Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays

Sensors and Actuators, B: Chemical

Volumn 216, Issue , 2015, Pages 374-383

  Annanouch, F E ^a   Gracia I ^b   Figueras, E ^b   Llobet, E ^a   Cane C ^b   Vallejos, S ^b,c  

^a UNIVERSITAT ROVIRA I VIRGILI   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^c BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

AACVD; Functionalization; Gas sensor arrays; Localized synthesis; Nanostructures; Tungsten oxide

Indexed keywords

AEROSOLS; CARBON MONOXIDE; CHEMICAL SENSORS; GAS DETECTORS; GASES; NANOSTRUCTURES;

AACVD; FUNCTIONALIZATIONS; FUNCTIONALIZED MATERIALS; FUNCTIONALIZED NANOSTRUCTURES; GAS SENSOR MICROARRAYS; LOCALIZED SYNTHESIS; SENSING PROPERTY; TUNGSTEN OXIDE;

PRINCIPAL COMPONENT ANALYSIS;

EID: 84928812116     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2015.03.076     Document Type: Article

References (50)

1. A. Hierlemann, and H. Baltes CMOS-based chemical microsensors Analyst 128 2003 15 28
2. S.-W. Chiu, and K.-T. Tang Towards a chemiresistive sensor-integrated electronic nose: a review Sensors 13 2013 14214 14247
3. R. Bogue Recent developments in MEMS sensors: a review of applications, markets and technologies Sens. Rev. 33 2013 300 304
4. S. Lakkis, R. Younes, Y. Alayli, and M. Sawan Review of recent trends in gas sensing technologies and their miniaturization potential Sens. Rev. 34 2014 24 35
5. A. Vergara, R. Calavia, R.M. Vázquez, A. Mozalev, A. Abdelghani, R. Huerta, E.H. Hines, and E. Llobet Multifrequency interrogation of nanostructured gas sensor arrays: a tool for analyzing response kinetics Anal. Chem. 84 2012 7502 7510
6. K.J. Choi, and H.W. Jang One-dimensional oxide nanostructures as gas-sensing materials: review and issues Sensors 10 2010 4083 4099
7. A. Gurlo Nanosensors: does crystal shape matter? Small 6 2010 2077 2079
8. T. Stoycheva, S. Vallejos, C. Blackman, S.J.A. Moniz, J. Calderer, and X. Correig Important considerations for effective gas sensors based on metal oxide nanoneedles films Sens. Actuators B 161 2012 406 413
9. S. Vallejos, P. Umek, T. Stoycheva, F. Annanouch, E. Llobet, X. Correig, P. De Marco, C. Bittencourt, and C. Blackman Single-step deposition of Au- and Pt-nanoparticle-functionalized tungsten oxide nanoneedles synthesized via aerosol-assisted CVD, and used for fabrication of selective gas microsensor arrays Adv. Funct. Mater. 23 2013 1313 1322
10. X. Chen, C.K.Y. Wong, C.A. Yuan, and G. Zhang Nanowire-based gas sensors Sens. Actuators B 177 2013 178 195
11. A. Ponzoni, E. Comini, I. Concina, M. Ferroni, M. Falasconi, E. Gobbi, V. Sberveglieri, and G. Sberveglieri Nanostructured metal oxide gas sensors, a survey of applications carried out at SENSOR lab, Brescia (Italy) in the security and food quality fields Sensors 12 2012 17023 17045
12. Y. Liu, J. Parisi, X. Sun, and Y. Lei Solid-state gas sensors for high temperature applications - a review J. Mater. Chem. A 2 2014 9919 9943
13. M.G.S. Forum MNT Gas Sensor Roadmap v3.0 2006 http://www.gas-sensor-roadmap.com/
14. J. Huang, and Q. Wan Gas sensors based on semiconducting metal oxide one-dimensional nanostructures Sensors 9 2009 9903 9924
15. B.D. Sosnowchik, L. Lin, and O. Englander Localized heating induced chemical vapor deposition for one-dimensional nanostructure synthesis J. Appl. Phys. 107 2010
16. S. Barth, R. Jimenez-Diaz, J. Sama, J. Daniel Prades, I. Gracia, J. Santander, C. Cane, and A. Romano-Rodriguez Localized growth and in situ integration of nanowires for device applications Chem. Commun. 48 2012 4734 4736
