Effect of anodization current density on pore geometry in macroporous silicon

Semiconductor Science and Technology

Volumn 28, Issue 10, 2013, Pages

  Peckham, J ^a   Andrews, G T ^a  

^a MEMORIAL UNIVERSITY OF NEWFOUNDLAND   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIZATION CURRENT; IMAGE PROCESSING ALGORITHM; MACRO POROUS SILICON; MACROPORE FORMATION; MACROPORES; PORE DIAMETERS; PORE GEOMETRY; SQUARE-ROOT DEPENDENCE;

CURRENT DENSITY; HYDROFLUORIC ACID; IMAGE PROCESSING; SCANNING ELECTRON MICROSCOPY; SILICON;

POROUS SILICON;

EID: 84884880780     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/28/10/105027     Document Type: Article

References (17)

1. Lévy-Clément C, Lust S, Bastide S, Lê Q N and Sarti D 2003 Macropore formation on p-type multicrystalline silicon Phys. Status Solidi a 197 27
2. Ponomarev E A and Lévy-Clément C 1998 Macropore formation on p-type Si in fluoride containing organic electrolytes Electrochem. Solid State Lett. 1 42-45 (Pubitemid 128551939)
3. Sun W, Puzas J E, Sheu T J and Fauchet P M 2007 Porous silicon as a cell interface for bone tissue engineering Phys. Status Solidi a 204 1429 (Pubitemid 47120004)
4. Müller F, Birner A, Schilling J, Gösele U, Kettner C and Hänggi P 2000 Membranes for micropumps from macroporous silicon Phys. Status Solidi a 182 585-90 (Pubitemid 32871570)
5. Nicewarner-Peña S R, Freeman R G, Reiss B D, He L, Peña D J, Walton I D, Cromer R, Keating C D and Natan M J 2001 Submicrometer metallic barcodes Science 294 137-41 (Pubitemid 32952962)
6. Schilling J et al 2001 A model system for two-dimensional and three-dimensional photonic crystals: macroporous silicon J. Opt. A: Pure Appl. Opt. 3 S121 (Pubitemid 33093957)
7. Theunissen M J J 1972 Etch channel formation during anodic dissolution of n-type silicon in aqueous hydrofluoric acid J. Electrochem. Soc. 119 351
8. Lehmann V 1993 The physics of macropore formation in low doped n-type silicon J. Electrochem. Soc. 140 2836-43
9. Föll H, Christopersen M, Cartensen J and Hasse G 2002 Formation and application of porous silicon Mater. Sci. Eng. 39 93
10. Lust S and Lévy-Clément C 2000 Macropore formation on medium doped p-type silicon Phys. Status Solidi a 182 17-21 (Pubitemid 32871478)
11. Lust S and Lévy-Clément C 2002 Chemical limitations of macropore formation on medium-doped p-type silicon J. Electrochem. Soc. 149 C338-44 (Pubitemid 34697441)
12. Ponomarev E A and Lévy-Clément C 2000 Macropore formation on p-type silicon J. Porous Mater. 7 51-56 (Pubitemid 30536320)
13. Lehmann V and Rönnebeck S 1999 The physics of macropore formation in low doped p type silicon J. Electrochem. Soc. 146 2968
14. Wehrspohn R B, Chazalviel J N and Ozanam F 1998 Macropore formation in highly resistive p-type crystalline silicon J. Electrochem. Soc. 145 2958-61 (Pubitemid 128578889)
15. MATLAB 2012 MATLAB version 7.14.0.739 (R2012a) (Natick, MA: The MathWorks Inc.)
16. Propst E K and Kohl P A 1994 The electrochemical oxidation of silicon and formation of porous silicon in acetonitrile J. Electrochem. Soc. 141 1006-13
17. Chazalviel J-N and Ozanam F 2005 Ordered Porous Nanostructures and Applications ed R B Wehrspohn (Berlin: Springer) chapter 2 pp 15-35