Fabrication of solid state nanopore in thin silicon membrane using low cost multistep chemical etching

Materials

Volumn 8, Issue 11, 2015, Pages 7389-7400

  Khan, Muhammad Shuja ^a   Williams, John Dalton ^a  

^a UNIVERSITY OF ALABAMA IN HUNTSVILLE   (United States)

Author keywords

Atomic force microscopy; Electrochemical etching; HF; Silicon; Solid state nanopore

Indexed keywords

ATOMIC FORCE MICROSCOPY; BIOLOGICAL MEMBRANES; DIAGNOSIS; ELECTROCHEMICAL ETCHING; FABRICATION; HAFNIUM; LIGHT EMITTING DIODES; LIPID BILAYERS; PROTEINS; SEMICONDUCTING SILICON; SILICON; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

ARTIFICIAL LIPID BILAYERS; LABEL-FREE DETECTION; LOW CURRENT DENSITY; MEMBRANE PROTEINS; PHARMACEUTICAL RESEARCH; SOLID-STATE NANOPORE; THIN SILICON MEMBRANE; TRANS-MEMBRANE PROTEINS;

NANOPORES;

EID: 84949643605     PISSN: None     EISSN: 19961944     Source Type: Journal    
DOI: 10.3390/ma8115390     Document Type: Article

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