Impact dynamics of MEMS switches

Nonlinear Dynamics

Volumn 60, Issue 3, 2010, Pages 327-339

  LaRose III, Ronald P ^a   Murphy, Kevin D ^a  

^a UNIVERSITY OF CONNECTICUT   (United States)

Author keywords

Impact dynamics; MEMS switches; Squeeze film damping

Indexed keywords

AIR DAMPING; APPLIED VOLTAGES; CRITICAL VALUE; DOPED SILICON; FAST SWITCHES; FLOW OF CURRENT; IMPACT BEHAVIOR; IMPACT DYNAMICS; INERTIAL EFFECT; MEMS SWITCHES; MICRO BEAMS; PARAMETER COMBINATION; PULL-IN; PULL-IN VOLTAGE; QUASI-STATIC; RADIO FREQUENCY-MEMS; SQUEEZE-FILM DAMPING; SUBSTRATE CONTACT;

ELECTRIC SWITCHES;

DAMPING;

EID: 77953361407     PISSN: 0924090X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11071-009-9598-5     Document Type: Article

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