Spectroscopic diagnostics of low-pressure inductively coupled Kr plasma using a collisional-radiative model with fully relativistic cross sections

Plasma Sources Science and Technology

Volumn 25, Issue 3, 2016, Pages

  Gangwar, Reetesh K ^a   Dipti, ^b   Srivastava, Rajesh ^b   Stafford, Luc ^a  

^a UNIVERSITÉ DE MONTRÉAL   (Canada)

^b INDIAN INSTITUTE OF TECHNOLOGY ROORKEE   (India)

Author keywords

collisional radiative modeling; Kr plasma; low pressure plasmas; optical emission spectroscopy

Indexed keywords

CARRIER CONCENTRATION; CYLINDERS (SHAPES); ELECTROMAGNETIC INDUCTION; ELECTRON DENSITY MEASUREMENT; ELECTRON TEMPERATURE; ELECTRONS; LANGMUIR PROBES; OPTICAL EMISSION SPECTROSCOPY; PLASMA SIMULATION;

COLLISIONAL RADIATIVE MODEL; CYLINDRICAL GEOMETRY; ELECTRON EXCITATIONS; INDUCTIVELY-COUPLED; LANGMUIR PROBE MEASUREMENTS; LOW PRESSURE PLASMA; ORDERS OF MAGNITUDE; SPECTROSCOPIC DIAGNOSTICS;

COLLISIONAL PLASMAS;

EID: 84973299002     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/25/3/035025     Document Type: Article

References (53)

