Controlled deformation of Si3N4 nanopores using focused electron beam in a transmission electron microscope

Nanotechnology

Volumn 22, Issue 11, 2011, Pages

  Liu, Song ^a   Zhao, Qing ^a   Li, Qingtao ^a   Zhang, Hengbin ^a   You, Liping ^a   Zhang, Jingmin ^a   Yu, Dapeng ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPETITION PROCESS; CONTROLLABLE DEFORMATIONS; CRITICAL DIMENSION; FOCUSED ELECTRON BEAMS; FORMATION DYNAMICS; HIGH ENERGY ELECTRON BEAMS; HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPES; KNOCK-ON EFFECT; NANOMETER PRECISION; TRANSMISSION ELECTRON MICROSCOPE;

DEFORMATION; ELECTRON BEAMS; ELECTRON MICROSCOPES; ELECTRON OPTICS; NANOPORES; NANOSTRUCTURES; SURFACE TENSION; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRONS;

EID: 79951833158     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/11/115302     Document Type: Article

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