Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film

Journal of Electroceramics

Volumn 17, Issue 2-4, 2006, Pages 1023-1030

  Park, Ho Young ^a   Nam, Sang Cheol ^a   Lim, Young Chang ^a   Choi, Kyu Gil ^a   Lee, Ki Chang ^a   Park, Gi Back ^a   Lee, Seong Rae ^b   Kim, Heesook Park ^c   Cho, Sung Baek ^d  

^a Nuricell Inc   (South Korea)

^b Korea University   (South Korea)

^c Kookmin University   (South Korea)

^d Agency for Defence Development   (South Korea)

Author keywords

Lipon; Nitrogen pressure; Solid electrolyte; Sputtering; Thin film battery

Indexed keywords

ELECTROLYTES; FILM GROWTH; HIGH PRESSURE EFFECTS; IONIC CONDUCTION; LITHIUM COMPOUNDS; PHOSPHATES;

ELECTROCHEMICAL STABILITY; LIPON; NITROGEN PRESSURE; REACTIVE SPUTTERING; SPUTTERING PRESSURE; THIN FILM BATTERIES;

THIN FILMS;

EID: 33847213237     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-006-8976-3     Document Type: Conference Paper

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