-
1
-
-
0036973181
-
Effect of soft agglomerates on CMP slurry performance
-
Basim GB, Moudgil BM (2002) Effect of soft agglomerates on CMP slurry performance. J Colloid Interface Sci 256:137–142
-
(2002)
J Colloid Interface Sci
, vol.256
, pp. 137-142
-
-
Basim, G.B.1
Moudgil, B.M.2
-
2
-
-
0034275460
-
Effect of particle size of chemical mechanical polishing slurries for enhanced polishing with minimal defects
-
Basim GB, Adler JJ, Mahajan U, Singh RK, Moudgil BM (2000) Effect of particle size of chemical mechanical polishing slurries for enhanced polishing with minimal defects. J Electrochem Soc 147:3523–3528
-
(2000)
J Electrochem Soc
, vol.147
, pp. 3523-3528
-
-
Basim, G.B.1
Adler, J.J.2
Mahajan, U.3
Singh, R.K.4
Moudgil, B.M.5
-
3
-
-
0000325076
-
Optical particle sizer based on the Chahine inversion algorithm
-
Bassini A, Musazzi S, Paganini E, Perini U, Ferri F, Giglio M (1992) Optical particle sizer based on the Chahine inversion algorithm. Opt Eng 31:1112–1117
-
(1992)
Opt Eng
, vol.31
, pp. 1112-1117
-
-
Bassini, A.1
Musazzi, S.2
Paganini, E.3
Perini, U.4
Ferri, F.5
Giglio, M.6
-
4
-
-
0006786678
-
Measurement of the size and refractive index of a small particle using the complex forward-scattered electromagnetic field
-
Batchelder JS, Taubenblatt MA (1991) Measurement of the size and refractive index of a small particle using the complex forward-scattered electromagnetic field. Appl Opt 30:4972–4979
-
(1991)
Appl Opt
, vol.30
, pp. 4972-4979
-
-
Batchelder, J.S.1
Taubenblatt, M.A.2
-
7
-
-
84928406577
-
Benefits and limitations of slurry particle analysis and the need for next generation capabilities
-
Budge J (2009) Benefits and limitations of slurry particle analysis and the need for next generation capabilities. 5th Annual Levitronix CMPUG Symposium
-
(2009)
5th Annual Levitronix CMPUG Symposium
-
-
Budge, J.1
-
8
-
-
84928405595
-
Challenges of large particle size analysis in CMP Slurries, and opportunities for improved reliability
-
Budge J (2013) Challenges of large particle size analysis in CMP Slurries, and opportunities for improved reliability. 29th European CMP users symposium spring 2013
-
(2013)
29th European CMP users symposium spring 2013
-
-
Budge, J.1
-
9
-
-
0013150954
-
Light scattering by irregular randomly oriented particles
-
Chylek P, Grams GW, Pinninck RG (1976) Light scattering by irregular randomly oriented particles. Science 193:480–482
-
(1976)
Science
, vol.193
, pp. 480-482
-
-
Chylek, P.1
Grams, G.W.2
Pinninck, R.G.3
-
10
-
-
0000710305
-
Slurry particle size evolution during the polishing of optical glass
-
Cumbo MJ, Fairhurst D, Jacobs SD, Puchebner BE (1995) Slurry particle size evolution during the polishing of optical glass. Appl Opt 34:3743–3755
-
(1995)
Appl Opt
, vol.34
, pp. 3743-3755
-
-
Cumbo, M.J.1
Fairhurst, D.2
Jacobs, S.D.3
Puchebner, B.E.4
-
11
-
-
70349338638
-
Scattering from anisotropic particles: a challenge for the optical theorem?
