High Dynamic Range Pixel Array Detector for Scanning Transmission Electron Microscopy

Microscopy and Microanalysis

Volumn 22, Issue 1, 2016, Pages 237-249

  Tate, Mark W ^a   Purohit, Prafull ^a   Chamberlain, Darol ^b   Nguyen, Kayla X ^c   Hovden, Robert ^c   Chang, Celesta S ^c   Deb, Pratiti ^c   Turgut, Emrah ^c   Heron, John T ^c   Schlom, Darrell G ^c   Ralph, Daniel C ^a,c   Fuchs, Gregory D ^c   Shanks, Katherine S ^a   Philipp, Hugh T ^a   Muller, David A ^c   Gruner, Sol M ^a,b,c  

^a Laboratory of Atomic and Solid State Physics and Sibley School of Mechanical and Aerospace Engineering   (United States)

^b Kavli Institute at Cornell for Nanoscale Science ^*  (United States)

^c School of Operations Research and Industrial Engineering   (United States)

Author keywords

electron microscope pixel array detector (EMPAD); high dynamic range; mixed mode pixel array detector (MM PAD); pixel array detector (PAD); STEM

Indexed keywords

DEVICES; FLUORESCENCE IMAGING; IMAGE PROCESSING; PROCEDURES; SCANNING TRANSMISSION ELECTRON MICROSCOPY;

IMAGE PROCESSING, COMPUTER-ASSISTED; MICROSCOPY, ELECTRON, SCANNING TRANSMISSION; OPTICAL IMAGING;

EID: 84959086007     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927615015664     Document Type: Article

References (39)

