Applications of the photodissolution effect in chalcogenide glasses

Photo-Induced Metastability in Amorphous Semiconductors

Volumn , Issue , 2008, Pages 365-382

  Ewen, Peter J S ^a  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHALCOGENIDE GLASS; EMBEDDED STRUCTURES; FABRICATION PROCESS; FABRICATION TECHNIQUE; KEY FEATURE; PHOTOINDUCED EFFECTS; PROCESS COMPLEXITY;

EID: 84956544411     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527602544.ch22     Document Type: Chapter

References (66)

1. M.T. Kostyshin, E.V. Mikhailovskaya, and P.F. Romanenko, Sov. Phys. - Solid State 8, 451 (1966).
2. A.V. Kolobov and S.R. Elliot, Adv. Phys. 40, 625 (1991).
3. A.E. Owen, A.P. Firth, and P.J.S. Ewen, Phil. Mag. B 52, 347 (1985).
4. K. Tanaka, J. Non-Cryst. Solids 138, 1021 (1991).
5. P.J.S. Ewen and A.E. Owen, in High Performance Glasses, M. Cable and J.M. Parker (Eds.), Blackie, Glasgow, 1992, p. 287.
6. A.V. Kolobov, S.R. Elliott, and M.A. Taguirdzhanov, Phil. Mag. B 61, 859 (1990).
7. P.J.S. Ewen, W.T. Taylor, A.P. Firth, and A.E. Owen, Phil. Mag. B 48, L15 (1983).
8. S. Petrova, P. Simidchieva, and A. Buroff, Proc. Conf. "Amorphous Semiconductors - 84", E. Fahri-Vateva and A. Buroff (Eds.), Bulgarian Academy of Sciences, Sofia, 1984, p. 256.
9. M. Janai, Phys. Rev. Lett. 47, 726 (1981).
10. M. Yamaguchi, I. Shimizu, and E. Inoue, J. Non-Cryst. Solids 47, 341 (1982).
11. T. Wagner, G. Dale, P.J.S. Ewen, A.E. Owen, and V. Perina, J. Appl. Phys. 87, 7758 (2000).
12. E. Inoue, H. Kokado, and I. Shimizu, J. Jpn. Soc. Appl. Phys. (Suppl.) 43, 101 (1974).
13. J.M. Lavine and M.J. Buliszak, J. Vac. Sci. Technol. B 14, 3489 (1996).
14. S.A. Lis and I.M. Lavine, Appl. Phys. Lett. 42, 675 (1983).
15. K. Saito, Y. Utsugi, and A. Yoshikawa, J. Appl. Phys. 63, 565 (1988).
16. G.H. Bernstein, W.P. Liu, Y.N. Khawaja, M.N. Kozicki, and D.K. Ferry, J. Vac. Sci. Technol. B 6, 2298 (1988).
17. R. Klabes, A. Thomas, G. Kluge, W. Beyer, R. Grotzschel, and P. Suptitz, Phys. Stat. Sol. A 106, 57 (1988).
18. C.W. Slinger, A. Zakery, P.J.S Ewen, and A.E. Owen, Appl. Opt. 31, 2490 (1992).
19. N. Tohge, T. Minami, and T. Tsubaki, J. Mat. Sci. Lett. 8, 935 (1989).
20. Y. Mizushima, and A. Yoshikawa, in Amorphous Semiconductor Technologies and Devices, Y. Hamakawa (Ed.), Omsha, Tokyo, 1981, p. 277.
21. K.L. Tai, E. Ong, and R.G. Vadimsky, Proc. Electrochem. Soc. 82-89, 9 (1982).
22. A.V. Kolobov, J. Non-Cryst. Solids 166, 1159 (1993).
23. Y. Utsugi, A. Yoshikawa, and T. Kitayama, Microelectronic Eng. 2, 281 (1984).
24. S.R. Elliott, in Materials Science and Technology, Vol. 9, R.W. Cahn, P. Haasen and E.J. Kramer (Eds.), VCH, Weinheim, 1991, p. 375.
25. S.A. Dumford and J.M. Lavine, J. Vac. Sci. Technol. B 12, 44 (1994).
26. M.N. Kozicki, S.W. Hsia, A.E. Owen, and P.J.S. Ewen, J. Non-Cryst. Solids 138, 1341 (1991).
27. K.J. Polasko, R.F.W. Pease, E.E. Marinero, and M.R. Cagan, J. Vac. Sci. Technol. B 3, 319 (1985).
28. K. Balasubramanyam, L.J. Chen, A.L. Ruoff, and E.D. Wolf, J. Appl. Phys. 53, 5975 (1982).
29. Y.C. Liang, H. Yamanaka, and K. Tada, Thin Solid Films 165, 55 (1988).
30. S.A. Kostyukevych, Proc. SPIE 3424, 20 (1998).
31. J. Eneva, A. Gushterov, B. Tomerova, and B. Mednikarov, J. Mat. Sci.: Mat. Electron. 10, 529 (1999).
