Electrical Characterization of Ultrathin RF-Sputtered LiPON Layers for Nanoscale Batteries

ACS Applied Materials and Interfaces

Volumn 8, Issue 11, 2016, Pages 7060-7069

  Put, Brecht ^a,b   Vereecken, Philippe M ^a,b   Meersschaut, Johan ^a   Sepúlveda, Alfonso ^a   Stesmans, Andre ^b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

impedance spectroscopy; Li ion rechargeable battery; LiPON; RF sputtering; thin film

Indexed keywords

ACTIVATION ENERGY; CHARACTERIZATION; ELECTRIC BATTERIES; ELECTROLYTES; FILM THICKNESS; INSULATION; IONIC CONDUCTIVITY; LITHIUM-ION BATTERIES; NITROGEN; NITROGEN PLASMA; REACTIVE SPUTTERING; SECONDARY BATTERIES; SUBSTRATES; THIN FILMS; ULTRATHIN FILMS;

EFFECTS OF STOICHIOMETRY; ELECTRICAL CHARACTERIZATION; EQUIVALENT CIRCUIT MODEL; IMPEDANCE SPECTROSCOPY; LIPON; LITHIUM PHOSPHORUS OXYNITRIDE; POLARIZATION MEASUREMENTS; RF-SPUTTERING;

THIN FILM LITHIUM ION BATTERIES;

EID: 84962074489     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/acsami.5b12500     Document Type: Article

References (56)

