Improved cantilever profiles for sensor elements

Journal of Physics D: Applied Physics

Volumn 40, Issue 24, 2007, Pages 7652-7655

  Fernando, Sanchitha ^a   Austin, Michael ^a   Chaffey, Jason ^b  

^a RMIT UNIVERSITY   (Australia)

^b Mems ID   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; NATURAL FREQUENCIES; PROBLEM SOLVING;

CANTILEVER PROFILES; MICROCANTILEVERS; NOISE IMMUNITY; SENSOR ELEMENTS;

SENSORS;

EID: 36749080028     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/24/009     Document Type: Article

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