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Volumn 45, Issue 4, 2012, Pages

Argon 420.1-419.8nm emission line ratio for measuring plasma effective electron temperatures

Author keywords

[No Author keywords available]

Indexed keywords

CROSS SECTION; ELECTRON EXCITATIONS; EMISSION LINES; EXPERIMENTAL MEASUREMENTS; LOW ELECTRON TEMPERATURE; METASTABLE LEVELS; OPTICAL EMISSIONS; PLASMA CONDITIONS;

EID: 84862966751     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/4/045201     Document Type: Article
Times cited : (50)

References (35)
  • 2
    • 5744243435 scopus 로고    scopus 로고
    • Plasma electron temperatures and electron energy distributions measured by trace rare gases optical emission spectroscopy
    • Donnelly V M 2004 Plasma electron temperatures and electron energy distributions measured by trace rare gases optical emission spectroscopy J. Phys. D: Appl. Phys. 37 R21736
    • (2004) J. Phys. D: Appl. Phys. , vol.37 , Issue.19
    • Donnelly, V.M.1
  • 3
    • 0000251646 scopus 로고    scopus 로고
    • Trace rare gases optical emission spectroscopy: Nonintrusive method for measuring electron temperatures in low-pressure, low-temperature plasmas
    • Malyshev M V and Donnelly V M 1999 Trace rare gases optical emission spectroscopy: nonintrusive method for measuring electron temperatures in low-pressure, low-temperature plasmas Phys. Rev. E 60 6016
    • (1999) Phys. Rev. , vol.60 , Issue.5 , pp. 6016
    • Malyshev, M.V.1    Donnelly, V.M.2
  • 4
    • 34249012144 scopus 로고    scopus 로고
    • Optical emission spectroscopy diagnostics of inductively-driven plasmas in argon gas at low pressures
    • DOI 10.1016/j.sab.2007.03.026, PII S0584854707000699
    • Iordanova S and Koleva I 2007 Optical emission specroscopy diagnostics of inductively-driven plasmas in argon gas at low pressures Spectrochim. Acta B 62 34456 (Pubitemid 46783350)
    • (2007) Spectrochimica Acta - Part B Atomic Spectroscopy , vol.62 , Issue.4 , pp. 344-356
    • Iordanova, S.1    Koleva, I.2
  • 5
    • 78649943776 scopus 로고    scopus 로고
    • Optical emission measurements of electron energy distributions in low-pressure inductively-coupled plasmas
    • Boffard J B, Jung R O, Lin C C and Wendt A E 2010 Optical emission measurements of electron energy distributions in low-pressure inductively-coupled plasmas Plasma Sources Sci. Technol. 19 065001
    • (2010) Plasma Sources Sci. Technol. , vol.19 , Issue.6
    • Boffard, J.B.1    Jung, R.O.2    Lin, C.C.3    Wendt, A.E.4
  • 6
    • 78249248921 scopus 로고    scopus 로고
    • Optical emission spectroscopy in low-temperature plasmas containing argon and nitrogen: Determination of the electron temperature and density by the line-ratio method
    • Zhu X-M and Pu Y-K 2010 Optical emission spectroscopy in low-temperature plasmas containing argon and nitrogen: determination of the electron temperature and density by the line-ratio method J. Phys. D: Appl. Phys. 43 403001
    • (2010) J. Phys. D: Appl. Phys. , vol.43 , Issue.40
    • Zhu, X.-M.1    Pu, Y.-K.2
  • 7
    • 46849084326 scopus 로고    scopus 로고
    • Spectroscopic measurement of the electron temperature and the metastable densities by using a simple collisionalradiative model in a low-pressure inductively-coupled argon plasma
