Lithium phosphorus oxynitride thin film fabricated by a nitrogen plasma-assisted deposition of E-beam reaction evaporation

Electrochemical and Solid-State Letters

Volumn 7, Issue 9, 2004, Pages

  Liu, Wen Yuan ^a   Fu, Zheng Wen ^a   Li, Chi Lin ^a   Qin, Qi Zong ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC IMPEDANCE; EVAPORATION; INDUCTIVELY COUPLED PLASMA; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SPECTROSCOPIC ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRICAL PROPERTIES; IMPEDANCE SPECTROSCOPY; PLASMA-ASSISTED DEPOSITION;

THIN FILMS;

EID: 5044235419     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1778934     Document Type: Article

References (15)

1. M. Wakihara and O. Yamamoto, Lithium Ion Batteries, Wiley, New York (1998).
2. M. Balkanski, Sol. Energy Mater. Sol. Cells, 62, 21 (2000).
3. J. B. Bates, N. J. Dudney, G. R. Gruzalski, R. A. Zuhr, A. Choudhury, C. F. Luck, and J. D. Robertson, Solid State Ionics, 53-56, 647 (1992).
4. J. B. Bates, N. J. Dudney, G. R. Gruzalski, R. A. Zuhr, A. Choudhury, C. F. Luck, and J. D. Robertson, J. Power Sources, 43, 103 (1993).
5. F. Vereda, N. Clay, A. Gerouki, R. B. Goldner, T. Haas, and P. Zerigian, J. Power Sources, 89, 201 (2000).
6. S. L. Zhao, Z. W. Fu, and Q. Z. Qin, Thin Solid Films, 415, 108 (2002).
7. X. Yu, J. B. Bates, G. E. Jellison, Jr., and F. X. Hart, J. Electrochem. Soc., 144, 524 (1997).
8. Z. W. Fu and Q. Z. Qin, J. Phys. Chem. B, 104, 5505 (2000).
9. G. Frenning, M. Nilsson, J. Westlinder, G. A. Niklasson, and M. S. Mattsson, Electrochim. Acta, 46, 2041 (2001).
10. C. D. Wagner, W. M. Riggs, L. E. Davis, J. F. Moulder, and G. E. Muilenberg, Handbook of X-Ray Photoelectron Spectroscopy, Perkin-Elmer Corp. Physical Electronics Division, Eden Prairie, MN (1992).
11. S. Veprek, S. Iqbal, and J. Brunner, Philos. Mag., 43, 527 (1981).
12. G. R. Fowles, Introduction to Modern Optics, Dover, New York (1975).
13. J. I. Pankove, Optical Processes in Semiconductors, Dover, New York (1971).
14. P. Awakowicz, R. Schwefel, M. Werder, and W. Kasper, Diamond Relat. Mater., 6, 1816 (1997).
15. H. K. Kim, T. Y. Seong, and Y. S. Yoon, J. Vac. Sci. Technol. B, 21, 754 (2003).