Comparison between Deflection and Vibration Characteristics of Rectangular and Trapezoidal profile Microcantilevers

Sensors

Volumn 9, Issue 4, 2009, Pages 2706-2718

  Ansari, Mohd Zahid ^a   Cho, Chongdu ^a   Kim, Jooyong ^a   Bang, Booun ^a  

^a Inha University   (South Korea)

Author keywords

Deflection; Microcantilever; Resonant Frequency; Sensor; Surface stress

Indexed keywords

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DEFLECTION (STRUCTURES); FINITE ELEMENT METHOD; SURFACE STRESS; VIBRATION ANALYSIS;

DEFLECTION; FUNDAMENTAL RESONANT FREQUENCIES; MAXIMUM DEFLECTION; MAXIMUM STRESS; MICRO-CANTILEVERS; MICROCANTILEVER SENSOR; SURFACE STRESS; TENSILE FORCES; THREE MODELS; VIBRATION CHARACTERISTICS;

NATURAL FREQUENCIES;

EID: 85125840143     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s90402706     Document Type: Article

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