Effects of alcohol diluents on nanopore structure of electrochemically etched silicon membrane

Microelectronic Engineering

Volumn 141, Issue , 2015, Pages 160-167

  Burham, Norhafizah ^a,b   Hamzah, Azrul Azlan ^a   Majlis, Burhanuddin Yeop ^a  

^a INSTITUTE OF MICROENGINEERING AND NANOELECTRONICS IMEN   (Malaysia)

^b UNIVERSITI TEKNOLOGI MARA   (Malaysia)

Author keywords

Alcohol; Electrochemical etch; Hydrofluoric acid (HF); Nanoporous; Silicon membrane

Indexed keywords

ALCOHOLS; ARTIFICIAL ORGANS; ELECTROCHEMICAL ETCHING; ELECTROLYTES; HYDROFLUORIC ACID; MEMBRANES; NANOPORES; PARTICLE SIZE; PORE STRUCTURE; SILICON;

BIOLOGICAL APPLICATIONS; BIOLOGICAL PARTICLES; ELECTROLYTE AQUEOUS SOLUTIONS; FABRICATION PARAMETERS; NANO-POROUS; NANO-SIZED PARTICLES; NANOPOROUS STRUCTURES; SILICON MEMBRANES;

SUBSTRATES;

EID: 84925698741     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2015.03.019     Document Type: Article

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