Low temperature grown highly texture aluminum alloyed iron silicide on silicon substrate for opto-electronic applications

Materials Letters

Volumn 159, Issue , 2015, Pages 455-458

  Dalapati, Goutam Kumar ^a   Cheh Tan, Cheng ^a   Masudy Panah, Saeid ^a   Ru Tan, Hui ^a   Chi, Dongzhi ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

Al alloyed iron silicide (FeSi2< inf>(Al)); Alpha phase iron silicide; Highly texture FeSi2< inf>(Al); Low thermal budget

Indexed keywords

ALUMINUM ALLOYS; AMORPHOUS MATERIALS; ANNEALING; BUDGET CONTROL; DEPOSITION; FIELD EFFECT TRANSISTORS; INTERFACES (MATERIALS); IRON; RAPID THERMAL ANNEALING; SILICIDES; SILICON; SILICON ALLOYS; TEMPERATURE; TERNARY ALLOYS; THIN FILMS;

ANNEALING TEMPERATURES; ELECTRONIC APPLICATION; IRON SILICIDES; LOW THERMAL BUDGET; LOW-TEMPERATURE GROWN; OPTOELECTRONIC APPLICATIONS; PREFERENTIAL ORIENTATION; RAPID THERMAL ANNEALING (RTA);

ALUMINUM;

EID: 84937555443     PISSN: 0167577X     EISSN: 18734979     Source Type: Journal    
DOI: 10.1016/j.matlet.2015.07.066     Document Type: Article

References (15)

1. D. Leong, M. Harry, K.J. Reeson, and K.P. Homewood A silicon/iron-disilicide light-emitting diode operating at a wavelength of 1.5 μm Nature 387 1997 686 688
2. C.C. Tan, G.K. Dalapati, H.R. Tan, M. Bosman, H.K. Hui, S. Tripathy, and D.Z. Chi Crystallization of sputter-deposited amorphous (FeSi2)1-xAlx thin films Cryst. Growth Des. 15 2015 1692 1696
3. J. Zhang, Q. Xie, P. Yu, Q. Xiao, Y. Zhang, Z. Yang, and Y. Liang Preparation of α-FeSi2 by laser annealing Thin Solid Films 516 2008 8625 8628
4. Z.-Q. Zou, L.-M. Sun, G.-M. Shi, X.-Y. Liu, and X. Li Homogeneous crystalline FeSi2 films of c (4×8) phase grown on Si (111) by reactive deposition epitaxy Nanoscale Res. Lett. 8 2013 510
5. Z. Liu, S. Wang, N. Otogawa, Y. Suzuki, M. Osamura, Y. Fukuzawa, T. Ootsuka, Y. Nakayama, H. Tanoue, and Y. Makita A thin-film solar cell of high-quality β-FeSi2/Si heterojunction prepared by sputtering Solar Energy Mater. Solar Cells 90 2006 276 282
6. A. Kumar, G.K. Dalapati, H. Hidayat, F. Law, H.R. Tan, P.I. Widenborg, B. Hoex, C.C. Tan, D.Z. Chi, and A.G. Aberle Integration of β-FeSi2 with poly-Si on glass for thin-film photovoltaic applications RSC Adv. 3 2013 7733 7738
7. J. Xu, R. Yao, and Y. Liu Growth of β-FeSi2 thin film on textured silicon substrate for solar cell application Appl. Surf. Sci. 257 2011 10168 10171
8. M. Shaban, K. Nomoto, S. Izumi, and T. Yoshitake Characterization of near-infrared n-type-β-FeSi2/p-type Si heterojunction photodiodes at room temperature Appl. Phys. Lett. 94 2009 222113
9. J. Xu, and Y. Yang Effects of band offset and doping concentration on the photovoltaic properties of n-β-FeSi2/p-Si and p-β-FeSi2/n-Si heterojunction solar cells Surf. Inter. Anal. 46 2014 248 253
10. G.K. Dalapati, S.L. Liew, A.S.W. Wong, Y. Chai, S.Y. Chiam, and D.Z. Chi Photovoltaic characteristics of p-β-FeSi2(Al)/n-Si(100) heterojunction solar cells and the effects of interfacial engineering Appl. Phys. Lett. 98 2011 013507
11. N. Momose, J. Shirai, H. Tahara, Y. Todoroki, T. Hara, and Y. Hashimoto Toward the β-FeSi2p-n homo-junction structure Thin Solid Films 515 2007 8210 8215
12. G.K. Dalapati, A. Kumar, C.C. Tan, S.L. Liew, P. Sonar, H.L. Seng, H.K. Hui, S. Tripathy, and D.Z. Chi Impact of Al passivation and cosputter on the structural property of β-FeSi2 for Al-Doped β-FeSi2/n-Si(100) based solar cells application ACS Appl. Mater. Interfaces 5 2013 5455 5460
13. N. Otogawa, S. Wang, S. Kihara, Z. Liu, Y. Fukuzawa, Y. Suzuki, M. Osamura, T. Ootsuka, T. Mise, K. Miyake, Y. Nakayama, H. Tanoue, and Y. Makita Semiconductor-metal phase transition of iron disilicide by laser annealing and its application to form device electrodes Thin Solid Films 461 2004 223 226
14. F.X. Zhang, and S. Saxena Phase stability and thermal expansion property of FeSi2 Scripta Mater. 54 2006 1375 1377
15. M. Naito, M. Ishimaru, J.A. Valdez, and K.E. Sickafus Electron irradiation-induced phase transformation in α-FeSi2 J. Appl. Phys. 104 2008 073524