

16
- 0035894320
- Article 245212
- Th. Lingner, S. Greulich-Weber, J.-M. Spaeth, U. Gerstmann, E. Rauls, Z. Hajnal, Th. Frauenheim and H. Overhof: Phys. Rev. B Vol. 64 (2001) Article 245212.
- (2001) Phys. Rev. B , vol.64
- Lingner, T.¹ Greulich-Weber, S.² Spaeth, J.-M.³ Gerstmann, U.⁴ Rauls, E.⁵ Hajnal, Z.⁶ Frauenheim, T.⁷ Overhof, H.⁸

17
- 34247215551
- Mt. Wagner, T. N.Q., N.T. Son, P.G. Baranov, E.N. Mokhov, C. Hallin, W.M. Chen and E. Janzén: Mater. Sci. Forum Vols. 389-393 (2002), p. 501.
- (2002) Mater. Sci. Forum , vol.389-393 , pp. 501
- Wagner, M.¹ Q., T.N.² Son, N.T.³ Baranov, P.G.⁴ Mokhov, E.N.⁵ Hallin, C.⁶ Chen, W.M.⁷ Janzén, E.⁸

18
- 0038195883
- Article 155214
- Mt. Wagner, T. N.Q., N.T. Son, W.M. Chen, E. Janzén, P.G. Baranov, E.N. Mokhov, C. Hallin and J.L. Lindström: Phys Rev B Vol. 66 (2002) Article 155214.
- (2002) Phys Rev B , vol.66
- Wagner, M.¹ Q., T.N.² Son, N.T.³ Chen, W.M.⁴ Janzén, E.⁵ Baranov, P.G.⁶ Mokhov, E.N.⁷ Hallin, C.⁸ Lindström, J.L.⁹

19
- 0037542695
- Article 125207
- S.B. Orlinksi, J. Schmidt, E.N. Mokhov and P.G. Baranov: Phys Rev B Vol. 67 (2003) Article 125207.
- (2003) Phys Rev B , vol.67
- Orlinksi, S.B.¹ Schmidt, J.² Mokhov, E.N.³ Baranov, P.G.⁴

20
- 49949136852
- A.S. Grove and D.J. Fitzgerald: Solid-State Electron Vol. 9 (1966), p. 783.
- (1966) Solid-State Electron , vol.9 , pp. 783
- Grove, A.S.¹ Fitzgerald, D.J.²

21
- 0000617308
- D.J. Fitzgerald and A.S. Grove: Surf. Sci. Vol. 9 (1968), p. 347.
- (1968) Surf. Sci. , vol.9 , pp. 347
- Fitzgerald, D.J.¹ Grove, A.S.²

22
- 84930881640
- E.H. Snow, A.S. Grove and D.J. Fitzgerald: Proc. IEEE Vol. 55 (1967), p. 1168.
- (1967) Proc. IEEE , vol.55 , pp. 1168
- Snow, E.H.¹ Grove, A.S.² Fitzgerald, D.J.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.