1. Lieberman M A and Lichtenberg A J 2004 Principles of Plasma Discharges and Materials Processing (New York: Wiley)
2. Zimin S P, Amirov I I and Gorlachev E S 2011 RF sputtering of epitaxial lead chalcogenide films in argon and krypton plasma Semicond. Sci. Technol. 26 055018
3. Bugrova A I, Bishaev A M, Desyatskov A V, Kozintseva M V, Lipatov A S and Dudeck M 2013 Experimental investigations of a krypton stationary plasma thruster Int. J. Aerosp. Eng. 2013 1-7
4. Juschkin L, Chuvatin A, Zakharov S V, Ellwi S and Kunze H-J 2002 EUV emission from Kr and Xe capillary discharge plasmas J. Phys. D: Appl. Phys. 35 219-27
5. Chung H-K, Fournier K B and Lee R W 2006 Non-LTE kinetics modeling of krypton ions: calculations of radiative cooling coefficients High Energy Density Phys. 2 7-15
6. Gorbunov A V, Molodtsov N A, Moskalenko I V and Shcheglov D A 2010 Development of laser induced fluorescence diagnostic for measuring the parameters of plasma containing rare gas species Rev. Sci. Instrum. 81 10D712
7. Widmann K, Beiersdorfer P, Decaux V, Elliott S R, Osterheld A, Bitter M and Smith A 1995 Studies of He-like krypton for use in determining electron and ion temperatures in very high temperature plasmas Rev. Sci. Instrum. 66 761
8. Radtke R, Biedermann C, Fuchs T, Fussmann G and Beiersdorfer P 2000 Measurement of the radiative cooling rates for high-ionization species of krypton using an electron beam ion trap Phys. Rev. E 61 1966-74
9. Kink I et al 2001 Analysis of broadband x-ray spectra of highly charged krypton from a microcalorimeter detector of an electron-beam ion trap Phys. Rev. E 63 046409
10. Fu Y et al 2009 Plasma diagnostic-related activities at Shanghai EBIT Phys. Scr. T134 014017
11. Peacock N J, O'Mullane M G, Barnsley R and Tarbutt M 2008 Anticipated x-ray and VUV spectroscopic data from ITER with appropriate diagnostic instrumentation Can. J. Phys. 86 277-84
12. Malyshev M V and Donnelly V M 2000 Diagnostics of inductively coupled chlorine plasmas: measurement of Cl2 and Cl number densities J. Appl. Phys. 88 6207
13. Czerwiec T and Graves D B 2004 Mode transitions in low pressure rare gas cylindrical ICP discharge studied by optical emission spectroscopy J. Phys. D: Appl. Phys. 37 2827-40
14. Crintea D L, Czarnetzki U, Iordanova S, Koleva I and Luggenhölscher D 2009 Plasma diagnostics by optical emission spectroscopy on argon and comparison with Thomson scattering J. Phys. D: Appl. Phys. 42 045208
15. Wang S, Wendt A E, Boffard J B, Lin C C, Radovanov S and Persing H 2013 Noninvasive, real-time measurements of plasma parameters via optical emission spectroscopy J. Vac. Sci. Technol. A 31 021303
16. Boffard J B, Jung R O, Lin C C, Aneskavich L E and Wendt A E 2012 Argon 420.1-419.8 nm emission line ratio for measuring plasma effective electron temperatures J. Phys. D: Appl. Phys. 45 045201
17. Siepa S, Danko S, Tsankov T V, Mussenbrock T and Czarnetzki U 2014 On the OES line-ratio technique in argon and argon-containing plasmas J. Phys. D: Appl. Phys. 47 445201
18. Boffard J B, Jung R O, Lin C C, Aneskavich L E and Wendt A E 2011 Optical diagnostics for characterization of electron energy distributions: argon inductively coupled plasmas Plasma Sources Sci. Technol. 20 055006
19. Palmero A, Van Hattum E D, Rudolph H and Habraken F H P M 2007 Characterization of a low-pressure argon plasma using optical emission spectroscopy and a global model J. Appl. Phys. 101 053306
20. Zhu X-M and Pu Y-K 2010 A simple collisional-radiative model for low-temperature argon discharges with pressure ranging from 1 Pa to atmospheric pressure: kinetics of Paschen 1s and 2p levels J. Phys. D: Appl. Phys. 43 015204
21. Zhu X M and Pu Y K 2010 Optical emission spectroscopy in low-temperature plasmas containing argon and nitrogen: determination of the electron temperature and density by the line-ratio method J. Phys. D: Appl. Phys. 43 403001
22. Godyak V A, Piejak R B and Alexandrovich B M 2002 Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma Plasma Sources Sci. Technol. 11 525-43
23. Dressler R A, Chiu Y, Zatsarinny O, Bartschat K, Srivastava R and Sharma L 2009 Near-infrared collisional radiative model for Xe plasma electrostatic thrusters: the role of metastable atoms J. Phys. D: Appl. Phys. 42 185203
24. Gangwar R K, Sharma L, Srivastava R and Stauffer A D 2012 Argon plasma modeling with detailed fine-structure cross sections J. Appl. Phys. 111 053307
25. Zhu X-M and Pu Y 2011 Determination of non-maxwellian electron energy distributions in low-pressure plasmas by using the optical emission spectroscopy and a collisional-radiative model Plasma Sci. Technol. 13 267
26. Gangwar R K, Sharma L, Srivastava R and Stauffer A D 2010 Electron-impact excitation of krypton: cross sections of interest in plasma modeling Phys. Rev. A 82 032710