32. A.F. Bello, R.A. Jishi, and J. Imaging Sci. Technol. 36, 562 (1992).
33. J. Plocharski, J. Przyluski, and H. Wycislik, J. Non-Cryst. Solids 56, 325 (1983).
34. M.S. Chang and J.T. Chen, Appl. Phys. Lett. 33, 892 (1978).
35. I.Z. Indutnyi, A.V. Stronski, S.A. Kostioukevitch, P.F. Romanenko, P.E. Schepeljavi, and I.I. Robur, Opt. Eng. 34, 1031 (1995).
36. P.J.S. Ewen, A. Zekak, C.W. Slinger, G. Dale, D.A. Pain, and A.E. Owen, J. Non-Cryst. Solids 164-166, 1247 (1993).
37. T. Wagner and P.J.S. Ewen, J. Non-Cryst. Solids 266-269, 979 (2000).
38. G. Dale and P.J.S. Ewen, IEE Proc. - Optoelectron. 144, 426 (1997).
39. I.Z. Indutnyi, M.T. Kostishin, P.F. Romanenko, P.F., and A.V. Stronskii, J. Inf. Rec. Mater. 19, 329 (1991).
40. R.R. Gerke, T.G. Dubrovina, P.A. Dmitrikov, and M.D. Mikhailov, J. Opt. Technol. 64, 1008 (1997).
41. M.V. Sopinskyy, P.F. Romanenko, I.Z. Indutnyy, and E.F.Venger, J. Optoelectron. Adv. Mater. 3, 383 (2001).
42. E.B. Grann, M.G. Moharam, and D.A. Pommet, J. Opt. Soc. Am. A12, 333 (1995).
43. E.B. Grann and M.G. Moharam, J. Opt. Soc. Am. A13, 988 (1996).
44. M.B. Stern, Microelectron. Eng. 32, 369 (1996).
45. D. Daly and T. Hessler, Photonics Spectra 35(7), 120 (2001).
46. N.P. Eisenberg, M. Manevich, M. Klebanov, V. Lyubin, and S. Shtutina, Proc. 3rd EOS Topical Meeting on Microlens Arrays, 11th, 12th May 1995, Teddington, UK, 1995, p. 29.
47. N.P. Eisenberg, M. Manevich, M. Klebanov, V., Lyubin, and S. Shtutina, J. Non-Cryst. Solids 200, 766 (1996).
48. T. Ogawa, M. Wakaki, S. Tatumi, Y. Miyanishi, and J. Lee, Proc. SPIE 2778, 275 (1996).
49. J.D. Joannopoulos, R.D. Meade, and J.N. Winn, Photonic Crystals: Molding the Flow of Light, Princeton University Press, Princeton, 1995.
50. G. Dale, R.M. Langford, P.J.S. Ewen, and C.M. Reeves, J. Non-Cryst. Solids 266-269, 913 (2000).
51. P.J.S. Ewen, A.E. Owen, and G. Dale, Final Report on EPSRC Grant GR/L73296 (1999).
52. Y. Somemura, A. Yoshikawa, and Y. Utsugi, Jpn. J. Appl. Phys., 31, 3712 (1992).
53. R. Tomova, J. Assa, R. Stoycheva-Topalova, and A. Buroff, J. Non-Cryst. Solids 260, 195 (1999).
54. R. Tomova, G. Spassov, R. Stoycheva-Topalova, and A. Buroff, J. Non-Cryst. Solids 266-269, 985 (2000).
55. J. Kawamura, J. Iriyama, and Y. Nakamura, Solid State Ionics 90, 303 (1996).
56. M.N. Kozicki, US Patent 5500532 (1996).
57. B. Block, A.O. Thornton, J. Ingwersen, and W. Daschner, US Patent 6033766 (2000).
58. M.N. Kozicki, M. Yun, L. Hilt, and A. Singh, in Solid-State Ionic Devices, E.D. Wachs-man, J.R. Akridge, M. Liu, and N. Yamazoe (Eds.), Electrochemical Society Series 99, 298 (1999).
59. M.N. Kozicki, M.Yun, S.J. Yang, J.P. Aberouette, and J.P. Bird, Superlattices Microstructures 27, 485 (2000).
60. M.N. Kozicki and W.C. West, US Patent 5761115 (1998).
61. M. Mitkova and M.N. Kozicki, J. Non-Cryst. Solids 299-302, 1023 (2002).
62. M. Kawasaki, J. Kawamura, Y. Nakamura, and M. Aniya, Solid State Ionics 123, 259 (1999).
63. S. Mamedov and A. Kisliuk, J. Vac. Sci. Technol. B 14, 1864 (1996).
64. K. Petkov, R. Todorov, L. Tichy, and P.J.S. Ewen, Proc. 19th Int. Congress on Glass, 1-6 July 2001, Edinburgh.
65. M. Vlcek, P.J.S. Ewen, and T. Wagner, J. Non-Cryst. Solids 227-230, 743 (1998).
66. M.V. Sopinskyy and M.T. Kostyshin, J. Optoelectron. Adv. Mater. 3, 411 (2001).