A Study on increasing sensitivity of rectangular microcantilevers used in biosensors

Sensors

Volumn 8, Issue 11, 2008, Pages 7530-7544

  Ansari, Mohd Zahid ^a   Cho, Chongdu ^a  

^a Inha University   (South Korea)

Author keywords

Biosensor; Microcantilever; Sader equation; Stoney equation; Surface stress

Indexed keywords

CANTILEVER DEFLECTION; FINITE ELEMENT ANALYSIS SOFTWARE; INCREASING SENSITIVITIES; MICRO-CANTILEVERS; MICROCANTILEVER BIOSENSORS; SADER EQUATION; STONEY EQUATION; SURFACE STRESS;

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DESIGN; NANOCANTILEVERS; STRESS ANALYSIS; SURFACE PROPERTIES;

BIOSENSORS;

EID: 68249095949     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s8117530     Document Type: Article

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