-
Degiorgio V, Potenza MAC, Giglio M (2009) Scattering from anisotropic particles: a challenge for the optical theorem? Eur Phys J E 29:379–382
-
(2009)
Eur Phys J E
, vol.29
, pp. 379-382
-
-
Degiorgio, V.1
Potenza, M.A.C.2
Giglio, M.3
-
12
-
-
30544450343
-
Investigating the effects of diluting solutions and trace metal contamination on aggregation characteristics of silica-based ILD CMP slurries. In: MRS Proceedings, vol 867, pp W7–W9
-
DeNardis D, Choi H, Kim A, Moinpour M and Oehler A (2005) Investigating the effects of diluting solutions and trace metal contamination on aggregation characteristics of silica-based ILD CMP slurries. In: MRS Proceedings, vol 867, pp W7–W9. doi:10.1557/PROC-867-W7.9
-
(2005)
-
-
DeNardis, D.1
Choi, H.2
Kim, A.3
Moinpour, M.4
Oehler, A.5
-
13
-
-
34250769340
-
A new microscopic principle
-
Gabor D (1948) A new microscopic principle. Nature 161:777–778
-
(1948)
Nature
, vol.161
, pp. 777-778
-
-
Gabor, D.1
-
14
-
-
0026119632
-
Response of single-particle optical counters to particles of irregular shape
-
Gebhart J (1991) Response of single-particle optical counters to particles of irregular shape. Part Part Syst Charact 8:40–47
-
(1991)
Part Part Syst Charact
, vol.8
, pp. 40-47
-
-
Gebhart, J.1
-
15
-
-
84928399383
-
A method for measuring properties of particles by means of interference fringes and corresponding apparatus
-
Giglio M, Potenza MAC (2004) A method for measuring properties of particles by means of interference fringes and corresponding apparatus. Patent TO2004A000100
-
(2004)
Patent TO2004A000100
-
-
Giglio, M.1
Potenza, M.A.C.2
-
16
-
-
84928402448
-
A method for measuring properties of particles and corresponding apparatus
-
Giglio M, Potenza MAC (2005) A method for measuring properties of particles and corresponding apparatus. Patent PCT/IT2005/00362
-
(2005)
Patent PCT/IT2005/00362
-
-
Giglio, M.1
Potenza, M.A.C.2
-
18
-
-
55949133707
-
Performance evaluation of three optical counters with an efficient “multimodal” calibration method
-
Heim M, Mullins BJ, Umhauer H, Kasper G (2008) Performance evaluation of three optical counters with an efficient “multimodal” calibration method. Aerosol Sci 39:1019–1031
-
(2008)
Aerosol Sci
, vol.39
, pp. 1019-1031
-
-
Heim, M.1
Mullins, B.J.2
Umhauer, H.3
Kasper, G.4
-
20
-
-
0034101006
-
The effect of refractive index on size distributions and light scattering coefficients derived from optical particle counters
-
Liu Y, Daum PH (2000) The effect of refractive index on size distributions and light scattering coefficients derived from optical particle counters. J Aerosol Sci 31:945–957
-
(2000)
J Aerosol Sci
, vol.31
, pp. 945-957
-
-
Liu, Y.1
Daum, P.H.2
-
21
-
-
84928389047
-
Method and apparatus for detecting individual particles in a flowable sample
-
6710874
-
Mavliev R (2004) Method and apparatus for detecting individual particles in a flowable sample. US Patent 6710874 B2
-
(2004)
US Patent
, pp. 2
-
-
Mavliev, R.1
-
22
-
-
84928409903
-
-
Zedwick C: Evolution and revolution of cerium oxide slurries in CMP
-
Merricks D, Santora B, Her B, Zedwick C (2008) Evolution and revolution of cerium oxide slurries in CMP. http://www.ferro.com/nr/rdonlyres/b92195ab-8d53-4bb4-8f49-078c6763f859/0/istc2008.pdf
