High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2

Nano Research

Volumn 8, Issue 9, 2015, Pages 2842-2849

  Cartamil Bueno, Santiago J ^a   Steeneken, Peter G ^a   Tichelaar, Frans D ^a   Navarro Moratalla, Efren ^b   Venstra, Warner J ^a   van Leeuwen, Ronald ^a   Coronado, Eugenio ^b   van der Zant, Herre S J ^a   Steele, Gary A ^a   Castellanos Gomez, Andres ^a,c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b UNIVERSITY OF VALENCIA   (Spain)

^c INSTITUTO MADRILEÑO DE ESTUDIOS AVANZADOS EN NANOCIENCIA IMDEA NANOCIENCIA   (Spain)

Author keywords

high quality factor; laser oxidation; mechanical resonators; optical interferometer; tantalum oxide; TaSe2

Indexed keywords

EID: 84941733253     PISSN: 19980124     EISSN: 19980000     Source Type: Journal    
DOI: 10.1007/s12274-015-0789-8     Document Type: Article

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