Piezoresistive detection of acoustic waves

Review of Scientific Instruments

Volumn 74, Issue 2, 2003, Pages 1031-1035

  Passian, A ^a   Evans, P G ^a   Varma, V K ^a   Ferrell, T L ^a   Thundat, T ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; COST EFFECTIVENESS; MICROELECTROMECHANICAL DEVICES; OSCILLATIONS;

PIEZORESISTIVE DETECTION;

ACOUSTIC WAVES;

EID: 0037327286     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1532836     Document Type: Article

References (15)

1. M. Gad-El-Hak, The MEMS Handbook (CRC, New York, 2002).
2. H. F. Ji, K. M. Hansen, Z. Hu, and T. Thundat, Sens. Actuators B 72, 233 (2001).
3. T. Thundat, P. I. Oden, and R. J. Warmack, Microscale Thermophys. Eng. 1, 185 (1997).
4. J. D. Turner and L. Austin, Meas. Sci. Technol. 11, R58 (2000).
5. H. F. Ji and T. Thundat, Biosens. Bioelectron. 17, 337343 (2002).
6. T. Thundat and L. Maya, Surf. Sci. 430, L546 (1999).
7. D. Sarid, Scanning Force Microscopy (Oxford University Press, New York, 1994).
8. A. Mehta, S. Cherian, D. Hedden, and T. Thundat, Appl. Phys. Lett. 78, 11 (2000).
9. G. Muralidharan, A. Mehta, S. Cherian, and T. Thundat, J. Appl. Phys. 89, 4587 (2001).
10. A. Passian, G. Muralidharan, S. Kouchekian, A. Mehta, S. Cherian, T. L. Ferrell, and T. Thundat, J. Appl. Phys. 91, 4693 (2002).
11. C. L. Britton, Jr., R. L. Jones, P. I. Oden, Z. Hu, R. J. Warmack, S. F. Smith, W. L. Bryan, and J. M. Rochelle, Ultramicroscopy 82, 17 (2000).
12. Contact Piezolevers, ThermoMicroscopes, Sunnyvale, CA, Web: www.thermomicro.com
13. B. R. Munson, D. F. Young, and T. H. Okiishi, Fundamentals of Fluid Mechanics (Wiley, New York, 1998).
14. V. L. Streeter and E. B. Wylie, Fluid Mechanics (McGraw-Hill, New York, 1981).
15. W. A. Wassef, M. N. Bassim, M. Houssny-Emam, and K. Tangri, J. Acoust. Soc. Am. 77, 916 (1985).