-
(2008)
Her B
-
-
Merricks, D.1
Santora, B.2
-
23
-
-
0003596049
-
-
Academic Press, San Diego:
-
Mishchenko MI, Hovenier JW, Travis LD (1999) Light scattering by nonspherical particles: theory, measurements, and applications. Academic Press, San Diego
-
(1999)
Light scattering by nonspherical particles: theory, measurements, and applications
-
-
Mishchenko, M.I.1
Hovenier, J.W.2
Travis, L.D.3
-
24
-
-
84928384875
-
Analysis of wafer defects caused by large particles in CMP slurry using light scattering and sem measurement
-
CMP-MIC, Marina Del Ray, CA:
-
Nicholes K, Litchy MR, Grant DC, Hood E, Easter G, Bhethanabotla VR (2003) Analysis of wafer defects caused by large particles in CMP slurry using light scattering and sem measurement. In: Proceedings of the eighth international chemical-mechanical planarization for ULSI multilevel interconnection conference (CMP-MIC). Marina Del Ray, CA
-
(2003)
In: Proceedings of the eighth international chemical-mechanical planarization for ULSI multilevel interconnection conference
-
-
Nicholes, K.1
Litchy, M.R.2
Grant, D.C.3
Hood, E.4
Easter, G.5
Bhethanabotla, V.R.6
-
25
-
-
84928403538
-
Characterization of abrasive particle distribution in CMP slurries
-
Pate K, Tregub A (2011) Characterization of abrasive particle distribution in CMP slurries. ICPT2011 Conference
-
(2011)
ICPT2011 Conference
-
-
Pate, K.1
Tregub, A.2
-
26
-
-
0345169985
-
Structure-dependent electronic properties of nanocrystalline cerium oxide films
-
Patsalas P, Logothetidis S, Sygellou L, Kennou S (2003) Structure-dependent electronic properties of nanocrystalline cerium oxide films. Phys Rev B 68:035104
-
(2003)
Phys Rev B
, vol.68
, pp. 035104
-
-
Patsalas, P.1
Logothetidis, S.2
Sygellou, L.3
Kennou, S.4
-
27
-
-
0025460437
-
Single particle optical sizing (SPOS): I. Design and improved SPOS instrument and application to stable dispersions
-
Pelssers EGM, Cohen MA, Fleer GJ (1990) Single particle optical sizing (SPOS): I. Design and improved SPOS instrument and application to stable dispersions. J Colloid Interface Sci 137:350–361
-
(1990)
J Colloid Interface Sci
, vol.137
, pp. 350-361
-
-
Pelssers, E.G.M.1
Cohen, M.A.2
Fleer, G.J.3
-
28
-
-
84912535725
-
Free nanoparticle characterization by optical scattering field analysis: opportunities and perspectives
-
Potenza MAC, Milani P (2014) Free nanoparticle characterization by optical scattering field analysis: opportunities and perspectives. J Nanopart Res 16:2680
-
(2014)
J Nanopart Res
, vol.16
, pp. 2680
-
-
Potenza, M.A.C.1
Milani, P.2
-
29
-
-
76649116842
-
Confocal zero-angle dynamic depolarized light scattering
-
Potenza MAC, Sanvito T, Alaimo MD, Degiorgio V, Giglio M (2010) Confocal zero-angle dynamic depolarized light scattering. Eur Phys J E 31:69–72
-
(2010)
Eur Phys J E
, vol.31
, pp. 69-72
-
-
Potenza, M.A.C.1
Sanvito, T.2
Alaimo, M.D.3
Degiorgio, V.4
Giglio, M.5
-
30
-
-
33645660019
-
Analysis of large particle count in fumed silica slurries and its correlation with scratch defects generated by CMP
-
Remsenz EE, Anjur S, Boldridge D, Kamiti M, Li S, Johns T, Dowell C, Kasthurirangan J, Feeney P (2006) Analysis of large particle count in fumed silica slurries and its correlation with scratch defects generated by CMP. J Electrochem Soc 153:G453–G461
