Atomic Layer Deposition of the Solid Electrolyte LiPON

Chemistry of Materials

Volumn 27, Issue 15, 2015, Pages 5324-5331

  Kozen, Alexander C ^a   Pearse, Alexander J ^a   Lin, Chuan Fu ^a   Noked, Malachi ^a   Rubloff, Gary W ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS MATERIALS; COPPER; DEPOSITION; ELECTRODES; ELECTROLYTES; NITROGEN; OPTIMIZATION; SOLID ELECTROLYTES; SPECTROSCOPIC ELLIPSOMETRY;

BATTERY ELECTRODE; CURRENT COLLECTOR; NITROGEN CONTENT; NITROGEN INCORPORATION; POLYCRYSTALLINE; SUBSTRATE PRECURSORS; TERT-BUTOXIDE; TRIMETHYLPHOSPHATE;

ATOMIC LAYER DEPOSITION;

EID: 84939167544     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/acs.chemmater.5b01654     Document Type: Article

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