|
Volumn 8, Issue 12, 2016, Pages 6659-6665
|
Large-scale nanoelectromechanical switches based on directly deposited nanocrystalline graphene on insulating substrates
|
Author keywords
[No Author keywords available]
|
Indexed keywords
DEPOSITION;
ELASTIC MODULI;
GRAPHENE;
INSULATION;
PLASMA CVD;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SUBSTRATES;
TEMPERATURE;
THIN FILMS;
VAPOR DEPOSITION;
DEPOSITION MECHANISM;
HIGH-QUALITY FILMS;
INSULATING SUBSTRATES;
LARGE-SCALE ARRAYS;
NANO-ELECTROMECHANICAL;
NANOELECTROMECHANICAL SWITCHES;
PROCESS TECHNIQUES;
SCALE INTEGRATION;
NANOCRYSTALS;
|
EID: 84962231986
PISSN: 20403364
EISSN: 20403372
Source Type: Journal
DOI: 10.1039/c6nr00253f Document Type: Article |
Times cited : (68)
|
References (31)
|