1. Zhang, H.; Yu, X.; Braun, P. V. Three-Dimensional Bicontinuous Ultrafast-Charge and -Discharge Bulk Battery Electrodes Nat. Nanotechnol. 2011, 6, 277-281 10.1038/nnano.2011.38
2. Vereecken, P. M.; Huyghebaert, C. Conformal Deposition for 3D Thin-Film Batteries ECS Trans. 2013, 58, 111-118 10.1149/05810.0111ecst
3. Rubloff, G. W.; Kozen, A. C.; Lee, S. B. From Nanoscience to Solutions in Electrochemical Energy Storage J. Vac. Sci. Technol., A 2013, 31, 058503 10.1116/1.4816262
4. Kamaya, N.; Homma, K.; Yamakawa, Y.; Hirayama, M.; Kanno, R.; Yonemura, M.; Kamiyama, T.; Kato, Y.; Hama, S.; Kawamoto, K.; Mitsui, A. A Lithium Superionic Conductor Nat. Mater. 2011, 10, 682-686 10.1038/nmat3066
5. 3 Ionics 1997, 3, 289-291 10.1007/BF02375631
6. Yokokawa, H. Thermodynamic Stability of Sulfide Electrolyte/Oxide Electrode Interface in Solid-State Lithium Batteries Solid State Ionics 2016, 285, 126-135 10.1016/j.ssi.2015.05.010
7. Bates, J. B.; Dudney, N. J.; Gruzalski, G. R.; Zuhr, R. A.; Choudhury, A.; Luck, C. F.; Robertson, J. D. Electrical Properties of Amorphous Lithium Electrolyte Thin Films Solid State Ionics 1992, 53-56, 647-654 10.1016/0167-2738(92)90442-R
8. Wang, B.; Kwak, B.; Sales, B.; Bates, J. Ionic Conductivities and Structure of Lithium Phosphorus Oxynitride Glasses J. Non-Cryst. Solids 1995, 183, 297-306 10.1016/0022-3093(94)00665-2
9. Yu, X.; Bates, J. B.; Jellison, G. E.; Hart, F. X. A Stable Thin-Film Lithium Electrolyte: Lithium Phosphorus Oxynitride J. Electrochem. Soc. 1997, 144, 524-532
10. Bates, J. B.; Dudney, N. J.; Gruzalski, G. R.; Zuhr, R. A.; Choudhury, A.; Luck, C. F.; Robertson, J. D. Fabrication and Characterization of Amorphous Lithium Electrolyte Thin Films and Rechargeable Thin-Film Batteries J. Power Sources 1993, 43-44, 103-110 10.1016/0378-7753(93)80106-Y
11. Nimisha, C.; Rao, K. Y.; Venkatesh, G.; Rao, G. M.; Munichandraiah, N. Sputter Deposited LiPON Thin Films from Powder Target as Electrolyte for Thin Film Battery Applications Thin Solid Films 2011, 519, 3401-3406 10.1016/j.tsf.2011.01.087
12. Power in System on Chip Needs a New Energy Storage Solution. Cymbet Corporation, 2014. http://www.cymbet.com/pdfs/Cymbet-PowerSoC-2014-Presentation.pdf (accessed Dec 2015).
13. Advantage of Thin Film Batteries. Excellatron, 2010. http://www.excellatron.com/advantage.htm (accessed Dec 2015).
14. Xu, K. Nonaqueous Liquid Electrolytes for Lithium-Based Rechargeable Batteries Chem. Rev. 2004, 104, 4303-4417 10.1021/cr030203g
15. Degraeve, R.; Kaczer, B.; Groeseneken, G. Degradation and Breakdown in Thin Oxide Layers: Mechanisms, Models and Reliability Prediction Microelectron. Reliab. 1999, 39, 1445-1460 10.1016/S0026-2714(99)00051-7
16. Vereda, F.; Clay, N.; Gerouki, A.; Goldner, R.; Haas, T.; Zerigian, P. A Study of Electronic Shorting in IBDA-Deposited LiPON Films J. Power Sources 2000, 89, 201-205 10.1016/S0378-7753(00)00430-4
17. Kozen, A. C.; Pearse, A. J.; Lin, C.-F.; Noked, M.; Rubloff, G. W. Atomic Layer Deposition of the Solid Electrolyte LiPON Chem. Mater. 2015, 27, 5324-5331 10.1021/acs.chemmater.5b01654
18. Liu, W.; Fu, Z.; Li, C.; Qin, Q. Electrochem. Solid-State Lett. 2004, 7, J36-J40 10.1149/1.1778934
19. Hamon, Y.; Douard, A.; Sabary, F.; Marcel, C.; Vinatier, P.; Pecquenard, B.; Levasseur, A. Influence of Sputtering Conditions on Ionic Conductivity of LiPON Thin Films Solid State Ionics 2006, 177, 257-261 10.1016/j.ssi.2005.10.021
