Large-Area Graphene Electrodes: Using CVD to facilitate applications in commercial touchscreens, flexible nanoelectronics, and neural interfaces.

IEEE Nanotechnology Magazine

Volumn 9, Issue 3, 2015, Pages 6-14

  Akinwande, Deji ^a   Tao, Li ^a   Yu, Qingkai ^b   Lou, Xiaojing ^c   Peng, Peng ^c   Kuzum, Duygu ^d  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^b TEXAS STATE UNIVERSITY   (United States)

^c 2D Carbon Tech and Jiangnan Graphene Research Institute   (China)

^d UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; GRAPHENE; GRAPHITE ELECTRODES; NANOELECTRONICS;

CHEMICAL VAPOR DEPOSITIONS (CVD); DEVICE ENGINEERING; ELECTRICAL CONDUCTIVITY; HIGH FLEXIBILITY; LARGE-AREA GRAPHENE; NEURAL INTERFACES; PERSONAL DEVICES; PRACTICAL METHOD;

CHEMICAL VAPOR DEPOSITION;

EID: 85027952414     PISSN: 19324510     EISSN: None     Source Type: Journal    
DOI: 10.1109/MNANO.2015.2441105     Document Type: Article

References (31)

1. C. Berger, Z. Song, T. Li, X. Li, A. Y. Ogbazghi, R. Feng, Z. Dai, A. N. Marchenkov, E. H. Conrad, P. N. First, and W. A. de Heer, "Ultrathin epitaxial graphite: 2D electron gas properties and a route toward graphene-based nanoelectronics," J. Phys. Chem. B, vol. 108, no. 52, pp. 19912-19916, Dec. 2004.
2. K. S. Novoselov, A. K. Geim, S. V. Morozov, D. Jiang, Y. Zhang, S. V. Dubonos, I. V. Grigorieva, and A. A. Firsov, "Electric field effect in atomically thin carbon films," Science, vol. 306, no. 5696, pp. 666-669, Oct. 2004.
3. X. Li, W. Cai, J. An, S. Kim, J. Nah, D. Yang, R. Piner, A. Velamakanni, I. Jung, E. Tutuc, S. K. Banerjee, L. Colombo, and R. S. Ruoff, "Large-area synthesis of high-quality and uniform graphene films on copper foils," Science, vol. 324, no. 5932, pp. 1312-1314, June 2009.
4. D. Akinwande, N. Petrone, and J. Hone, "Twodimensional flexible nanoelectronics," Nature Commun., vol. 5, 5678, Dec. 2014.
5. B. Mackey, Is Metal Mesh the "ITO Replacement" for Touchscreens?. Santa Clara, CA: Printed Electronics USA, 2013.
6. L. Tao, J. Lee, H. Chou, M. Holt, R. S. Ruoff, and D. Akinwande, "Synthesis of high quality monolayer graphene at reduced temperature on hydrogenenriched evaporated copper (111) films," ACS Nano, vol. 6, no. 3, pp. 2319-2325, Feb. 2012.
7. R. Piner, H. Li, X. Kong, L. Tao, I. N. Kholmanov, H. Ji, W. H. Lee, J. W. Suk, J. Ye, Y. Hao, S. Chen, C. W. Magnuson, A. F. Ismach, D. Akinwande, and R. S. Ruoff, "Graphene synthesis via magnetic inductive heating of copper substrates," ACS Nano, vol. 7, no. 9, pp. 7495-7499, Aug. 2013.
8. X. Wang, L. Tao, Y. Hao, Z. Liu, H. Chou, I. Kholmanov, S. Chen, C. Tan, N. Jayant, Q. Yu, D. Akinwande, and R. S. Ruoff, "Direct delamination of graphene for high-performance plastic electronics," Small, vol. 10, no. 4, pp. 694-698, Sept. 2013.
