Uncertainty quantification study for a comprehensive electrostatic MEMS switch model

Proceedings of ISMA 2010 - International Conference on Noise and Vibration Engineering, including USD 2010

Volumn , Issue , 2010, Pages 4849-4863

  Snow, M ^a   Bajaj, A ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC SWITCHES; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MONTE CARLO METHODS; STRUCTURAL DYNAMICS; SURFACE PROPERTIES;

COMPREHENSIVE MODEL; DIRECT SIMULATION MONTE CARLO; ELECTROSTATIC MEMS; MULTIVARIATE ADAPTIVE REGRESSION SPLINES; PERFORMANCE CHARACTERISTICS; PHYSICAL PARAMETERS; SQUEEZE-FILM DAMPING; UNCERTAINTY QUANTIFICATIONS;

UNCERTAINTY ANALYSIS;

EID: 84951085978     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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