Optimized SU-8 processing for low-cost microstructures fabrication without cleanroom facilities

Micromachines

Volumn 5, Issue 3, 2014, Pages 738-755

  Pinto, Vânia C ^a   Sousa, Paulo J ^a   Cardoso, Vanessa F ^a   Minas, Graça ^a  

^a UNIVERSITY OF MINHO   (Portugal)

Author keywords

Low cost microfabrication; MEMS; Microfluidic; SU 8; UV photolithography; Without cleanroom facility

Indexed keywords

ASPECT RATIO; CLEAN ROOMS; COSTS; FABRICATION; LABORATORIES; MEMS; MICROFLUIDICS; MICROSTRUCTURE; PHOTOMASKS; PHOTORESISTS;

3D MICROSTRUCTURES; CLEANROOM FACILITIES; GRAY-SCALE TECHNOLOGY; LOW COSTS; NEGATIVE PHOTORESISTS; PRINTED CIRCUIT BOARDS (PCB); SU-8; SU-8 MICROSTRUCTURES;

PRINTED CIRCUIT BOARDS;

EID: 84987791217     PISSN: None     EISSN: 2072666X     Source Type: Journal    
DOI: 10.3390/mi5030738     Document Type: Article

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