Photolithographic method for producing metal-dissolved diffractive structures in As-S glasses

IEE Proceedings: Optoelectronics

Volumn 144, Issue 6, 1997, Pages 426-432

  Dale, G ^a   Ewen, P J S ^a  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

Author keywords

As S glasses; Diffractivc optical elements; Metal photodissolution

Indexed keywords

ARSENIC COMPOUNDS; COPPER; DIFFRACTION GRATINGS; EVAPORATION; HOLOGRAPHY; MICROSTRUCTURE; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SILVER; SUBSTRATES; SULFUR;

CHALCOGENIDE; METAL PHOTODISSOLUTION EFFECTS;

OPTICAL GLASS;

EID: 0031336761     PISSN: 13502433     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-opt:19971347     Document Type: Article

References (20)

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