-
(2006)
J Electrochem Soc
, vol.153
, pp. 453-461
-
-
Remsenz, E.E.1
Anjur, S.2
Boldridge, D.3
Kamiti, M.4
Li, S.5
Johns, T.6
Dowell, C.7
Kasthurirangan, J.8
Feeney, P.9
-
31
-
-
0031825376
-
In situ optical particle counter with improved coincidence error correction for number concentrations up to 107 particles cm−3
-
Sachweh B, Umhauer H, Ebert F, Büttner H, Friehmelt F (1998) In situ optical particle counter with improved coincidence error correction for number concentrations up to 107 particles cm−3. Aerosol Sci 29:1075–1086
-
(1998)
Aerosol Sci
, vol.29
, pp. 1075-1086
-
-
Sachweh, B.1
Umhauer, H.2
Ebert, F.3
Büttner, H.4
Friehmelt, F.5
-
32
-
-
34147137737
-
Methodological study on the recycle of oxide-chemical mechanical polishing slurry
-
Seo YJ (2007) Methodological study on the recycle of oxide-chemical mechanical polishing slurry. J Korean Phys Soc 50:700–707
-
(2007)
J Korean Phys Soc
, vol.50
, pp. 700-707
-
-
Seo, Y.J.1
-
34
-
-
79960172183
-
Retreatment of silicon slurry by membrane processes
-
Testa F, Coetsier C, Carretier E, Ennahali M, Laborie B, Serafino C, Bulgarelli F, Moulin P (2011) Retreatment of silicon slurry by membrane processes. J Hazard Mater 192:440–450
-
(2011)
J Hazard Mater
, vol.192
, pp. 440-450
-
-
Testa, F.1
Coetsier, C.2
Carretier, E.3
Ennahali, M.4
Laborie, B.5
Serafino, C.6
Bulgarelli, F.7
Moulin, P.8
-
35
-
-
84883369039
-
Recycling a slurry for reuse in chemical mechanical planarization of tungsten wafer: effect of chemical adjustments and comparison between static and dynamic experiments
-
Testa F, Coetsiera C, Carretiera E, Ennahalib M, Laborieb B, Moulina P (2014) Recycling a slurry for reuse in chemical mechanical planarization of tungsten wafer: effect of chemical adjustments and comparison between static and dynamic experiments. Microelectron Eng 113:114–122
-
(2014)
Microelectron Eng
, vol.113
, pp. 114-122
-
-
Testa, F.1
Coetsiera, C.2
Carretiera, E.3
Ennahalib, M.4
Laborieb, B.5
Moulina, P.6
-
36
-
-
47349116087
-
Particle shape and orientation in laser diffraction and static image analysis size distribution analysis of micrometer sized rectangular particles
-
Tinkea AP, Carnicerb A, Govoreanua R, Scheltjensc G, Lauwerysena L, Mertensa N, Vanhouttea K, Brewstera ME (2008) Particle shape and orientation in laser diffraction and static image analysis size distribution analysis of micrometer sized rectangular particles. Powder Technol 186:154–167
-
(2008)
Powder Technol
, vol.186
, pp. 154-167
-
-
Tinkea, A.P.1
Carnicerb, A.2
Govoreanua, R.3
Scheltjensc, G.4
Lauwerysena, L.5
Mertensa, N.6
Vanhouttea, K.7
Brewstera, M.E.8
-
38
-
-
84928384105
-
Single-particle optical sensor with improved sensitivity and dynamic size range. Pat
-
Wells D, Nicoli D (1996) Single-particle optical sensor with improved sensitivity and dynamic size range. Pat. US 5835211 A
-
(1996)
US 5835211 A
-
-
Wells, D.1
Nicoli, D.2
-
39
-
-
8944249979
-
Response of single particle optical counters to nonideal particles
-
Whitby KT, Vomela RA (1967) Response of single particle optical counters to nonideal particles. Environ Sci Technol 10:801–814
-
(1967)
Environ Sci Technol
, vol.10
, pp. 801-814
-
-
Whitby, K.T.1
Vomela, R.A.2
|