Binary optics: A VLSI-based microoptics technology

Microelectronic Engineering

Volumn 32, Issue 1-4 SPEC. ISS., 1996, Pages 369-388

  Stern, Margaret B ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Binary optics; VLSI based microoptics

Indexed keywords

DIFFRACTION; DIFFRACTION GRATINGS; ETCHING; OPTICS; REFRACTION; ULSI CIRCUITS;

BINARY OPTICS;

VLSI CIRCUITS;

EID: 0030232887     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(95)00369-X     Document Type: Article

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