High-performance of 70 nm T-gate InGaAs/InAlAs metamorphic HEMTs on GaAs substrates

Journal of the Korean Physical Society

Volumn 45, Issue 4, 2004, Pages 1089-1092

  Kim, Sung Chan ^a   Lim, Byeong Ok ^a   Baek, Tae Jong ^a   Ko, Baek Seok ^a   Shin, Dong Hoon ^a   Rhee, Jin Koo ^a  

^a Dongguk University   (South Korea)

Author keywords

70 nm T gate; InGaAs InAlAs GaAs MHEMT; ZEP520 P(MMA MAA) PMMA tri layer

Indexed keywords

EID: 8644260186     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

1. D. W. Tu, S. Wang, J. S. M. Liu, K. C. Hwang, W. Kong, P. C. Chao and K. Nichlos, IEEE Microwave and Guided Lett. 9, 458 (1999).
2. Jae Yeob Shim, Hyung Sup Yoon, Sung Jin Kim, Ju Yeon Hong, Woo Jin Chang, Dong Min Kang, Jin Hee Lee and Kyung Ho Lee, J. Korean Phys. Soc. 41, 528 (2002).
3. B. H. Lee, D.-H. Shin, S.-D. Kim and J. K. Rhee, J. Korean Phys. Soc. 43, 427 (2003).
4. Jae Yeob Shim, Hyung Sup Yoon, Jin Hee Lee, Ju Yeon Hong, Hae Cheon Kim, Kyoung Ik Cho, Sung Chan Kim, Byeong Ok Lim, Dong Hoon Shin and Jin Koo Rhee, J. Korean Phys. Soc. 44, 144 (2004).
5. Y. Yamashita, A. Endoh, K. Shinohara, K. Hikosaka, T. Matsui, S. Hiyamizu and T. Mimura, IEEE Elec. Dev. Lett. 23, 573 (2002).
6. K. Shinohara, Y. Yamashita, A. Endoh, I. Watanabe, K. Hikosaka, T. Matsui, T. Mimura and S. Hiyamizu, IEEE Elec. Dev. Lett. 25, 241 (2004).
7. A. Endoh, Y. Yamashita, M. Higashiwaki, K. Hikosaka, T, Mimura, S. Hiyamizu and T. Matsui, IEEE Indium Phosphide and Related Materials. 2000 Conference Proceedings, (Williamsburg, Virginia, USA, 2000) p. 87.
8. Xin Cao, Iain Thayne, Stephen Thomas, Martin Holland and Colin Stanley, IEEE European Solid-State Device Research, ESSDERC 2003, 33rd Conference Proceedings, (Estoril, Portucal, 2003) p. 517.
9. S. Bollaert, Y. Cordier, M. Zaknoue, H. Happy, S. Lepilliet and A. Gappy, IEEE Indium Phosphide and Related Materials, 2001 Conference Proceedings, (Nara, Japan, 2001) p. 192.
10. A. Leuther, A. Tessmann, M. Dammann, W. Reinert, M. Schlechtweg, M. Mikulla, M. Walther and G. Weimann, IEEE Indium Phosphide and Related Materials, 2003 Conference Proceedings, (Santa Barbara, California, 2003) p. 215.
11. T. Parenty, S. Bollaert, J. Mateos, X. Wallart and A. Gappy, IEEE Indium Phosphide and Related Materials, 2001 Conference Proceedings, (Nara, Japan, 2001) p. 626.
12. H. Wang, T. K. Ton, R. Lai, D. C. W. Lo, S. Chen, D. Streit, G. S. Dow, K. L. Tan and J. Berenz, IEEE Electron Devices Meeting, 1993. Technical Digest., (San Francisco, California, USA, 1993) p. 239.