17. E. Comini, C. Baratto, G. Faglia, M. Ferroni, A. Vomiero, and G. Sberveglieri Quasi-one dimensional metal oxide semiconductors: preparation, characterization and application as chemical sensors Prog. Mater. Sci. 54 2009 1 67
18. S. Vallejos, P. Umek, and C. Blackman AACVD control parameters for selective deposition of tungsten oxide nanostructures J. Nanosci. Nanotechnol. 11 2011 8214 8220
19. S. Vallejos, T. Stoycheva, P. Umek, C. Navio, R. Snyders, C. Bittencourt, E. Llobet, C. Blackman, S. Moniz, and X. Correig Au nanoparticle-functionalised WO3 nanoneedles and their application in high sensitivity gas sensor devices Chem. Commun. 47 2011 565 567
20. S. Vallejos, R. Cumeras, C. Calaza, N. Sabate, E. Figueras, C. Cane, and I. Gracia Localized heating to tungsten oxide nanostructures deposition on gas microsensor arrays via aerosol assisted CVD The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII 2013 1166 1169
21. G.F. Fine, L.M. Cavanagh, A. Afonja, and R. Binions Metal oxide semi-conductor gas sensors in environmental monitoring Sensors 10 2010 5469 5502
22. S. Vallejos, V. Khatko, K. Aguir, K.A. Ngo, J. Calderer, I. Gràcia, C. Cané, E. Llobet, and X. Correig Ozone monitoring by micro-machined sensors with WO3 sensing films Sens. Actuators B 126 2007 573 578
23. A. Labidi, C. Jacolin, M. Bendahan, A. Abdelghani, G.J.K. Aguir, and M. Maaref Impedance spectroscopy on WO3 gas sensor Sens. Actuators B 106 2005 713 718
24. R. Calavia, A. Mozalev, R. Vazquez, I. Gracia, C. Cané, R. Ionescu, and E. Llobet Fabrication of WO3 nanodot-based microsensors highly sensitive to hydrogen Sens. Actuators B 149 2010 352 361
25. M. Ahsan, M.Z. Ahmad, T. Tesfamichael, J. Bell, W. Wlodarski, and N. Motta Low temperature response of nanostructured tungsten oxide thin films toward hydrogen and ethanol Sens. Actuators B 173 2012 789 796
26. L.F. Reyes, A. Hoel, S. Saukko, P. Heszler, V. Lantto, and C.G. Granqvist Gas sensor response of pure and activated WO3 nanoparticle films made by advanced reactive gas deposition Sens. Actuators B 117 2006 128 134
27. M. Stankova, X. Vilanova, J. Calderer, E. Llobet, P. Ivanov, I. Gràcia, C. Cané, and X. Correig Detection of SO2 and H2S in CO2 stream by means of WO3-based micro-hotplate sensors Sens. Actuators B 102 2004 219 225
28. Y. Li, X. Su, J. Jian, and J. Wang Ethanol sensing properties of tungsten oxide nanorods prepared by microwave hydrothermal method Ceram. Int. 36 2010 1917 1920
29. S. Vallejos, V. Khatko, J. Calderer, I. Gracia, C. Canè, E. Llobet, and X. Correig Micro-machined WO3-based sensors selective to oxidizing gases Sens. Actuators B 132 2008 209 215
30. S. Ashraf, C.S. Blackman, R.G. Palgrave, S.C. Naisbitt, and I.P. Parkin Aerosol assisted chemical vapour deposition of WO3 thin films from tungsten hexacarbonyl and their gas sensing properties J. Mater. Chem. 17 2007 3708 3713
31. S. Vallejos, I. Gràcia, E. Figueras, and C. Cané Catalyst-free vapor-phase method for direct integration of gas sensing nanostructures with polymeric transducing platforms J. Nanomater. 2014 2014 9
32. S. Da-Shan, S. Lei, S. Ji-Rong, and S. Bao-Gen Local resistance switching at grain and grain boundary surfaces of polycrystalline tungsten oxide films Nanotechnology 22 2011 254008
33. C.K. Tsung, W.B. Hong, Q.H. Shi, X.S. Kou, M.H. Yeung, J.F. Wang, and G.D. Stucky Shape- and orientation-controlled gold nanoparticles formed within mesoporous silica nanofibers Adv. Funct. Mater. 16 2006 2225 2230
