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Thin Solid Films

Volumn 519, Issue 10, 2011, Pages 3401-3406

Sputter deposited LiPON thin films from powder target as electrolyte for thin film battery applications

(5) Nimisha, C S a Rao, K Yellareswar a Venkatesh, G a Rao, G Mohan a Munichandraiah, N a

a INDIAN INSTITUTE OF SCIENCE (India)

Author keywords

LiPON thin films; Powder target; Solid electrolyte; X ray photoelectron spectroscopy

Indexed keywords

FLOW CONDITION; HIGH DEPOSITION RATES; LIPON THIN FILMS; OXYNITRIDES; POWDER COMPACTS; POWDER TARGET; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-POWER; SURFACE CHEMICAL ANALYSIS; THIN FILM BATTERY;

CHEMICAL ANALYSIS; ELECTROCHEMICAL CORROSION; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; ELECTRONS; IONIC CONDUCTIVITY; IONS; KURCHATOVIUM; LITHIUM; MAGNETRON SPUTTERING; NITRIDES; PHOSPHORUS; PHOTOELECTRICITY; PHOTONS; THIN FILMS; VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY; X RAYS;

SOLID ELECTROLYTES;

EID: 79952313415 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.01.087 Document Type: Article

Times cited : (83)

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