Sputtered titanium nitride: A bifunctional material for Li-ion microbatteries

Journal of the Electrochemical Society

Volumn 162, Issue 4, 2015, Pages A493-A500

  Freixas, Jeremy ^a,b   Eustache, Etienne ^a,b,c   Roussel, Pascal ^d   Brillard, Charlene ^a   Deresmes, Dominique ^a   Nuns, Nicolas ^d   Rolland, Nathalie ^a,b,c   Brousse, Thierry ^c   Lethiena, Christophe ^a,b,c  

^a INSTITUT D ELECTRONIQUE   (France)

^b UMR National Center for Scientific Research   (France)

^c CNRS   (France)

^d UNITÉ DE CATALYSE ET DE CHIMIE DU SOLIDE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; DEPOSITION; DIFFUSION BARRIERS; ELECTRODES; GOLD DEPOSITS; IONS; LITHIUM; LITHIUM ALLOYS; LITHIUM COMPOUNDS; MINIATURE BATTERIES; SILICON; SILICON WAFERS; SURFACE ROUGHNESS; THIN FILMS; TITANIUM COMPOUNDS; TITANIUM NITRIDE;

BIFUNCTIONAL MATERIALS; COLUMNAR MORPHOLOGY; DEPTH-PROFILE ANALYSIS; GALVANOSTATIC CHARGE/DISCHARGE; LI-ION MICROBATTERIES; LITHIUM ION DIFFUSION; LOW SURFACE ROUGHNESS; SPUTTERING TECHNIQUES;

THIN FILM LITHIUM ION BATTERIES;

EID: 84923338220     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/2.0051504jes     Document Type: Article

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