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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2134-2153

What can electron paramagnetic resonance tell us about the Si/SiO2 system?

(2) Lenahan, P M a Conley Jr , J F b

a PENNSYLVANIA STATE UNIVERSITY (United States)

b DYNAMICS RESEARCH CORPORATION (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11644278982 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (341)

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