    • Lee Y-K, Hwang K-T, Lee M-H and Chung C-W 2008 Spectroscopic measurement of the electron temperature and the metastable densities by using a simple collisionalradiative model in a low-pressure inductively-coupled argon plasma J. Korean Phys. Soc. 52 17929
    • (2008) J. Korean Phys. Soc. , vol.52 , Issue.6 , pp. 1792-1799
    • Lee, Y.-K.1    Hwang, K.-T.2    Lee, M.-H.3    Chung, C.-W.4
  • 8
    • 33751092787 scopus 로고    scopus 로고
    • Method to determine argon metastable number density and plasma electron temperature from spectral emission originating from four 4p argon levels
    • Mariotti D, Shimizu Y, Sasaki T and Koshizaki N 2006 Method to determine argon metastable number density and plasma electron temperature from spectral emission originating from four 4p argon levels Appl. Phys. Lett. 89 201502
    • (2006) Appl. Phys. Lett. , vol.89 , Issue.20
    • Mariotti, D.1    Shimizu, Y.2    Sasaki, T.3    Koshizaki, N.4
  • 9
    • 33846329483 scopus 로고    scopus 로고
    • Gas temperature and electron temperature measurements by emission spectroscopy for an atmospheric microplasma
    • Mariotti D, Shimizu Y, Sasaki T and Koshizaki N 2007 Gas temperature and electron temperature measurements by emission spectroscopy for an atmospheric microplasma J. Appl. Phys. 101 013307
    • (2007) J. Appl. Phys. , vol.101 , Issue.1
    • Mariotti, D.1    Shimizu, Y.2    Sasaki, T.3    Koshizaki, N.4
  • 10
    • 0035397150 scopus 로고    scopus 로고
    • 2-plasmas with electrostatic probes, optical emission spectroscopy and energy dispersive mass spectrometry
    • 2-plasmas with electrostatic probes, optical emission spectroscopy and energy dispersive mass spectrometry Eur. Phys. J. Appl. Phys. 15 49
    • (2001) Eur. Phys. J. Appl. Phys. , vol.15 , Issue.1 , pp. 49
    • Crolly, G.1    Oechsner, H.2
  • 13
    • 0037290805 scopus 로고    scopus 로고
    • Collisional-radiative model for neutral helium in plasma revisited
    • DOI 10.1016/S0022-4073(02)00060-2, PII S0022407302000602
    • Goto M 2003 Collisionalradiative model for neutral helium in plasma revisited J. Quant. Spectrosc. Radiat. Transfer 76 33144 (Pubitemid 36000071)
    • (2003) Journal of Quantitative Spectroscopy and Radiative Transfer , vol.76 , Issue.3-4 , pp. 331-344
    • Goto, M.1
  • 14
    • 3042543180 scopus 로고    scopus 로고
    • Application of excitation cross sections to optical plasma diagnotics
    • Boffard J B, Lin C C and DeJoseph C A 2004 Application of excitation cross sections to optical plasma diagnotics J. Phys. D: Appl. Phys. 37 R14361
    • (2004) J. Phys. D: Appl. Phys. , vol.37 , Issue.12
    • Boffard, J.B.1    Lin, C.C.2    Dejoseph, C.A.3
  • 15
    • 27144447678 scopus 로고    scopus 로고
    • Spectroscopic study of a pulsed argon rf ICP discharge: Stepwise excitation in the afterglow and its application in optical spectroscopy
    • DOI 10.1088/0953-4075/38/21/003, PII S0953407505019796
    • DeJoseph C A Jr and Demidov V I 2005 Spectroscopic study of a pulsed argon rf ICP discharge: stepwise excitation in the afterglow and its application in optical spectroscopy J. Phys. B.: At. Mol. Opt. Phys. 38 380514 (Pubitemid 41500341)
    • (2005) Journal of Physics B: Atomic, Molecular and Optical Physics , vol.38 , Issue.21 , pp. 3805-3814
    • DeJoseph, C.A.1    Demidov, V.I.2
  • 16
    • 28844450340 scopus 로고    scopus 로고
    • Modification of a nonlocal electron energy distribution in a bound plasma