9. J. Lee, K. N. Parrish, S. F. Chowdhury, T.-J. Ha, Y. Hao, L. Tao, A. Dodabalapur, R. S. Ruoff, and D. Akinwande, "State-of-the-art graphene transistors on hexagonal boron nitride, high-k, and polymeric films for GHz flexible analog nanoelectronics," in Proc. IEEE Int. Electron Devices Meeting (IEDM), 2012, pp. 14.6.1-14.6.4.
10. L. Tao, J. Lee, M. Holt, H. Chou, S. J. McDonnell, D. A. Ferrer, M. G. Babenco, R. M. Wallace, S. K. Banerjee, R. S. Ruoff, and D. Akinwande, "Uniform wafer-scale chemical vapor deposition of graphene on evaporated cu (111) film with quality comparable to exfoliated monolayer," J. Phys. Chem. C, vol. 116, no. 45, pp. 24068-24074, Nov. 2012.
11. S. Rahimi, L. Tao, S. F. Chowdhury, S. Park, A. Jouvray, S. Buttress, N. Rupesinghe, K. Teo, and D. Akinwande, "Toward 300 mm wafer-scalable high-performance polycrystalline chemical vapor deposited graphene transistors," ACS Nano, vol. 8, no. 10, pp. 10471-10479, Sept. 2014.
12. M. G. Babenco, L. Tao, and D. Akinwande, "Graphene Raman imaging and spectroscopy processing: characterization of graphene growth," in Proc. SPIE, 2012, pp. 84660O-84660O-7.
13. L. Tao, J. Lee, H. Li, R. D. Piner, R. S. Ruoff, and D. Akinwande, "Inductively heated synthesized graphene with record transistor mobility on oxidized silicon substrates at room temperature," Appl. Phys. Lett., vol. 103, no. 18, p. 183115, Nov. 2013.
14. J. Lee, T.-J. Ha, H. Li, K. N. Parrish, M. Holt, A. Dodabalapur, R. S. Ruoff, and D. Akinwande, "25 GHz embedded-gate graphene transistors with high-k dielectrics on extremely flexible plastic sheets," ACS Nano, vol. 7, no. 9, pp. 7744-7750, Sept. 2013.
15. N. Petrone, I. Meric, J. Hone, and K. L. Shepard, "Graphene field-effect transistors with gigahertzfrequency power gain on flexible substrates," Nano Lett., vol. 13, no. 1, pp. 121-125, Jan. 2012.
16. C. Sire, F. Ardiaca, S. Lepilliet, J.-W. T. Seo, M. C. Hersam, G. Dambrine, H. Happy, and V. Derycke, "Flexible gigahertz transistors derived from solution-based single-layer graphene," Nano Lett., vol. 12, no. 3, pp. 1184-1188, Mar. 2012.
17. B. J. Kim, H. Jang, S.-K. Lee, B. H. Hong, J.-H. Ahn, and J. H. Cho, "High-performance flexible graphene field effect transistors with ion gel gate dielectrics," Nano Lett., vol. 10, no. 9, pp. 3464-3466, Sept. 2010.
18. C. Lee, X. Wei, J. W. Kysar, and J. Hone, "Measurement of the elastic properties and intrinsic strength of monolayer graphene," Science, vol. 321, no. 5587, pp. 385-388, July 2008.
19. J. Lee, L. Tao, Y. Hao, R. S. Ruoff, and D. Akinwande, "Embedded-gate graphene transistors for high-mobility detachable flexible nanoelectronics," Appl. Phys. Lett., vol. 100, no. 15, p. 152104, Apr. 2012.
20. J. Lee, T.-J. Ha, K. N. Parrish, S. F. Chowdhury, L. Tao, A. Dodabalapur, and D. Akinwande, "High-performance current saturating graphene field-effect transistor with hexagonal boron nitride dielectric on flexible polymeric substrates," IEEE Electron Device Lett., vol. 34, no. 2, pp. 172-174, Jan. 2013.