27. Gangwar R K, Sharma L, Srivastava R and Stauffer A D 2010 Electron-impact excitation of argon: cross sections of interest in plasma modeling Phys. Rev. A 81 052707
28. Kaur S, Srivastava R, McEachran R P and Stauffer A D 1998 Electron impact excitation of the np5(n + 1)p states of Ar (n = 3), Kr (n = 4) and Xe (n = 5) atoms J. Phys. B: At. Mol. Opt. Phys. 31 4833
29. Sharma L, Srivastava R and Stauffer A 2007 Excitation of the 3p5 5p levels of argon from the 3p5 4s metastable states Phys. Rev. A 76 024701
30. Khakoo M A et al 2004 Electron impact excitation of the argon 3p5 4s configuration: differential cross-sections and cross-section ratios J. Phys. B: At. Mol. Opt. Phys. 37 247-81
31. Srivastava R, Stauffer A D and Sharma L 2006 Excitation of the metastable states of the noble gases Phys. Rev. A 74 012715
32. Dipti, Gangwar R K, Srivastava R and Stauffer A D 2013 Collisional-radiative model for non-Maxwellian inductively coupled argon plasmas using detailed fine-structure relativistic distorted-wave cross sections Eur. Phys. J. D 67 40244
33. Rousseau A, Teboul E and Bechu S 2005 Comparison between Langmuir probe and microwave autointerferometry measurements at intermediate pressure in an argon surface wave discharge J. Appl. Phys. 98 083306
34. Allen J E, Boyd R L F and Reynolds P 1957 The collection of positive ions by a probe immersed in a plasma Proc. Phys. Soc. B 70 297
35. Schweitzer U, Schulz A, Walker M, Schumacher U, Stroth U and Baumgärtner K-M 2007 Study of a new plasma source for free-standing plasmas Plasma Process. Polym. 4 S978-81
36. Zhu X-M, Pu Y-K, Celik Y, Siepa S, Schüngel E, Luggenhölscher D and Czarnetzki U 2012 Possibilities of determining non-Maxwellian EEDFs from the OES line-ratios in low-pressure capacitive and inductive plasmas containing argon and krypton Plasma Sources Sci. Technol. 21 024003
37. Ton-That D and Flannery M R 1977 Cross sections for ionization of metastable rare-gas atoms (Ne∗, Ar∼, Kr∗, Xe∗) all of metastable, CO∗ molecules by electron impact Phys. Rev. A 15 517
38. Rejoub R, Lindsay B G and Stebbings R F 2002 Determination of the absolute partial and total cross sections for electron-impact ionization of the rare gases Phys. Rev. A 65 042713
39. Hartgers A, van Dijk J, Jonkers J and van der Mullen J A M 2001 CRModel: a general collisional radiative modeling code Comput. Phys. Commun. 135 199
40. Boffard J B, Jung R O, Lin C C and Wendt A E 2009 Measurement of metastable and resonance level densities in rare-gas plasmas by optical emission spectroscopy Plasma Sources Sci. Technol. 18 035017
41. Kramida A, Ralchenko Y and Reader J 2015 NIST Atomic Spectra Database (version 5.1) (Available online http://physics.nist.gov/asd)
42. Dzierzȩga K, Volz U, Nave G and Griesmann U 2000 Accurate transition rates for the 5p-5s transitions in Kr I Phys. Rev. A 62 022505
43. Aymar M and Coulombe M 1978 Theoretical transition probabilities and lifetimes in Kr I and Xe I spectra At. Data Nucl. Data Tables 21 537
44. Yuan Z S, Zhu L F, Liu X J, Zhong Z P, Li W B, Cheng H D and Xu K Z 2002 Fast-electron-impact study on excitations of 4p, 4s, and 3d electrons of krypton Phys. Rev. A 66 062701
45. Dyck R S V J, Johnson C E and Shugart H A 1972 Lifetime lower limits for the 3P0 and 3P2 metastable states of neon, argon, and krypton Phys. Rev. A 5 991
46. Kolts J H and Setster D W 1978 Decay rates of Ar(4s, 3P2), Ar(4s, 3P0), Kr(5s, 3P2), and Xe(6s, 3P2) atoms in argon J. Chem. Phys. 68 4848
47. Boffard J B, Jung R O, Lin C C and Wendt A E 2010 Optical emission measurements of electron energy distributions in low-pressure argon inductively coupled plasmas Plasma Sources Sci. Technol. 19 065001
48. Maaloul L, Morel S and Stafford L 2012 Populations of metastable and resonant argon atoms in radio frequency magnetron plasmas used for deposition of indium-zinc-oxide films J. Vac. Sci. Technol. A 30 021301
49. Malyshev M V, Donnelly V M and Donelly V M 1999 Trace rare gases optical emission spectroscopy: nonintrusive method for measuring electron temperatures in low-pressure, low-temperature plasmas Phys. Rev. E 60 6016
50. Taghizadeh L, Nikiforov A, Morent R, Van Der Mullen J and Leys C 2014 Determination of the electron temperature of atmospheric pressure argon plasmas by absolute line intensities and a collisional radiative model Plasma Process. Polym. 11 777-86
51. Chilton J, Stewart M and Lin C 2000 Cross sections for electron-impact excitation of krypton Phys. Rev. A 62 032714
52. Jönsson P, He X, Fischer C F and Grant I P 2007 The grasp2K relativistic atomic structure package Comput. Phys. Commun. 177 597
53. Srivastava R and Sharma L 2013 New Trends in Atomic and Molecular Physics (Berlin: Springer)