    • DeJoseph C A Jr, Demidov V I and Kudryavtsev A A 2005 Modification of a nonlocal electron energy distribution in a bound plasma Phys. Rev. E 72 036410
    • (2005) Phys. Rev. , vol.72 , Issue.3
    • Dejoseph, C.A.1    Demidov, V.I.2    Kudryavtsev, A.A.3
  • 17
    • 33751564414 scopus 로고    scopus 로고
    • Spectroscopic study of a pulsed argon rf ICP discharge: Stepwise excitation in the afterglow and its application in optical spectroscopy
    • Demidov V, DeJoseph C Jr and Kudryavtsev A 2006 Spectroscopic study of a pulsed argon rf ICP discharge: stepwise excitation in the afterglow and its application in optical spectroscopy IEEE Trans. Plasma Sci. 34 82533
    • (2006) IEEE Trans. Plasma Sci. , vol.34 , Issue.3 , pp. 825-833
    • Demidov, V.1    Dejoseph, C.2    Kudryavtsev, A.3
  • 18
    • 35148871404 scopus 로고    scopus 로고
    • Electron-impact excitation of argon: Optical emission cross sections in the range 3002500 nm
    • Boffard J B, Chiaro B, Weber T and Lin C C 2007 Electron-impact excitation of argon: optical emission cross sections in the range 3002500 nm At. Data Nucl. Data Tables 93 83163
    • (2007) At. Data Nucl. Data Tables , vol.93 , Issue.6 , pp. 831-863
    • Boffard, J.B.1    Chiaro, B.2    Weber, T.3    Lin, C.C.4
  • 21
    • 33745793676 scopus 로고    scopus 로고
    • B-spline calculations of oscillator strengths in neutral argon
    • Zatsarinny O and Bartschat K 2006 B-spline calculations of oscillator strengths in neutral argon J. Phys. B: At. Mol. Opt. Phys. 39 2145
    • (2006) J. Phys. B: At. Mol. Opt. Phys. , vol.39 , Issue.9 , pp. 2145
    • Zatsarinny, O.1    Bartschat, K.2
  • 22
    • 80053598634 scopus 로고    scopus 로고
    • Optical diagnostics for characterization of electron energy distributions: Argon inductively-coupled plasmas
    • Boffard J B, Jung R O, Lin C C, Aneskavich L E and Wendt A E 2011 Optical diagnostics for characterization of electron energy distributions: argon inductively-coupled plasmas Plasma Sources Sci. Technol. 20 055006
    • (2011) Plasma Sources Sci. Technol. , vol.20 , Issue.5
    • Boffard, J.B.1    Jung, R.O.2    Lin, C.C.3    Aneskavich, L.E.4    Wendt, A.E.5
  • 23
    • 68649114144 scopus 로고    scopus 로고
    • Measurement of metastable and resonance level densities in rare gas plasmas by optical emission spectroscopy
    • Boffard J B, Jung R O, Lin C C and Wendt A E 2009 Measurement of metastable and resonance level densities in rare gas plasmas by optical emission spectroscopy Plasma Sources Sci. Technol. 18 035017
    • (2009) Plasma Sources Sci. Technol. , vol.18 , Issue.3
    • Boffard, J.B.1    Jung, R.O.2    Lin, C.C.3    Wendt, A.E.4
  • 24
    • 34249110712 scopus 로고    scopus 로고
    • A simple collisional-radiative model for low-pressure argon discharges
    • DOI 10.1088/0022-3727/40/8/018, PII S0022372707397283, 018
    • Zhu X-M and Pu Y-K 2007 A simple collional-radiative model for low-pressure argon discharges J. Phys. D: Appl. Phys. 40 25338 (Pubitemid 46778384)
    • (2007) Journal of Physics D: Applied Physics , vol.40 , Issue.8 , pp. 2533-2538
    • Zhu, X.-M.1    Pu, Y.-K.2
  • 25
    • 34548666948 scopus 로고    scopus 로고
    • A simple collisional-radiative model for low-pressure argon-oxygen mixture discharges
    • DOI 10.1088/0022-3727/40/17/028, PII S0022372707507564, 028
