Pore formation in p-type silicon in solutions containing different types of alcohol

Nanoscale Research Letters

Volumn 7, Issue , 2012, Pages

  Urata, Tomoko ^a   Fukami, Kazuhiro ^a   Sakka, Tetsuo ^a   Ogata, Yukio H ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOLUTION; FLUORINE COMPOUNDS; HYDROFLUORIC ACID;

HF CONCENTRATION; HYDROGEN FLUORIDE; LAYER FORMATION; LOW CONCENTRATIONS; MACROPORE FORMATION; MACROPOROUS STRUCTURES; P-TYPE SILICON; PORE FORMATION;

POROUS SILICON;

EID: 84863992584     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-7-329     Document Type: Article

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