21. F. Schedin, A. K. Geim, S. V. Morozov, E. W. Hill, P. Blake, M. I. Katsnelson, and K. S. Novoselov, "Detection of individual gas molecules adsorbed on graphene," Nature Mater., vol. 6, no. 9, pp. 652-655, July 2007.
22. Z. Cheng, Q. Li, Z. Li, Q. Zhou, and Y. Fang, "Suspended graphene sensors with improved signal and reduced noise," Nano Lett., vol. 10, no. 5, pp. 1864-1868, May 2010.
23. N. Li, X. Zhang, Q. Song, R. Su, Q. Zhang, T. Kong, L. Liu, G. Jin, M. Tang, and G. Cheng, "The promotion of neurite sprouting and outgrowth of mouse hippocampal cells in culture by graphene substrates," Biomaterials, vol. 32, no. 35, pp. 9374-9382, Dec. 2011.
24. S. Y. Park, J. Park, S. H. Sim, M. G. Sung, K. S. Kim, B. H. Hong, and S. Hong, "Enhanced differentiation of human neural stem cells into neurons on graphene," Adv. Mater., vol. 23, no. 36, pp. H263-H267, Aug. 2011.
25. D. Sahni, A. Jea, J. A. Mata, D. C. Marcano, A. Sivaganesan, J. M. Berlin, C. E. Tatsui, Z. Sun, T. G. Luerssen, S. Meng, T. A. Kent, and J. M. Tour, "Biocompatibility of pristine graphene for neuronal interface," J. Neurosurg. Pediatr., vol. 11, no. 5, pp. 575-583, Mar. 2013.
26. N. Li, Q. Zhang, S. Gao, Q. Song, R. Huang, L. Wang, L. Liu, J. Dai, M. Tang, and G. Cheng, "Three-dimensional graphene foam as a biocompatible and conductive scaffold for neural stem cells," Sci. Rep., vol. 3, 1604, Apr. 2013.
27. S. Bae, H. Kim, Y. Lee, X. Xu, J.-S. Park, Y. Zheng, J. Balakrishnan, T. Lei, H. Ri Kim, Y. I. Song, Y.-J. Kim, K. S. Kim, B. Ozyilmaz, J.-H. Ahn, B. H. Hong, and S. Iijima, "Roll-to-roll production of 30-inch graphene films for transparent electrodes," Nature Nanotech., vol. 5, no. 8, pp. 574-578, June 2010.
28. C. H. Chen, C. T. Lin, J. J. Chen, W. L. Hsu, Y. C. Chang, S. R. Yeh, L. J. Li, and D. J. Yao, "A graphene-based microelectrode for recording neural signals," in Proc. 2011 16th Int. Solid-State Sensors, Actuators and Microsystems Conf. (TRANSDUCERS), 2011, pp. 1883-1886.
29. C.-H. Chen, C.-T. Lin, W.-L. Hsu, Y.-C. Chang, S.-R. Yeh, L.-J. Li, and D.-J. Yao, "A flexible hydrophilic-modified graphene microprobe for neural and cardiac recording," Nanomed.: Nanotechnol. Biol. Med., vol. 9, no. 5, pp. 600-604, Dec. 2012.
30. D. Kuzum, H. Takano, E. Shim, J. C. Reed, H. Juul, A. G. Richardson, J. de Vries, H. Bink, M. A. Dichter, T. H. Lucas, D. A. Coulter, E. Cubukcu, and B. Litt, "Transparent and flexible low noise graphene electrodes for simultaneous electrophysiology and neuroimaging," Nature Commun., vol. 5, 5259, Oct. 2014.
31. D.-W. Park, A. A. Schendel, S. Mikael, S. K. Brodnick, T. J. Richner, J. P. Ness, M. R. Hayat, F. Atry, S. T. Frye, R. Pashaie, S. Thongpang, Z. Ma, and J. C. Williams, "Graphene-based carbon-layered electrode array technology for neural imaging and optogenetic applications," Nature Commun., vol. 5, 5258, Oct. 2014.