    • Zhu X-M and Pu Y-K 2007 A simple collisionalradiative model for low-pressure argon-oxygen mixture discharges J. Phys. D: Appl. Phys. 40 52025 (Pubitemid 47411320)
    • (2007) Journal of Physics D: Applied Physics , vol.40 , Issue.17 , pp. 5202-5205
    • Zhu, X.-M.1    Pu, Y.-K.2
  • 26
    • 0030244288 scopus 로고    scopus 로고
    • Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas
    • Hebner G A 1996 Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas J. Appl. Phys. 80 262436 (Pubitemid 126628388)
    • (1996) Journal of Applied Physics , vol.80 , Issue.5 , pp. 2624-2636
    • Hebner, G.A.1
  • 27
    • 0031144403 scopus 로고    scopus 로고
    • 2 metastable level density and temperature measurement in a low-density argon plasma
    • PII S0963025297815769
    • Beverini N, Cicconi G, Genovesi G L and Piano E 1997 metastable level density and temperature measurement in a low-density argon plasma Plasma Sources Sci. Technol. 6 1858 (Pubitemid 127702090)
    • (1997) Plasma Sources Science and Technology , vol.6 , Issue.2 , pp. 185-188
    • Beverini, N.1    Cicconi, G.2    Genovesi, G.L.3    Piano, E.4
  • 29
    • 79960219378 scopus 로고    scopus 로고
    • The spatially resolved measurements of the atomic densities in argon Paschen 1s levels by OES in a capacitively coupled plasma
    • Li J, Liu F-X, Zhu X-M and Pu Y-K 2011 The spatially resolved measurements of the atomic densities in argon Paschen 1s levels by OES in a capacitively coupled plasma J. Phys. D: Appl. Phys. 44 292001
    • (2011) J. Phys. D: Appl. Phys. , vol.44 , Issue.29
    • Li, J.1    Liu, F.-X.2    Zhu, X.-M.3    Pu, Y.-K.4
  • 30
    • 40549113709 scopus 로고    scopus 로고
    • A robust method to measure metastable and resonant state densities from emission spectra in argon and argon-diluted low pressure plasmas
    • Schulze M, Yanguas-Gil A, von Keudell A and Awakowicz P 2008 A robust method to measure metastable and resonant state densities from emission spectra in argon and argon-diluted low pressure plasmas J. Phys. D: Appl. Phys. 41 065206
    • (2008) J. Phys. D: Appl. Phys. , vol.41 , Issue.6
    • Schulze, M.1    Yanguas-Gil, A.2    Von Keudell, A.3    Awakowicz, P.4
  • 31
    • 77957117308 scopus 로고    scopus 로고
    • The population distribution of argon atoms in Paschen 1s levels in an inductively coupled plasma
    • Li J, Zhu X-M and Pu Y-K 2010 The population distribution of argon atoms in Paschen 1s levels in an inductively coupled plasma J. Phys. D: Appl. Phys. 43 345202
    • (2010) J. Phys. D: Appl. Phys. , vol.43 , Issue.34
    • Li, J.1    Zhu, X.-M.2    Pu, Y.-K.3
  • 33
    • 0037094904 scopus 로고    scopus 로고
    • Spatially resolved electron temperatures, species concentrations, and electron energy distributions in inductively coupled chlorine plasmas measured by trace-rare gases optical emission spectroscopy
    • DOI 10.1063/1.1467398
    • Donnelly V M and Schabel M J 2002 Spatially resolved electron temperatures, species concentrations, and electron energy distributions in inductively coupled chlorine plasmas, measured by trace-rare gases optical emission spectroscopy J. Appl. Phys. 91 6288 (Pubitemid 34636979)
    • (2002) Journal of Applied Physics , vol.91 , Issue.10 , pp. 6288
    • Donnelly, V.M.1    Schabel, M.J.2
  • 35


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