20. Fleutot, B.; Pecquenard, B.; Martinez, H.; Letellier, M.; Levasseur, A. Investigation of the Local Structure of LiPON Thin Films to Better Understand the Role of Nitrogen on their Performance Solid State Ionics 2011, 186, 29-36 10.1016/j.ssi.2011.01.006
21. Nisula, M.; Shindo, Y.; Koga, H.; Karppinen, M. Atomic Layer Deposition of Lithium Phosphorus Oxynitride Chem. Mater. 2015, 27, 6987-6993 10.1021/acs.chemmater.5b02199
22. Baggetto, L.; Niessen, R.; Roozeboom, F.; Notten, P. High Energy Density All-Solid-State Batteries: A Challenging Concept Towards 3D Integration Adv. Funct. Mater. 2008, 18, 1057-1066 10.1002/adfm.200701245
23. Oudenhoven, J. F. M.; Baggetto, L.; Notten, P. H. L. All-Solid-State Lithium-Ion Microbatteries: A Review of Various Three-Dimensional Concepts Adv. Energy Mater. 2011, 1, 10-33 10.1002/aenm.201000002
24. Ruzmetov, D.; Oleshko, V.; Haney, P.; Lezec, H.; Karki, K.; Baloch, K.; Agrawal, A.; Davydov, A.; Krylyuk, S.; Liu, Y.; Huang, J.; Tanase, M.; Cumings, J.; Talin, A. Electrolyte Stability Determines Scaling Limits for Solid-State 3D Li Ion Batteries Nano Lett. 2012, 12, 505-511 10.1021/nl204047z
25. Li, J.; Dudney, N.; Nanda, J.; Liang, C. Artificial Solid Electrolyte Interphase to Address the Electrochemical Degradation of Silicon Electrodes ACS Appl. Mater. Interfaces 2014, 6, 10083-10088 10.1021/am5009419
26. Nowak, S.; Berkemeier, F.; Schmitz, G. Ultra-thin LiPON Films-Fundamental Properties and Application in Solid State Thin Film Model Batteries J. Power Sources 2015, 275, 144-150 10.1016/j.jpowsour.2014.10.202
27. Laitinen, M.; Rossi, M.; Julin, J.; Sajavaara, T. Time-of-Flight-Energy Spectrometer for Elemental Depth Profiling-Jyväskylä Design Nucl. Instrum. Methods Phys. Res., Sect. B 2014, 337, 55-61 10.1016/j.nimb.2014.07.001
28. Nimisha, C. S.; Rao, G. M.; Munichandraiah, N.; Natarajan, G.; Cameron, D. C. Chemical and Microstructural Modifications in LiPON Thin films Exposed to Atmopsheric Humidity Solid State Ionics 2011, 185, 47-51 10.1016/j.ssi.2011.01.001
29. Knoops, H. C. M.; Baggetto, L.; Langereis, E.; van de Sanden, M. C. M.; Klootwijk, J. H.; Roozeboom, F.; Niessen, R. A. H.; Notten, P. H. L.; Kessels, W. M. M. Deposition of TiN and TaN by Remote Plasma ALD for Cu and Li Diffusion Barrier Applications J. Electrochem. Soc. 2008, 155, G287-G294 10.1149/1.2988651
30. Freixas, J.; Eustache, E.; Roussel, P.; Brillard, C.; Deresmes, D.; Nuns, N.; Rolland, N.; Brousse, T.; Lethien, C. Sputtered Titanium Nitride: A Bifunctional Material for Li-Ion Microbatteries J. Electrochem. Soc. 2015, 162, A493-A500 10.1149/2.0051504jes
31. Roh, N.; Lee, S.; Kwon, H. Scr. Mater. 1999, 42, 43 10.1016/S1359-6462(99)00307-3
32. Choi, C.; Cho, W.; Cho, B.; Kim, H.; Yoon, Y. S.; Tak, Y. Radio-Frequency Magnetron Sputtering Power Effect on the Ionic Conductivities of Lipon Films Electrochem. Solid-State Lett. 2002, 5, A14-A17 10.1149/1.1420926
33. Park, H. P.; Nam, S. C.; Lim, Y. C.; Choi, K. G.; Lee, K. C.; Park, G. B.; Lee, S.-R.; Kim, H. P.; Cho, S. B. Effects of Sputtering Pressure on the Characteristics of Lithium Ion Conductive Lithium Phosphorous Oxynitride Thin Film J. Electroceram. 2006, 17, 1023-1030 10.1007/s10832-006-8976-3
34. Orazem, M. E.; Frateur, I.; Tribollet, B.; Vivier, V.; Marcelin, S.; Pebere, N.; Bunge, A. L.; White, E. A.; Riemer, D. P.; Musiani, M. Dielectric Properties of Materials Showing Constant-Phase-Element (CPE) Impedance Response J. Electrochem. Soc. 2013, 160, C215-C225 10.1149/2.033306jes
