Microstructuring of su-8 resist for mems and bio-applications

International Journal on Smart Sensing and Intelligent Systems

Volumn 3, Issue 1, 2010, Pages 118-129

  Dey, P K ^a   Pramanick, B ^a   Ravi Shankar, A ^b   Ganguly, P ^a   Das, S ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY   (India)

^b KARUNYA UNIVERSITY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

NEEDLES; PHOTORESISTS; SUBSTRATES;

FABRICATED STRUCTURES; GLASS SUBSTRATES; MICRO STRUCTURING; NEGATIVE PHOTORESISTS; PROCESSING TECHNOLOGIES; RIDGE STRUCTURES; SOFT-LITHOGRAPHIC TECHNIQUES; STRUCTURAL CHARACTERIZATION;

FABRICATION;

EID: 79551609564     PISSN: None     EISSN: 11785608     Source Type: Journal    
DOI: 10.21307/ijssis-2017-384     Document Type: Article

References (9)

1. J-H Park, M.G. Allen, and M.R. Prausnitr, "Biodegradable polymer microneedles: fabrication, mechanics and transdermal drug delivery", J. of Controlled Release, vol. 104, pp. 51-66, 2005.
2. Joseph C. Doll, Nahid Harjee, Nathan Klejwa, Ronald Kwon, Sarah M. Coulthard, Bryan Petzold, Miriam B. Goodman and Beth L. Pruitt, "SU-8 force sensing pillar arrays for biological measurements", Lab Chip, vol. 9, pp. 1449-1454, DOI: 10.1039/b818622g, 2009.
3. Masaya Miyazaki and Hideaki Maeda," Microchannel enzyme reactors and their applications for processing", Trends in Biotechnology, Vol. 24 No. 10, 2006.
4. Seok Pil Jang, Stephen U.S. Choi, "Cooling performance of microchannel heat sink with nanofluids", Applied Thermal Engg. Vol. 26 , pp. 2457-2463, (2006).
5. Lorentz H, Despont M, Fahrni N, LaBlance N, Renaud P "SU-8: a low cost negative resist for MEMS ",J. Micromech.Microeng. pp.7121, 1997.
6. D.P. Acharya, "Geometrical Optics for Advanced Students", Oxford & IBH Publishing Co. Pvt. Ltd., New Delhi, 1987.
7. J.C. McDonald, G.M. Whitesides,"Poly (dimethylsiloxane) as a Material for Fabricating Microfluidic Devices," Accounts of Chemical Research, Vol.53 no 7, pp 491-499, July 2002.
8. Lorentz H, Laudon M and Renaud P "Mechanical characterisation of a new high-aspect-ratio near UV resist", Microelectron. Eng.vol. 371, pp. 41-42, 1998.
9. Zhang J, Tan K L, Hong G D, Yang L J and Gong H Q"Polymerisation optimisation of SU-8 photoresist and its applications in microfluidic systems and MEMS", J. Micromech.Microeng. vol. 11, pp. 20, 2001.