Atomic Layer Deposition of Lithium Phosphorus Oxynitride

Chemistry of Materials

Volumn 27, Issue 20, 2015, Pages 6987-6993

  Nisula, Mikko ^a   Shindo, Yohei ^b   Koga, Hideyuki ^b   Karppinen, Maarit ^a  

^a AALTO UNIVERSITY   (Finland)

^b TOYOTA MOTOR CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTROLYTES; FILM GROWTH; IONIC CONDUCTIVITY; LITHIUM; NITRIDES; NITROGEN; PHOSPHORUS; SOLID ELECTROLYTES; THIN FILM LITHIUM ION BATTERIES; THIN FILMS;

HIGH QUALITY; HOMOGENEOUS FILMS; LI-ION MICROBATTERY; LITHIUM HEXAMETHYLDISILAZIDE; LITHIUM PHOSPHORUS OXYNITRIDE; PHOSPHORAMIDATES; SOLID-STATE ELECTROLYTE; TEMPERATURE WINDOW;

ATOMIC LAYER DEPOSITION;

EID: 84945537760     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/acs.chemmater.5b02199     Document Type: Article

References (30)

1. Long, J. W.; Dunn, B.; Rolison, D. R.; White, H. S. Three-Dimensional Battery Architectures Chem. Rev. 2004, 104, 4463-4492 10.1021/cr020740l
2. Oudenhoven, J. F. M.; Baggetto, L.; Notten, P. H. L. All-Solid-State Lithium-Ion Microbatteries: A Review of Various Three-Dimensional Concepts Adv. Energy Mater. 2011, 1, 10-33 10.1002/aenm.201000002
3. Roberts, M.; Johns, P.; Owen, J.; Brandell, D.; Edstrom, K.; El Enany, G.; Guery, C.; Golodnitsky, D.; Lacey, M.; Lecoeur, C.; Mazor, H.; Peled, E.; Perre, E.; Shaijumon, M. M.; Simon, P.; Taberna, P.-L. 3D Lithium Ion Batteries-from Fundamentals to Fabrication J. Mater. Chem. 2011, 21, 9876 10.1039/c0jm04396f
4. Le Van-Jodin, L.; Ducroquet, F.; Sabary, F.; Chevalier, I. Dielectric Properties, Conductivity and Li+ Ion Motion in LiPON Thin Films Solid State Ionics 2013, 253, 151-156 10.1016/j.ssi.2013.09.031
5. Yu, X.; Bates, J. B.; Jellison, G. E.; Hart, F. X. A Stable Thin-Film Lithium Electrolyte: Lithium Phosphorus Oxynitride J. Electrochem. Soc. 1997, 144, 524 10.1149/1.1837443
6. Zhao, S.; Fu, Z.; Qin, Q. A Solid-State Electrolyte Lithium Phosphorus Oxynitride Film Prepared by Pulsed Laser Deposition Thin Solid Films 2002, 415, 108-113 10.1016/S0040-6090(02)00543-6
7. Kim, H. T.; Mun, T.; Park, C.; Jin, S. W.; Park, H. Y. Characteristics of Lithium Phosphorous Oxynitride Thin Films Deposited by Metal-Organic Chemical Vapor Deposition Technique J. Power Sources 2013, 244, 641-645 10.1016/j.jpowsour.2012.12.109
8. Meng, X.; Yang, X.-Q.; Sun, X. Emerging Applications of Atomic Layer Deposition for Lithium-Ion Battery Studies Adv. Mater. 2012, 24, 3589-3615 10.1002/adma.201200397
9. Aaltonen, T.; Alnes, M.; Nilsen, O.; Costelle, L.; Fjellvåg, H. Lanthanum Titanate and Lithium Lanthanum Titanate Thin Films Grown by Atomic Layer Deposition J. Mater. Chem. 2010, 20, 2877-2881 10.1039/b923490j
10. Hämäläinen, J.; Holopainen, J.; Munnik, F.; Hatanpää, T.; Heikkilä, M.; Ritala, M.; Leskelä, M. Lithium Phosphate Thin Films Grown by Atomic Layer Deposition J. Electrochem. Soc. 2012, 159, A259-A263 10.1149/2.052203jes
11. Wang, B.; Liu, J.; Sun, Q.; Li, R.; Sham, T.-K.; Sun, X. Atomic Layer Deposition of Lithium Phosphates as Solid-State Electrolytes for All-Solid-State Microbatteries Nanotechnology 2014, 25, 504007 10.1088/0957-4484/25/50/504007
12. Liu, J.; Banis, M. N.; Li, X.; Lushington, A.; Cai, M.; Li, R.; Sham, T. K.; Sun, X. Atomic Layer Deposition of Lithium Tantalate Solid-State Electrolytes J. Phys. Chem. C 2013, 117, 20260-20267 10.1021/jp4063302
13. Aaltonen, T.; Nilsen, O.; Magrasó, A.; Fjellvåg, H. Atomic Layer Deposition of Li2O-Al2O3 Thin Films Chem. Mater. 2011, 23, 4669-4675 10.1021/cm200899k