35. Huggins, R. A. Simple Method to Determine Electronic and Ionic Components of the Conductivity in Mixed Conductors: A Review Ionics 2002, 8, 300-313 10.1007/BF02376083
36. Fu, Z.-W.; Liu, W.-Y.; Li, C.-L.; Qin, Q.-Z.; Yao, Y.; Lu, F. High-k Lithium Phosphorous Oxynitride Thin Films Appl. Phys. Lett. 2003, 83, 5008 10.1063/1.1633011
37. Bard, A. J.; Faulkner, L. R. Electrochemical Methods: Fundamentals and Applications; John Wiley & Sons: New York, 2001.
38. Inaguma, Y.; Liquan, C.; Itoh, M.; Nakamura, T.; Uchida, T.; Ikuta, H.; Wakihara, M. High Ionic Conductivity in Lithium Lanthanum Titanate Solid State Commun. 1993, 86, 689-693 10.1016/0038-1098(93)90841-A
39. Pradel, A.; Pagnier, T.; Ribes, M. Effect of Rapid Quenching on Electrical Properties of Lithium Conductive Glasses Solid State Ionics 1985, 17, 147-154 10.1016/0167-2738(85)90064-5
40. 5 Glasses J. Non-Cryst. Solids 1986, 83, 185-207 10.1016/0022-3093(86)90067-0
41. Martin, S. Ionic Conduction in Phosphate Glasses J. Am. Ceram. Soc. 1991, 74, 1767-1784 10.1111/j.1151-2916.1991.tb07788.x
42. Hartmann, P.; Leichtweiss, T.; Busche, M.; Schneider, M.; Reich, M.; Sann, J.; Adelhelm, P.; Janek, J. Degradation of NASICON-Type Materials in Contact with Lithium Metal: Formation of Mixed Conducting Interphases (MCI) on Solid Electrolytes J. Phys. Chem. C 2013, 117, 21064-21074 10.1021/jp4051275
43. 5 Films Electrochim. Acta 2001, 46, 2041-2046 10.1016/S0013-4686(01)00412-1
44. 5 J. Appl. Phys. 1999, 85, 8199 10.1063/1.370694
45. Nakazawa, H.; Sano, K.; Baba, M.; Kumagai, N. Stability of Thin-Film Lithium-Ion Rechargeable Batteries Fabricated by Sputtering Method without Heating J. Electrochem. Soc. 2015, 162, A392-A397 10.1149/2.0491503jes
46. 5 Negative Electrodes J. Power Sources 2007, 174, 838-842 10.1016/j.jpowsour.2007.06.226
47. Song, S.-W.; Hong, S.-J.; Park, H. Y.; Lim, Y. C.; Lee, K. C. Cycling-Driven Structural Changes in a Thin-Film Lithium Battery on Flexible Substrate Electrochem. Solid-State Lett. 2009, 12, A159-A162 10.1149/1.3139530
48. Martin, A.; O'Sullivan, P.; Mathewson, A. Dielectric Reliability Measurement Methods: A Review Microelectron. Reliab. 1998, 38, 37-72 10.1016/S0026-2714(97)00206-0
49. Lide, D. R., Ed. CRC Handbook of Chemistry and Physics; CRC Press: Boca Raton, FL, 2008.
50. Lima, L. P. B.; Dekkers, H. F. W.; Lisoni, J. G.; Diniz, J. A.; Van Elshocht, S.; De Gendt, S. Metal Gate Work Function Tuning by Al Incorporation in TiN J. Appl. Phys. 2014, 115, 074504 10.1063/1.4866323
51. 4 (x = 0, 0.05, 0.15, 0.25) Phys. Chem. Chem. Phys. 2015, 17, 29045-29056 10.1039/C5CP03916A
52. Honbo, H.; Momose, H. Analyses of Passivation Films on Lithium and Lithium Alloys by Electrochmical Quartz Crystal Microbalance J. Electroanal. Chem. 2010, 638, 269-274 10.1016/j.jelechem.2009.10.035
53. + Couple in the Room Temperature Ionic Liquid N-Butyl-N-methylpyrrolidinium Bis(trifluoromethylsulfonyl)imide in the Temperature Range 298-318 K: A Theoretical and Experimental Study Using Pt and Ni Electrodes J. Phys. Chem. B 2009, 113, 12293-12298 10.1021/jp906128t
54. Glass, A.; Nassau, K.; Negran, T. Ionic conductivity of quenched alkali niobate and tantalate glasses J. Appl. Phys. 1978, 49, 4808 10.1063/1.325509
55. Vereda, F.; Goldner, R.; Haas, T.; Zerigian, P. Rapidly Grown IBAD LiPON Films with High Li-Ion Conductivity and Electrochemical Stability Electrochem. Solid-State Lett. 2002, 5, A239-A241 10.1149/1.1508550
56. + Ion Motion in LiPON Thin Films Solid State Ionics 2013, 253, 151-156 10.1016/j.ssi.2013.09.031