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Applied Physics Letters

Volumn 105, Issue 3, 2014, Pages

Low pull-in voltage graphene electromechanical switch fabricated with a polymer sacrificial spacer

(4) Sun, Jian a Wang, Wenzhen a Muruganathan, Manoharan a Mizuta, Hiroshi a,b

a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY (Japan)

b UNIVERSITY OF SOUTHAMPTON (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

GRAPHENE; MOS DEVICES; STICTION;

ACID ETCHING; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; CONTACT POSITION; CONTACT SWITCHES; ELECTROMECHANICAL SWITCHES; PULL-IN VOLTAGE; RUN TO RUN; STATIC FRICTION;

ELECTROMECHANICAL DEVICES;

EID: 84925328402 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4891055 Document Type: Article

Times cited : (56)

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