Optical characterization of industrial slurries

KONA Powder and Particle Journal

Volumn 2016, Issue 33, 2016, Pages 310-321

  potenza, Marco ^b,c   sanvito, Tiziano ^b,c   fazio, Giuseppe ^d  

^a UNIVERSITY OF MILAN   (Italy)

^b CIMAINA   (Italy)

^c Eos Srl   (Italy)

^d ST Miscroelectronics   (Italy)

Author keywords

Ceria; CMP; Light scattering; Particle sizing; Slurries

Indexed keywords

CERIUM COMPOUNDS; CHARACTERIZATION; CHEMICAL DETECTION; CHEMICAL POLISHING; INTELLIGENT CONTROL; LIGHT SCATTERING; SLURRIES;

ACCURATE MEASUREMENT; ADVANCED PROCESS CONTROL; DATA INTERPRETATION; FUTURE IMPROVEMENTS; LOCAL PLANARIZATION; OPTICAL CHARACTERIZATION; PARTICLE SIZING; SCATTERING INFORMATION;

CHEMICAL MECHANICAL POLISHING;

EID: 84957103415     PISSN: 02884534     EISSN: 21875537     Source Type: Journal    
DOI: 10.14356/kona.2016016     Document Type: Article

References (45)

1. Basim G.B., Adler J.J., Mahajan U., Singh R.K., Moudgil B.M., Effect of particle size of chemical mechanical polishing slurries for enhanced polishing with minimal defects, Journal of The Electrochemical Society, 147 (2000) 3523-3528. doi:10.1149/1.1393931
2. Basim G.B., Moudgil B.M., Effect of Soft Agglomerates on CMP Slurry Performance, Journal of Colloid and Interface Science, 256 (2002) 137-142.
3. Bassini A., Musazzi S., Paganini E., Perini U.U., Ferri F., Giglio M., Optical particle sizer based on the Chahine inversion scheme, Optical Engineering, 31 (1992) 1112-1117. doi: 10.1117/12.56158
4. Batchelder J.S., Taubenblatt M.A., Measurement of the size and refractive index of a small particle using the complex forward-scattered electromagnetic field, Appl. Opt., 30 (1991) 4972-4979.
5. Batchelder J.S., Taubenblatt M.A., Measurement of the size and refractive index of particles using the complex forward-scattered electromagnetic field, US Patent (1990) 547735.
6. Bohren C.F., Huffmann D.R., Absorption and Scattering by Small Particles, Wiley, N.Y., 1983.
7. Borghese F., Denti P., Saija R., Scattering from Model Nonspherical Particles, Springer-Verlag Berlin-Heidelberg, 2003.
8. Budge J., Benefits and Limitations of Slurry Particle Analysis and the Need for Next Generation Capabilities, 5th Annual Levitronix CMPUG Symposium, 2009.
9. Budge J., Challenges of Large Particle Size Analysis in CMP Slurries, and Opportunities for Improved Reliability, 29th European CMP Users Symposium Spring, 2013.
10. Chylek P., Grams G.W., Pinninck R.G., Light Scattering by Irregular Randomly Oriented Particles, Science, 193 (1976) 480-482
11. Cumbo M.J., Fairhurst D., Jacobs S.D., Puchebner B.E., Slurry particle size evolution during the polishing of optical glass, Applied Optics, 34 (1995) 3743-3755. doi: 10.1364/AO.34. 003743
12. Denardis D., Choi H., Kim A., Moinpour M., Oehler A., Investigating the effects of diluting solutions and trace metal contamination on aggregation characteristics of silica-based ILD CMP slurries, MRS Online Proceedings Library, 867 (2005) W7.9. doi:10.1557/PROC-867-W7.9.
13. Gebhart J., Response of Single-Particle Optical Counters to Particles of irregular shape, Particle & Particle System Characterization, 8 (1991) 40-47.
14. Ghosal S., Weber P.K., Laskin A., Spatially resolved chemical imaging of individual atmospheric particles using nanoscale imaging mass spectrometry: Insighs into particle origin and chemistry, Analytical Methods, 6 (2014) 2413-2792.
15. Giglio M., Potenza M.A.C., A method for measuring properties of particles by means of interference fringe analysis and corresponding apparatus, Patent IT (2004) TO20040100; PCT/IB2005/000411
16. Giglio M., Potenza M.A.C., A method for measuring properties of particles and corresponding apparatus, PCT Patent (2005) PCT/IT2005/00362
17. Heim M., Mullins B.J., Umhauer H., Kasper G., Performance evaluation of three optical particle counters with an efficient "multimodal" calibration method, Journal of Aerosol Science, 39 (2008) 1019-1031. doi:10.1016/j.jaerosci.2008. 07.006
18. Hipp A.K, Storti G., Morbidelli M., Particle Sizing in Colloidal Dispersions by Ultrasound. Model Calibration and Sensitivity Analysis, Langmuir, 15 (1999) 2338-2345.
19. ITRS (International Technology Roadmap for Semiconductors), ITRS Industry Goals for Particle Measurements in UPW and Liquid Chemicals, accessed 2.09.2015
20. ITRS (International Technology Roadmap for Semiconductors), ITRS Yield Enhancement 2009 Edition, accessed 2.09.2015
21. Li Y., Microelectronic Applications of Chemical Mechanical Planarization, Wiley and Sons, 2008.
