Characterization of a low-pressure argon plasma using optical emission spectroscopy and a global model

Journal of Applied Physics

Volumn 101, Issue 5, 2007, Pages

  Palmero, A ^a   Van Hattum, E D ^a   Rudolph, H ^a   Habraken, F H P M ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; ELECTROMAGNETISM; LANGMUIR PROBES; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; OPTICAL EMISSION SPECTROSCOPY;

EXCITATION RATES; LANGMUIR PROBE MEASUREMENTS; NONLINEAR MODELS; RADIATIVE CASCADES;

PLASMAS;

EID: 33947328533     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2559790     Document Type: Article

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