14. Perng, Y.-C.; Cho, J.; Sun, S. Y.; Membreno, D.; Cirigliano, N.; Dunn, B.; Chang, J. P. Synthesis of Ion Conducting Li X Al Y Si Z O Thin Films by Atomic Layer Deposition J. Mater. Chem. A 2014, 2, 9566-9573 10.1039/C3TA14928E
15. Kozen, A. C.; Pearse, A. J.; Lin, C.-F.; Noked, M.; Rubloff, G. W. Atomic Layer Deposition of the Solid Electrolyte LiPON Chem. Mater. 2015, 27, 5324-5331 10.1021/acs.chemmater.5b01654
16. Østreng, E.; Vajeeston, P.; Nilsen, O.; Fjellvåg, H. Atomic Layer Deposition of Lithium Nitride and Carbonate Using Lithium Silylamide RSC Adv. 2012, 2, 6315 10.1039/c2ra20731a
17. Hodges, R.; Sullivan, S. A.; Beauchamp, J. L. Nucleophilic Reactions of Anions with Trimethyl Phosphate in the Gas Phase by Ion Cyclotron Resonance Spectroscopy J. Am. Chem. Soc. 1980, 102, 935-938 10.1021/ja00523a007
18. Fleutot, B.; Pecquenard, B.; Martinez, H.; Letellier, M.; Levasseur, a. Investigation of the Local Structure of LiPON Thin Films to Better Understand the Role of Nitrogen on Their Performance Solid State Ionics 2011, 186, 29-36 10.1016/j.ssi.2011.01.006
19. Senevirathne, K.; Day, C. S.; Gross, M. D.; Lachgar, A.; Holzwarth, N. a W. A New Crystalline LiPON Electrolyte: Synthesis, Properties, and Electronic Structure Solid State Ionics 2013, 233, 95-101 10.1016/j.ssi.2012.12.013
20. Belous, a. G.; V'yunov, O. I.; Kovalenko, L. L.; Bohnke, O.; Bohnke, C. Synthesis of Thin-Film Electrodes Based on LiPON and LiPON-LLTO-LiPON Russ. J. Electrochem. 2014, 50, 523-530 10.1134/S1023193514060020
21. Brooker, M. H.; Bates, J. B. Raman and Infrared Spectral Studies of Anhydrous Li2CO3 and Na2CO3 J. Chem. Phys. 1971, 54, 4788-4796 10.1063/1.1674754
22. Chiang, C.-H.; Ishida, H.; Koenig, J. L. The Structure of Γ-Aminopropyltriethoxysilane on Glass Surfaces J. Colloid Interface Sci. 1980, 74, 396-404 10.1016/0021-9797(80)90209-X
23. Nimisha, C. S.; Rao, G. M.; Munichandraiah, N.; Natarajan, G.; Cameron, D. C. Chemical and Microstructural Modifications in LiPON Thin Films Exposed to Atmospheric Humidity Solid State Ionics 2011, 185, 47-51 10.1016/j.ssi.2011.01.001
24. Roh, N. S.; Lee, S. D.; Kwon, H. S. Effects of Deposition Condition on the Ionic Conductivity and Structure of Amorphous Lithium Phosphorus Oxynitrate Thin Film Scr. Mater. 1999, 42, 43-49 10.1016/S1359-6462(99)00307-3
25. Choi, C. H.; Cho, W. I.; Cho, B. W.; Kim, H. S.; Yoon, Y. S.; Tak, Y. S. Radio-Frequency Magnetron Sputtering Power Effect on the Ionic Conductivities of Lipon Films Electrochem. Solid-State Lett. 2002, 5, A14 10.1149/1.1420926
26. Park, H. Y.; Nam, S. C.; Lim, Y. C.; Choi, K. G.; Lee, K. C.; Park, G. B.; Lee, S.-R.; Kim, H. P.; Cho, S. B. Effects of Sputtering Pressure on the Characteristics of Lithium Ion Conductive Lithium Phosphorous Oxynitride Thin Film J. Electroceram. 2006, 17, 1023-1030 10.1007/s10832-006-8976-3
27. Wang, B.; Kwak, B. S.; Sales, B. C.; Bates, J. B. Ionic Conductivities and Structure of Lithium Phosphorus Oxynitride Glasses J. Non-Cryst. Solids 1995, 183, 297-306 10.1016/0022-3093(94)00665-2
28. Mascaraque, N.; Fierro, J. L. G.; Durán, A.; Muñoz, F. An Interpretation for the Increase of Ionic Conductivity by Nitrogen Incorporation in LiPON Oxynitride Glasses Solid State Ionics 2013, 233, 73-79 10.1016/j.ssi.2012.12.017
29. Morgan, W. E.; Van Wazer, J. R.; Stec, W. J. Inner-Orbital Photoelectron Spectroscopy of the Alkali Metal Halides, Perchlorates, Phosphates, and Pyrophosphates J. Am. Chem. Soc. 1973, 95, 751-755 10.1021/ja00784a018
30. Nowak, S.; Berkemeier, F.; Schmitz, G. Ultra-Thin LiPON Films-Fundamental Properties and Application in Solid State Thin Film Model Batteries J. Power Sources 2015, 275, 144-150 10.1016/j.jpowsour.2014.10.202