Fabrication and testing of microlens arrays for the IR based on chalcogenide glassy resists

Journal of Non-Crystalline Solids

Volumn 198-200, Issue PART 2, 1996, Pages 766-768

  Eisenberg, N P ^a   Manevich, M ^a   Klebanov, M ^b   Lyubin, V ^b   Shtutina, S ^b  

^a JERUSALEM COLLEGE OF TECHNOLOGY   (Israel)

^b BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

DOPING (ADDITIVES); FABRICATION; GLASS; INFRARED RADIATION; LITHOGRAPHY; MATERIALS TESTING; OPTICAL RESOLVING POWER; PHASE TRANSITIONS; PHOTORESISTS; REFRACTIVE INDEX; SILVER; SYSTEMS (METALLURGICAL);

INORGANIC CHALCOGENIDE; MICROLENS ARRAYS; MICROLENSES; PHOTODOPING;

LENSES;

EID: 0030563436     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-3093(96)00118-4     Document Type: Article

References (5)

1. N.P. Eisenberg, A. Karsenty, J. Broder, M. Aitbol and N. Ben Yossef, Proc. SPIE 1038 (1988) 388.
2. E.J. Gratix, Proc. SPIE 1992 (1993) 206.
3. A.G. Poleshchuk, E.G. Churin, Y.I. Yurlov and B. Mednikarov, J. Imaging Sci. 30 (1986) 132.
4. V.M. Lyubin, A.M. Sedikh, N.N. Smirnova and V.P. Shilo, Microelectron. USSR 18 (1989) 523.
5. C.W. Slinger, A. Zakery, P.J.S. Ewen and A.E. Owen, Appl. Opt. 31 (1992) 2490.