1. ANGELLO, A. G., AUGUSTINE, F., ERCAN, A., GRUNER, S., HAMLIN, R., HONTZ, T., RENZI, M., SCHUETTE, D., TATE, M. & VERNON, W. (2004). Development of a mixed-mode pixel array detector for macromolecular crystallography. IEEE Nucl Sci Symp 7, 4667-4671.
2. BATTAGLIA, M., CONTARATO, D., DENES, P., DOERING, D., GIUBILATO, P., KIM, T. S., MATTIAZZO, S., RADMILOVIC, V. & ZALUSKY, S. (2009). A rad-hard CMOS active pixel sensor for electron microscopy. Nucl Instrum Methods Phys Res A 598(2), 642-649.
3. BOYLE, W. S. & SMITH, G. E. (1970). Charge coupled semiconductor devices. Bell Syst Tech J 49(4), 587-593.
4. CASWELL, T. A., ERCIUS, P., TATE, M. W., ERCAN, A., GRUNER, S. M. & MULLER, D. A. (2009). A high-speed area detector for novel imaging techniques in a scanning transmission electron microscope. Ultramicroscopy 109(4), 304-311.
5. CHAPMAN, J. N. (1984). The investigation of magnetic domainstructures in thin foils by electron-microscopy. J Phys D Appl Phys 17(4), 623-647.
6. CHAPMAN, J. N., BATSON, P. E., WADDELL, E. M. & FERRIER, R. P. (1978). The direct determination of magnetic domain wall profiles by differential phase contrast electron microscopy. Ultramicroscopy 3(0), 203-214.
7. COWLEY, J. M. (1993). Configured detectors for STEM imaging of thin specimens. Ultramicroscopy 49(1-4), 4-13.
8. DEKKERS, N. H. & LANG, H. D. (1974). Differential phase-contrast in a STEM. Optik 41(4), 452-456.
9. FAN, G. Y., DATTE, P., BEUVILLE, E., BECHE, J. F., MILLAUD, J., DOWNING, K. H., BURKARD, F. T., ELLISMAN, M. H. & XUONG, N. H. (1998). ASIC-based event-driven 2D digital electron counter for TEM imaging. Ultramicroscopy 70(3), 107-113.
10. FAN, G. Y. & ELLISMAN, M. H. (2000). Digital imaging in transmission electron microscopy. J Microsc 200, 1-13.
11. FARUQI, A. R., CATTERMOLE, D. M., HENDERSON, R., MIKULEC, B. & RAEBURN, C. (2003). Evaluation of a hybrid pixel detector for electron microscopy. Ultramicroscopy 94(3-4), 263-276.
12. FARUQI, A. R., HENDERSON, R. & TLUSTOS, L. (2005). Noiseless direct detection of electrons in Medipix2 for electron microscopy. Nucl Instrum Methods Phys Res A 546(1-2), 160-163.
13. GAUVIN, R., LIFSHIN, E., DEMERS, H., HORNY, P. & CAMPBELL, H. (2006). Win X-ray: A new Monte Carlo program that computes X-ray spectra obtained with a scanning electron microscope. Microsc Microanal 12(01), 49-64.
14. JIN, L., MILAZZO, A. C., KLEINFELDER, S., LI, S. D., LEBLANC, P., DUTTWEILER, F., BOUWER, J. C., PELTIER, S. T., ELLISMAN, M. H. & XUONG, N. H. (2008). Applications of direct detection device in transmission electron microscopy. J Struct Biol 161(3), 352-358.
15. KIMOTO, K. & ISHIZUKA, K. (2011). Spatially resolved diffractometry with atomic-column resolution. Ultramicroscopy 111(8), 1111-1116.
16. LEBEAU, J. M., FINDLAY, S. D., ALLEN, L. J. & STEMMER, S. (2010). Standardless atom counting in scanning transmission electron microscopy. Nano Lett 10(11), 4405-4408.
17. LUBK, A. & ZWECK, J. (2015). Differential phase contrast: An integral perspective. Phys Rev A 91(2), 023805.
18. MACLAREN, I., WANG, L. Q., MCGROUTHER, D., CRAVEN, A. J., MCVITIE, S., SCHIERHOLZ, R., KOVACS, A., BARTHEL, J. & DUNIN-BORKOWSKI, R. E. (2015). On the origin of differential phase contrast at a locally charged and globally charge-compensated domain boundary in a polar-ordered material. Ultramicroscopy 154, 57-63.
19. MAJERT, S. & KOHL, H. (2015). High-resolution STEM imaging with a quadrant detector conditions for differential phase contrast microscopy in the weak phase object approximation. Ultramicroscopy 148, 81-86.
20. MCGROUTHER, D., KRAJNAK, M., MACLAREN, I., MANEUSKI, D., O'SHEA, V. & NELLIST, P. D. (2015). Use of a hybrid silicon pixel (Medipix) detector as a STEM detector. Microsc Microanal 21(Suppl S3), 1595-1596.
21. MCMULLAN, G., CHEN, S., HENDERSON, R. & FARUQI, A. R. (2009). Detective quantum efficiency of electron area detectors in electron microscopy. Ultramicroscopy 109(9), 1126-1143.
22. MCMULLAN, G., FARUQI, A. R., CLARE, D. & HENDERSON, R. (2014). Comparison of optimal performance at 300 keV of three direct electron detectors for use in low dose electron microscopy. Ultramicroscopy 147, 156-163.
23. MEYER, R. R. & KIRKLAND, A. (1998). The effects of electron and photon scattering on signal and noise transfer properties of scintillators in CCD cameras used for electron detection. Ultramicroscopy 75(1), 23-33.
24. MILAZZO, A.-C., LEBLANC, P., DUTTWEILER, F., JIN, L., BOUWER, J. C., PELTIER, S., ELLISMAN, M., BIESER, F., MATIS, H. S., WIEMAN, H., DENES, P., KLEINFELDER, S. & XUONG, N.-H. (2005). Active pixel sensor array as a detector for electron microscopy. Ultramicroscopy 104(2), 152-159.
25. MULLER, K., KRAUSE, F. F., BECHE, A., SCHOWALTER, M., GALIOIT, V., LOFFLER, S., VERBEECK, J., ZWECK, J., SCHATTSCHNEIDER, P. & ROSENAUER, A. (2014). Atomic electric fields revealed by a quantum mechanical approach to electron picodiffraction. Nat Commun 5, 5653 (1-6).
26. OZDOL, V. B., GAMMER, C., JIN, X. G., ERCIUS, P., OPHUS, C., CISTON, J. & MINOR, A. M. (2015). Strain mapping at nanometer resolution using advanced nano-beam electron diffraction. Appl Phys Lett 106(25), article no. 253107, pp. 1-4.
27. PENNYCOOK, T. J., LUPINI, A. R., YANG, H., MURFITT, M. F., JONES, L. & NELLIST, P. D. (2015). Efficient phase contrast imaging in STEM using a pixelated detector. Part 1: Experimental demonstration at atomic resolution. Ultramicroscopy 151, 160-167.
28. ROSE, H. (1974). Phase-contrast in scanning-transmission electronmicroscopy. Optik 39(4), 416-436.
29. ROSE, H. (1976). Nonstandard imaging methods in electron microscopy. Ultramicroscopy 2, 251-267.
30. SCHUETTE, D. R. (2008). A mixed analog and digital pixel array detector for synchrotron X-ray imaging. PhD Thesis. Cornell University, Ithaca, NY, USA.
31. TAKAHASHI, Y. & YAJIMA, Y. (1994). Nonmagnetic contrast in scanning Lorentz electron microscopy of polycrystalline magnetic films. J Appl Phys 76(12), 7677-7681.
32. TATE, M. W., CHAMBERLAIN, D., GREEN, K. S., PHILIPP, H. T., PUROHIT, P., STROHMAN, C. & GRUNER, S. M. (2013). A medium-format, mixedmode pixel array detector for kilohertz X-ray imaging. 11th International Conference on Synchrotron Radiation Instrumentation (SRI 2012) 425, 062004.
33. THOMPSON, R. E., LARSON, D. R. & WEBB, W. W. (2002). Precise nanometer localization analysis for individual fluorescent probes. Biophys J 82(5), 2775-2783.
34. VERNON, W., ALLIN, M., HAMLIN, R., HONTZ, T., NGUYEN, D., AUGUSTINE, F., GRUNER, S. M., XUONG, N. H., SCHUETTE, D. R., TATE, M. W. & KOERNER, L. J. (2007). First results from the 128x128 pixel mixed-mode Si X-ray detector chip. Hard X-Ray Gamma-Ray Detector Phys IX 6706, U7060.
35. WADDELL, E. M. &CHAPMAN, J. N. (1979). Linear imaging of strong phase objects using asymmetrical detectors in STEM. Optik 54(2), 83-96.
36. YAJIMA, Y. (2009). Lorentz scanning transmission electron microscopy (lorentz STEM): Model analyses of detector performance. Bull Col Edu Ibaraki Univ (Nat Sci) 58, 19-24.
37. YANG, H., PENNYCOOK, T. J. & NELLIST, P. D. (2015). Efficient phase contrast imaging in STEM using a pixelated detector. Part II: Optimisation of imaging conditions. Ultramicroscopy 151, 232-239.
38. ZALUZEC, N. J. (2002). Quantitative measurements of magnetic vortices using position resolved diffraction in lorentz STEM. Microsc Microanal 8(Suppl S02), 376-377.
39. ZUO, J. M. (2000). Electron detection characteristics of a slow-scan CCD camera, imaging plates and film, and electron image restoration. Microsc Res Tech 49(3), 245-268.