34. J.M. Kim, H.-I. Joh, S.M. Jo, D.J. Ahn, H.Y. Ha, S.-A. Hong, and S.-K. Kim Preparation and characterization of Pt nanowire by electrospinning method for methanol oxidation Electrochim. Acta 55 2010 4827 4835
35. J. Décobert, R. Guillamet, C. Mocuta, G. Carbone, and H. Guerault Structural characterization of selectively grown multilayers with new high angular resolution and sub-millimeter spot-size X-ray diffractometer J. Cryst. Growth 370 2013 154 156
36. C. Santato, M. Odziemkowski, M. Ulmann, and J. Augustynski Crystallographically oriented mesoporous WO3 films: synthesis, characterization, and applications J. Am. Chem. Soc. 123 2001 10639 10649
37. Y.-T. Hsieh, M.-W. Huang, C.-C. Chang, U.-S. Chen, and H.-C. Shih Growth and optical properties of uniform tungsten oxide nanowire bundles via a two-step heating process by thermal evaporation Thin Solid Films 519 2010 1668 1672
38. J.Y. Luo, S.Z. Deng, Y.T. Tao, F.L. Zhao, L.F. Zhu, L. Gong, J. Chen, and N.S. Xu Evidence of localized water molecules and their role in the gasochromic effect of WO3 nanowire films J. Phys. Chem. C 113 2009 15877 15881
39. T. Sergio Work function, electronegativity, and electrochemical behaviour of metals: II. Potentials of zero charge and "electrochemical" work functions J. Electroanal. Chem. Interfacial Electrochem. 33 1971 351 378
40. T. He, and J. Yao Photochromic materials based on tungsten oxide J. Mater. Chem. 17 2007 4547 4557
41. N. Yamazoe, and K. Shimanoe Theory of power laws for semiconductor gas sensors Sens. Actuators B 128 2008 566 573
42. S. Ashraf, C.S. Blackman, S.C. Naisbitt, and I.P. Parkin The gas-sensing properties of WO3-x thin films deposited via the atmospheric pressure chemical vapour deposition (APCVD) of WCl6 with ethanol Meas. Sci. Technol. 19 2008 1 9
43. J.L. Silveira, L.B. Braga, A.C.C. de Souza, J.S. Antunes, and R. Zanzi The benefits of ethanol use for hydrogen production in urban transportation Renew. Sustain. Energ. Rev. 13 2009 2525 2534
44. M. Stankova, X. Vilanova, J. Calderer, E. Llobet, J. Brezmes, I. Gràcia, C. Cané, and X. Correig Sensitivity and selectivity improvement of rf sputtered WO3 microhotplate gas sensors Sens. Actuators B 113 2006 241 248
45. D.J. Smith, J.F. Vatelino, R.S. Falconer, and E.L. Wittman Stability, sensitivity and selectivity of tungsten trioxide films for sensing applications Sens. Actuators B 13 1993 264 268
46. C. Zhang, A. Boudiba, C. Navio, C. Bittencourt, M.-G. Olivier, R. Snyders, and M. Debliquy Highly sensitive hydrogen sensors based on co-sputtered platinum-activated tungsten oxide films Int. J. Hydrog. Energy 36 2011 1107 1114
47. F. Hernández-Ramírez, A. Tarancón, O. Casals, J. Arbiol, A. Romano-Rodríguez, and J.R. Morante High response and stability in CO and humidity measures using a single SnO2 nanowire Sens. Actuators B: Chem. 121 2007 3 17
48. J.F. McAleer, P.T. Moseley, J.O.W. Norris, D.E. Williams, and B.C. Tofield Tin dioxide gas sensors. Part 2. The role of surface additives J. Chem. Soc., Faraday Trans. 84 1988 441 457
49. D. Koziej, M. Hubner, N. Barsan, U. Weimar, M. Sikora, and J.-D. Grunwaldt Operando X-ray absorption spectroscopy studies on Pd-SnO2 based sensors Phys. Chem. Chem. Phys. 11 2009 8620 8625
50. M. Hübner, D. Koziej, M. Bauer, N. Barsan, K. Kvashnina, M.D. Rossell, U. Weimar, and J.-D. Grunwaldt The structure and behavior of platinum in SnO2-based sensors under working conditions Angew. Chem. Int. Ed. 50 2011 2841 2844