22. Liu Y., Daum P.H., The effect of refractive index on size distri butions and light scattering coefficients derived from optical particle counters, J. Aerosol Sci., 31 (2000) 945-957.
23. Mavliev R., Method and apparatus for detecting individual particles in a flowable sample, US Patent (2004) 6710874 B2
24. Merricks D., Santora B., Her B., Zedwick C., Evolution and Revolution of Cerium Oxide Slurries in CMP (2008) doi: http://www.ferro.com/nr/rdonlyres/b92195ab-8d53-4bb4-8f49-078c6763f859/0/istc2008.pdf
25. Mishchenko M.I., Hovenier J.W., Travis L.D., Light Scattering by Nonspherical Particles: Theory, Measurements, and Applications, Academic Press, San Diego, 1999.
26. Pate K., Tregub A., Characterization of abrasive particle distribution in CMP slurries, ICPT2011 Conference, 2011.
27. Potenza M.A.C., Sabareesh K.P.V., Carpineti M., Alaimo M.D., Giglio M., How to measure the optical thickness of scattering particles from the phase delay of scattered waves: Application to turbid samples, Physical Review Letters, 105 (2010) 193901.doi: 10.1103/PhysRevLett.105.193901
28. Potenza M.A.C., Milani P., Free nanoparticle characterization by optical scattering field analysis: opportunities and perspectives, JNR, 16 (2014) 2680.
29. Potenza M.A.C., Sanvito T., Pullia A., Accurate Sizing of Ceria Oxide Nanoparticles in Slurries by the Analysis of the Optical Forward Scattered Field, JNR, 17 (2015) 110.
30. Potenza M.A.C., Sanvito T., Pullia A., Measuring the Complex Field Scattered by Single Submicron Particles, submitted to Applied Physics Letters (2015b)
31. Pelssers E.G.M., Cohen M.A., Fleer G.J., Single Particle Optical Sizing (SPOS): I. Design and improved SPOS instrument and application to stable dispersions, Journal of Colloid and Interface Science, 137 (1990) 350-361.
32. Remsen E.E., Anjur S., Boldridge D., Kamiti M., Li S., Johns T., Dowell C., Kasthurirangan J., Feeney P., Analysis of large particle count in fumed silica slurries and its correlation with scratch defects generated by CMP, Journal of The Electrochemical Society, 153 (2006) G453-G461. doi: 10.1149/1.2184036
33. Ruth U., Concentration and size distribution of microparticles in the NGRIP Ice Core (Central Greenland) during the last glacial period. PhD Dissertation at Department of Geosciences of the University of Bremen. Published as Report n. 428 of the Berichte zur Polar-und Meeresforschung (2002) (ISSN 1618-3193). Available at: http://www.ub.uni-heidelberg. de/archiv/2291
34. -3, Aerosol Science, 29 (1998) 1075-1086.
35. Seo Y.J., Methodological Study on the Recycle of Oxide-Chemical Mechanical Polishing Slurry, Journal of the Korean Physical Society, 50 (2007) 700-707.
36. Sultanova N., Kasarova S., Nikolov I., Dispersion properties of optical polymers, Acta Physica Polonica A, 116 (2009) 585-587.
37. Szczurowski M., (2014) private communication.
38. Terrell E., Beal D., Gromala J., Understanding Liquid Particle Counters. PMS Inc. Boulder, Colorado, 2006.
39. Testa F., Coetsier C., Carretier E., Ennahali M., Laborie B., Serafino C., Bulgarelli F., Moulin P., Retreatment of silicon slurry by membrane processes, Journal of Hazardous Materials, 192 (2011) 440-450. doi: 10.1016/j.jhazmat.2011. 05.016
40. Testa F., Coetsier C., Carretier E., Ennahali M., Laborie B., Moulin P., Recycling a slurry for reuse in chemical mechanical planarization of tungsten wafer: Effect of chemical adjustments and comparison between static and dynamic experiments, Microelectronic Engineering, 113 (2014) 114-122. doi: 10.1016/j.mee.2013.07.022
41. Tinke A.P., Carnicer A., Govoreanu R., Scheltjens G., Lauwerysen L., Mertens N., Vanhoutte K., Brewster M.E., Particle shape and orientation in laser diffraction and static image analysis size distribution analysis of micrometer sized rectangular particles, Powder Technology, 186 (2008) 154-167. doi: 10.1016/j.powtec.2007.11.017
42. Van de Hulst H.C., Light Scattering by Small Particles, Dover N.Y, 1957.
43. Wells D., Nicoli D., Single-particle optical sensor with improved sensitivity and dynamic size range, US Patent (1996) 5835211 A
44. Whitby K.T., Vomela R.A., Response of Single Particle Optical Counters to Nonideal Particles, Environmental Science and Technology, 10 (1967) 801-814.
45. Zelenyuk A., Cai L., Imre D., From agglomerates of spheres to irregularly shaped particles: Determination of dynamic shape factors from measurements of mobility and vacuum aerodynamic diameters, Aerosol Sci Technol, 40 (2006) 197-217.