Electrical properties of clustered and precipitated iron in silicon

Solid State Phenomena

Volumn 108-109, Issue , 2005, Pages 109-114

  Khalil, R ^a,b   Kveder, V ^a,c   Schroter W ^a   Seibt, M ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

^b BENHA UNIVERSITY   (Egypt)

^c INSTITUTE OF SOLID STATE PHYSICS   (Russian Federation)

Author keywords

DLTS; Extended defects; Iron; Silicon; Suicide precipitates

Indexed keywords

ANNEALING; DEFECTS; ELECTRIC PROPERTIES; IRON; PRECIPITATES; TRANSIENT ANALYSIS;

BANDLIKE STATES; EXTENDED DEFECTS; SUICIDE PRECIPITATES;

SILICON;

EID: 85088715893     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/3-908451-13-2.109     Document Type: Conference Paper

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